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SEMI E90-0705 © SEMI 1999, 2005 20 Parameter Req/Ind Rsp/Conf Description SubstrateObjectAttributes M = SubstrateID, SubstType, and at l east one of the following must be included: SubstS tate, Su bstProcState. See Updat…

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SEMI E90-0705 © SEMI 1999, 2005 19
Dictionary Parameter Form Description
(List of)
SubstrateObjectAttributes
List of structure:
Attribute name
Attribute Value
List of substrate attributes. Each substrate
attributes is an attribute name/value pair. The
UpdateSubstrateObject service requires some
substrate object attributes to be specified. For
example, SubstrateID, SubstType, and at least
one of the following must be included:
SubstState, SubstProcState. All other substrate
object properties are optional as is in the case of
LotID, SubstSource, SubstUsage, SubstHistory,
etc. Supplier may define attributes to be
included in the service that are equipment
dependent as in the case of linked litho tools.
ObjSpec See SEMI E39. Specifier of the object owner.
ObjectActionStatus Structure
ServiceAcknowledge
Status
(List of)
ObjectActionParameterResult
List of structure:
Attribute name
Attribute Value
List of return parameters regarding the result of
the request as name/value pairs.
ObjectAction Text “UpdateSubstrateObject”
OperationID Unsigned Integer Identifies a specific request. See SEMI E39.
ObjectLinkID Unsigned Integer Set to non-zero if and only if additional
completion reports will be sent.
ServiceAcknowledge Enumerated 0 - Acknowledge performed successful
1 - Service does not exist
2 - Cannot perform now
3 - At least one parameter is invalid
4 - Service will be performed later with
notification
5 - Service is not completed or prohibited
6 - Not used
7-63 - Reserved
Status List of structure
Errorcode
Errortext
Table 11 Change Substrate State Message Pararmeter Table
Parameter Req/Ind Rsp/Conf Description
(list of) SubstID M =
(list of) SubstState C
(See NOTE 1.)
— The order of SubstStates corresponds to the order of SubstID list.
(list of) SubstProcState C
(See NOTE 1.)
— The order of SubstStates corresponds to the order of SubstID list.
Status — M Information about the results.
Table 12 UpdateSubstrateObject Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M — “UpdateSubstrateObject”
ObjSpec C — The object specifier of the object owner. See SEMI E39.
SEMI E90-0705 © SEMI 1999, 2005 20
Parameter Req/Ind Rsp/Conf Description
SubstrateObjectAttributes M = SubstrateID, SubstType, and at least one of the following
must be included: SubstState, SubstProcState. See
UpdateSubstrateObject service message definition for
additional requirements.
OperationID C — Used if multiple requests will be linked to events. Set to
zero otherwise.
ObjectLinkID — C Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus — M Acknowledge of the service acceptance and a list of error
code and error text pairs if any.
ObjectActionParameterResult — C List of return parameters regarding the result of the
request as name/value pairs. Service returns the substrate
object attributes updated that the request specified.
Table 13 ProceedWithSubstrate Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M - “ProceedWithSubstrate”.
ObjSpec M - The object specifier of the object owner. See SEMI E39.
SubstrateObjectAttributes M = SubstID, and SubstLocID are required.
OperationID M - Used if multiple requests will be linked events. Set to
zero otherwise.
ObjectLinkID - M Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus - M Acknowledge of the service acceptance and a list of
error code and error text pairs if any.
ObjectActionParameterResult - M SubstID, and SubstLocID are required.
Table 14 CancelSubstrate Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M - “CancelSubstrate”.
ObjSpec M - The object specifier of the object owner. See SEMI
E39.
SubstrateObjectAttributes M = SubstID, and SubstLocID are required.
OperationID M - Used if multiple requests will be linked events. Set to
zero otherwise.
ObjectLinkID - M Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus - M Acknowledge of the service acceptance and a list of
error code and error text pairs if any.
ObjectActionParameterResult - M SubstID, and SubstLocID are required.
13 Variable Data
13.1 The host may inquire about any data related to specific Substrates, Substrate Locations and Batch Locations at
any time by using the OSS service GetAttr.
13.2 Implementations of Specification for Substrate Tracking that use the Event Reporting capability specified by
SEMI E30 (GEM) have the following requirement: For the objects defined by Specification for Substrate Tracking,
the identifier of that object and all of the attributes of that object shall be available for inclusion in event reports
associated with that object. The tables listed below specify the object attribute variables that must be available for
state model transitions:
SEMI E90-0705 © SEMI 1999, 2005 21
Table 15 Variables Required for Substrate Object State Model Transitions
Table 16 Variables Required for Substrate Location Object State Model Transitions
Table 17 Variables Required for Batch Location Object State Model Transitions
13.3 Table 18 provides the definition of Status Variable Data that equipment shall support for the persistent objects
defined by this standard, namely Substrate Location and Batch Location.
13.4 Variables in each table are presented in alphabetical order.
Table 15 Variables Required for Substrate Object State Model Transitions
Variable Name Description Access Form Comment
AcquiredID Contains the ID read from the substrate.
Empty string before the substrate ID is
read.
RO Text. Empty string if read
failed.
AcquiredIDList A list of AcquiredIDs related by the
same Substrate Object State Model
state transition that triggered a
collection event.
RO Ordered list of
AcquiredID.
This variable is
mandatory only
when the
equipment
provides a
substrate reader.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
The list length will
be equal to the
number of
substrates
involved in the
related state model
transition.
SubstBatchLocID Current BatchLocID for the substrate
associated with the last event.
RO Text. Batch process
equipment only.
Empty if substrate is
not part of a batch.
SubstBatchLocIDList A list of SubstBatchLocIDs related by
the same Substrate Object State Model
state transition that triggered a collection
event.
RO Ordered list of
SubstBatchLocID.
Batch process
equipment only.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.
SubstDestination Destination Substrate Location for the
substrate associated with the last event.
RO Text. If empty string, then
same as source
Substrate Location.
SubstDestinationList A list of SubstDestinations related by the
same Substrate Object State Model state
transition that triggered a collection
event.
RO Ordered list of
SubstDestination.
When a group of
substrates have a
related state model
transition, only one
collection event is
triggered.