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SEMI E54.14-0305 © SEMI 2005 19 Table 26 DM Object Additi onal Attribute Identifiers SEMI SDM Attribute ID PROFINET Index Attribute DmA33 96 Gain DmA34 97 Filter Bandwidth DmA35 98 Tool State DmA36 99 Laser Status DmA37 …

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SEMI E54.14-0305 © SEMI 2005 18
9.4.4.2 The additional Services of Sensor-AI-MF are mapped as described in Table 24.
Table 24 Sensor-AI-MF Additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
S1 Perform Zero Offset 11
S2 Query Supported Gas Type 12
S3 Select Programmed Gas Type 13
S4 Insert Gas Type 14
S5 Delete Gas Type 15
S6 Get Gas Calibration Data Value 16
S7 Set Gas Calibration Data Value 17
S8 Autorange 18
9.5 In-Situ Particle Monitor Device
9.5.1 Reference SEMI E54.10 for a complete specification of the SDM for In-Situ Particle Monitor Device (ISPM).
9.5.2 Objects
9.5.2.1 Consistent with SEMI E54.10 and ¶7.4 above, the DM and SAC objects are identified as Object 1 and
Object 2, respectively.
9.5.2.2 Notice that references for the Local Link Objects are not included; the existence of these objects are implied
by behavior and not explicitly included. Therefore, these objects are not accessible from the network.
9.5.2.3 Table 25 shows the mapping of the SDM.
9.5.2.4 Objects specified in SEMI E54.10 are listed under the heading NCS Module ID. Every instance is allocated
to a slot number. The configuration can be modeled in the GSD by using the Module ID as key for the module
description.
Table 25 In-Situ Particle Monitor Device Object Identifiers
SDM Object
Name
SDM Object ID NCS Module ID
Sensor-AI-LCS ISPMD03 203
Sensor-AI-SLS ISPMD04 204
Sensor-AI- MNS ISPMD05 205
Sensor-AI-Counter ISPMD16 216
Assembly-ISPM#1 ISPMD17 217
Assembly-ISPM#2 ISPMD18 218
Assembly-ISPM#3 ISPMD19 219
Assembly-ISPM#4 ISPMD20 220
Assembly-ISPM#5 ISPMD21 221
Assembly-ISPM#6 ISPMD22 222
Assembly-ISPM#7 ISPMD23 223
Assembly-ISPM#8 ISPMD24 224
Assembly-ISPM#9 ISPMD25 225
9.5.3 Attributes
9.5.3.1 The mapping of Attribute Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.5.3.2 Tables 26–31 show the mapping of the specific SDM attributes.
SEMI E54.14-0305 © SEMI 2005 19
Table 26 DM Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
DmA33 96 Gain
DmA34 97 Filter Bandwidth
DmA35 98 Tool State
DmA36 99 Laser Status
DmA37 100 Flow Path
DmA38 101 Volume
DmA39 102 Volume Units
DmA40 103 Leak Status
DmA41 104 Time Stamp
Table 27 SAC Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
SacA65 129 Number of Bins
SacA66 130 Count Mode
SacA67 131 Duration
Table 28 Sensor AI-LCS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
LcsA1 160 Reading Valid
LcsA2 161 Full Scale
LcsA3 162 Alarm Settling Time
LcsA4 163 Warning Settling Time
Table 29 Sensor AI-SLS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
SlsA1 160 Reading Valid
SlsA2 161 Full Scale
SlsA3 162 Alarm Settling Time
SlsA4 163 Warning Settling Time
Table 30 Sensor AI-MNS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
MnsA1 160 Reading Valid
MnsA2 161 Full Scale
MnsA3 162 Alarm Settling Time
MnsA4 163 Warning Settling Time
SEMI E54.14-0305 © SEMI 2005 20
Table 31 Sensor AI-Counter Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFINET
Index
Attribute
CounterA1 160 Reading Valid
CounterA2 161 Full Scale
CounterA3 162 Alarm Settling Time
CounterA4 163 Warning Settling Time
CounterA5 164 Upper Size
CounterA6 165 Lower Size
9.5.4 Services
9.5.4.1 The mapping of Service Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.5.4.2 The additional Services of DM are mapped as described in Table 32.
Table 32 DM Additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 96
DmS1 Laser On 11
DmS2 Laser Off 12
9.5.4.3 The additional Services of SAC are mapped as described in Table 33.
Table 33 SAC Additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
SacS1 Clear Counts 11
9.6 Endpoint Device
9.6.1 Reference SEMI E54.11 for a complete specification of the SDM for Endpoint Devices.
9.6.2 Date-and-Time data structure shall be mapped to PROFINET data type Time Of Day. An Offset of 4383 has
to be added to Time Of Day day value to obtain the number of days since 1/1/72 (Time Of Day base is 1/1/84).
9.6.3 Objects
9.6.3.1 Consistent with SEMI E54.11 and ¶7.4 above, the DM and SAC objects are identified as Object 1 and
Object 2, respectively.
9.6.3.2 Notice that references for the Local Link Objects are not included; the existence of these objects are implied
by behavior and not explicitly included. Therefore, these objects are not accessible from the network.
9.6.3.3 Table 34 shows the mapping of the SDM.
9.6.3.4 Objects specified in SEMI E54.11 are listed under the heading NCS Module ID. Every instance is allocated
to a slot number. The configuration can be modeled in the GSD by using the Module ID as key for the module
description.
9.6.3.5 The Sensor-BI-TH-EP can occur more than once. This shall be modeled in GSD in that way, that this
Module ID can be placed in several slots.