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SEMI E83-1000 © SEMI 1999 , 2000 3 RELATED INFORM A TI ON 1 AP P L I C AT I O N N OT E S NOTE: T his related inf or mation is n ot an offic ial part of SEMI E83, but was approve d for p ublicati on by full le tter ballot…

SEMI E83-1000 © SEMI 1999, 2000 2

Table 1 Dimensional Requirements

Symbol Value, mm (in.) Tolerance (mm) Type

a11 0 deg. +/- 0.25 deg. angle

∅d11

15.0 (.591) +/- 0.2 diameter

d12 33.0 (1.299) +/- 0.2 distance

d13 39.0 (1.535) +/- 0.2 distance

d14 62.0 (2.441) +/- 0.2 distance

d15 80.0 (3.150) +/- 0.2 distance

d16 237.5 (9.350) +/- 2.5 distance

d17 68.0 (2.677) minimum distance

h11 24.0 (.945) +/- 0.2 distance

h12 39.0 (1.535) +/- 0.2 distance

h13 40.0 (1.575) +/-0.2 distance

h14 83.0 (3.268) +/-0.2 distance

h15 20.0 (.787) maximum distance

r11 2.0 (.079) +/-0.2 radius

r13 4.0 (.157) +/-0.2 radius

r14 5.0 (.197) +/-0.2 radius

w11 200 (7.874) minimum distance

Figure 1

Side Elevation View I

6.3 The flange must be installed such that the vertical

pin (VP) is capable of being aligned with the load port

bilateral datum plane (as defined in SEMI E15.1) and

surface A is a distance of d16 from the load port facial

datum plane (as defined in SEMI E15.1). The angle of

incidence between surface A and the facial datum plane

should be capable of adjustment to a11 listed in Table

6.3.1 The docking flange is to be physically isolated

from the equipment and should be mounted such that

the equipment and equipment load port are protected

from the impact incurred during docking.

Figure 2

Side Elevation View II

6.4 When the flange is removed, no mounting

hardware shall remain protruding from the floor.

6.5 Surfaces A, B, B’ and C shown on Figure 2 must

exist per tolerances listed in Table 1.

Figure 3

Front Elevation View

NOTICE:. SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

SEMI E83-1000 © SEMI 1999, 20003

RELATED INFORMATION 1

APPLICATION NOTES

NOTE: This related information is not an official part of SEMI E83, but was approved for publication by full letter ballot

procedures on July 14, 2000.

R1-1 The intent of this standard is to provide manually

guided 300mm carrier transport PGVs a standard flange

for docking and to facilitate a safe, quick, and

repeatable PGV to load port carrier transfer method or

mechanism. Standardization of features on the flange is

intended to allow for interoperability between PGV

designs and the docking flange.

R1-2 SEMI E64 defines Zone L as an exclusion zone

in SEMI E15.1 compliant tools. It is intended that the

docking flange be mounted in this zone.

R1-3 The docking interface flange includes features to

allow for the following minimum functionality of the

PGV to flange docking procedure:

• Stopping PGV motion

• Guidance of PGV to flange

• x, y & theta alignment of the PGV to the flange

• Locking of PGV to flange

• Docking parallel or perpendicular to the flange

R1-4 The PGV side of the interface may include

additional features to allow for all or some of the

following functionality:

• Compliance to the docking flange

• To dampen impact of docking forces

R1-5 No features on the standard docking flange

provide an adjustable feature to indicate the height

(dimension as H defined by SEMI E15.1) the load port

horizontal datum plane has been adjusted to.

R1-6 It is likely that the alignment error and tolerance

stack up between the docking interface flange and the

equipment load port will not provide sufficient

accuracy alone for accurate pick/placement of a pod

onto the kinematic couplings on the load port.

R1-7 Possible sources of alignment error are:

• Cleanroom floor height and level

• PGV wheels and framework

• Installation accuracy of docking interface flange

• Stability of mounting

R1-8 It may be necessary to use additional alignment

methods to improve accuracy of pod placement onto the

kinematic couplings.

R1-9 It is expected that the interface device be floor

mounted. Thus, the equipment must not require the use

of support pedestals or other support structures under

the floor below Zone L.

R1-10 The docking flange should sustain docking

impact for the lifetime of the flange without any

performance degradation.

• Assume 90kg (200lb) PGV moving at 0.3m/s

(1ft/sec)

• Assume 250,000 docking cycles within a flange

lifetime

• Recommended to design for 3x safety factor for

single docking cycle

R1-11 Flange must be quick remove, replace, align and

calibrate.

R1-12 Surface B' (shown on Figure 2) allows docking

mechanism designs to grab onto the docking flange

without using the docking pin for support.

R1-13 The method of attaching the vertical pin to the

flange is not defined in this standard. Docking flange

designers should be aware of the docking forces

incurred on this pin and design the attachment method

accordingly.

R1-14 The method of attaching the flange to the floor

is not defined in this standard. Docking flange

designers should be aware of the docking forces

incurred on the flange and/or pin and design the

attachment method accordingly.

R1-15 This standard specifies the radii of certain edges

found on the docking flange. It is recommended that

edges that do not have a specified radius are radiused or

broken to eliminate sharp edges.

R1-16 It is left to user to define the needed flange

length (w2×2) at the time of placing an order.