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SEMI E138-0305 © SEMI 2005 3 7.3.3 Description — This is a human readab le description of the error code being reported. It maps d irectly to the definition of the error code for each of the expected result of the servic…

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SEMI E138-0305 © SEMI 2005 2
6 Resources, Organizations, and Standards
6.1 Important resources and organizations used in the generation and definition of this document are found in:
6.1.1 XML Schema Part 2: Datatypes — W3C Recommendation
7 XML Type Definitions
7.1 XML Schema — This specification includes an XML schema file, “CommonComponents-V0305-Schema.xsd”,
and should be provided with this document. That XML schema file provides the normative definitions of the types
described here.
7.2 Data Type for Error Handling — Error handling in most cases even with standard interface specifications is
implementation-specific. It is not practical for one specification to define all possible error conditions, error codes,
descriptions and supplementary information that is needed to properly recover from the error. Regardless, a
common approach to communicating error conditions can simplify error management for standards implementers
and application developers.
7.3 Error Data Structure — The following data structure defines a common error structure that can be extended
with additional implementation-specific information that can be used by other standards or suppliers.
Error
Source
Code
Description
Extension
Figure 1
Error Structure
7.3.1 Source — The “Source” attribute represents the document from where the attribute code value is defined. For
error codes defined by SEMI standards, the content of Source is the urn representation of the standard number. For
error codes defined by a supplier, it is the urn representation of the supplier’s name. (i.e. For SEMI E132 errors, the
content of “Source” is: urn:semi-org:E132; for supplier ACME errors the content is: urn:ACME-com) Additional
information may be included by the supplier by adding such information after the “:” colon symbol and separating
the fields with a “.” period symbol.
Table 1 Example of Error Sources
# Source Comment
1 urn:semi-org:E005 Standard Error Codes for Equipment - SEMI E5.
2 urn:semi-org:E087 Standard Error Codes from Carrier Management.
3 urn:semi-org:E125 Standard Error Codes from Equipment Self Description.
4 urn:<Supplier>-com[:<SupplierFields>] Identification of the source of error codes.
7.3.2 Code — Error code is an integer value that directly maps to a particular specification error code list. The
following is an example of a list of code ranges. This specification does not require the allocation of any code range
by other specification. The following is just an example of codes.
Table 2 Example of Error Code Range
# Code Range Comment
1 1–63, 32768–65535 Standard Error Codes for Equipment - SEMI E5.
2 10000 – 10500 Equipment Supplier Specific enumerated error codes (Example).
3 5000 – 5999 Common Standardized Core Components Errors.
SEMI E138-0305 © SEMI 2005 3
7.3.3 Description — This is a human readable description of the error code being reported. It maps directly to the
definition of the error code for each of the expected result of the services as defined by the specific standard.
Additional information may be supplied after this string to provide more detail about the error. Use the “:” colon
symbol as delimiter (i.e. Common Component, Code 5001, “Insufficient Arguments Provided:Argument
“SessionID” missing).
Table 3 Example of Error Descriptions
# Description Comment
1 “Unknown Object in Object Specifier” Error description for Code “1” as defined in SEMI E5.
2 “Loadport does not exist” Error code “49” description from E87 and defined in E5.
3 “Operation Not Supported” Error description for Error Code “5000”.
7.3.4 Extension — This attribute allows the supplier to include additional information regarding the error code
encountered. This field is used when the description does not explicitly cover the problem and more specific
information is required.
7.4 Common Standardized Errors — This section defines common errors to be reported by any application
processing a service. Most of these errors are related to the validation of the service.
Table 4 Common Standardized Error Codes
Code Description Comment
5000 Operation Not Supported [:Operation specific detail] Description of the actual error encountered.
Additional information may be included.
5001 Insufficient Arguments Provided [:Operation specific detail] One or more arguments are missing in the request.
5002 Invalid Arguments Provided [:Operation specific detail] One or more arguments in the request are invalid or
incompatible.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
SEMI E139-0705 © SEMI 2005 1
SEMI E139-0705
SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT
(RaP)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2005.
Table of Contents
1 Purpose .......................................................................................................................................................................3
2 Scope ..........................................................................................................................................................................3
3 Limitations..................................................................................................................................................................4
4 Referenced Standards .................................................................................................................................................4
4.1 SEMI Standards...................................................................................................................................................4
4.2 ISO Standards......................................................................................................................................................4
4.3 OMG Standards...................................................................................................................................................4
5 Terminology ...............................................................................................................................................................5
5.1 SEMI Compilation of Terms ................................................................................................................................5
5.2 Acronyms.............................................................................................................................................................5
5.3 Definitions ...........................................................................................................................................................5
6 Conventions................................................................................................................................................................6
6.2 Object Modeling ..................................................................................................................................................6
6.2.1 Unified Modeling Language (UML).................................................................................................................6
6.2.2 Class Diagrams ................................................................................................................................................6
6.2.3 Name of a Class................................................................................................................................................6
6.2.4 Abstract and Concrete Classes.........................................................................................................................6
6.2.5 Class Attribute Definition.................................................................................................................................6
6.2.6 Association Documentation..............................................................................................................................7
6.2.7 Association Navigability...................................................................................................................................7
7 Overview of RaP ........................................................................................................................................................8
7.3 RaP Participants..................................................................................................................................................8
7.6 RaP Environment.................................................................................................................................................8
7.7 Execution of Recipes............................................................................................................................................8
7.8 Creation and Editing of Recipes..........................................................................................................................9
7.9 Tracking and Storage of Recipes.........................................................................................................................9
7.10 Communication Overview .................................................................................................................................9
7.11 Key Recipe Concepts .........................................................................................................................................9
7.12 ProcessDefinitionElement .................................................................................................................................9
7.12.2 Recipe Structure............................................................................................................................................11
7.12.3 Parameterization ..........................................................................................................................................13
7.12.4 TransferContainer ........................................................................................................................................15
7.13 Realizing the Purpose......................................................................................................................................15
8 Requirements............................................................................................................................................................15
8.1 Requirements Overview.....................................................................................................................................15
8.2 Recipe Object Model .........................................................................................................................................16
8.3 PDE Class Diagram ..........................................................................................................................................16
8.3.2 PDEheader Class ...........................................................................................................................................17
8.3.3 AntecedentData Class.....................................................................................................................................18
8.3.4 ReferencedPDE Class.....................................................................................................................................19
8.3.5 ExecutionTarget Class....................................................................................................................................19
8.3.6 PDEparameter Class......................................................................................................................................20
8.3.7 PDEbody Class...............................................................................................................................................21
8.3.8 PDEbodyReference Class...............................................................................................................................21