semi合集-English.pdf - 第5126页
SEMI M29-1296 © SEMI 1996, 2003 6 Standardized Dimension Location 13 Wafers 25 Wafers T1 ø 430 max ø 450 max T2 116.5 ± 1 176.5 ± 1 T3 5 min ← T4 30° ← T5 38.5° ← T6 22.5° ← T7 158 ± 1 ← T8 80 ± 1 140 ± 1 T9 156.5 ± 0.5 …
SEMI M29-1296 © SEMI 1996, 2003 5
Figure 6
Gasket Area
Figure 7
Clamping Indent
5.3.5 Top Rib and Orientation Mark — Dimensions of a top rib to avoid collapsing when shipping boxes stacked,
and the position of an orientation mark are shown in Figure 8 and Table 2. In addition, since this rib makes a pair
with a bottom rib, and is a poka-yoke rib, the shipping boxes can be stacked in a correct direction.
Figure 8
Top Rib and Orientation Mark
Table 2 Dimensions of Box Top
Unit: mm
SEMI M29-1296 © SEMI 1996, 2003 6
Standardized Dimension
Location
13 Wafers 25 Wafers
T1 ø 430 max ø 450 max
T2 116.5 ± 1 176.5 ± 1
T3 5 min ←
T4 30° ←
T5 38.5° ←
T6 22.5° ←
T7 158 ± 1 ←
T8 80 ± 1 140 ± 1
T9 156.5 ± 0.5 ←
T10 171.5 ± 0.5 ←
T11 95.5 ± 0.5 155.5 ± 1
T12 10 max ←
T13 18 max ←
T14 20.5 ± 0.5 ←
T15 10 max ←
T16 3 ± 0.5 ←
T17 3 ± 0.5 ←
T18 70 ± 10 ←
T19 30 ± 5 ←
T20 30 ± 5 ←
T21 30 ± 5 ←
T22 30 ± 10 ←
T23 30 ± 5 ←
T24 40 ± 1 ←
T25 30° ←
T26 45° min ←
T27 45° ←
T28 45° ←
T29 130 ± 1 ←
T30 145 ± 1 ←
5.4 Box Bottom
5.4.1 Outer Dimensions of Box Bottom — Outer dimensions of a box bottom are shown in Figure 9 and Table 3.
SEMI M29-1296 © SEMI 1996, 2003 7
Figure 9
Outer Dimensions of Box Bottom
5.4.2 Supporting Rib and Poka-yoke Rib — Positions of a supporting rib for supporting a shipping cassette inside a
box bottom and a poka-yoke rib provided for avoiding setting the cassette in a wrong orientation are shown in
Figure 10 and Table 3.
Figure 10
Supporting Rib and Poka-yoke Rib
5.4.3 Gasket Area — It is required to provide a gasket in an area shown in Figure 6 and Table 2 if the gasket is
provided.