semi合集-English.pdf - 第3025页

SEMI E122-0703 © SEMI 2003 6 # Current State Trigger Ne w State Actions Comments 15 CHECKING Parameter checking completes successfully . State based on conditional table. The tester resumes PROCESS execution. This is a c…

100%1 / 7923
SEMI E122-0703 © SEMI 2003 5
6.4 TSEM Processing State Transitions Table
Table 1 Processing State Transitions Table
# Current State Trigger New State Actions Comments
0 GEM
READY
The GEM session has
received a START EXEC
command.
INIT If first START EXEC on this
physical tester, start the tester
executive.
The first tester executive to
start initializes all hardware.
1 INIT All tester initialization is
complete with no alarms
or error conditions.
IDLE None. The tester executive is
running.
2 IDLE A process program is
selected.
SETTING UP Tester-dependent. Commit has been made to
setup and a virtual tester has
been defined.
3 SETTING UP All setup activity has
completed and the tester is
ready to receive a START
command.
READY None. The selected Process Program
is available for execution, all
required hardware for this
virtual tester is allocated, and
the test program is loaded.
4 READY The tester receives a
START command from a
valid source.
EXECUTING Begins testing the unit(s) at the
test-site(s).
The definition of a valid
source is application
dependent.
5 EXECUTING The processing of the
current unit(s) has
completed normally.
READY The tester processes end of test
data.
“Normal” completion of the
test program execution.
6 EXECUTING The processing of the
current unit(s) has
completed abnormally.
READY “Abnormal” completion of the
test program execution, etc.
7 PROCESS The tester has received a
PAUSE command from a
valid source.
PAUSING The current state is suspended at
the completion of the current
unit(s).
The definition of a valid
source is application
dependent.
8 PAUSING The tester has completed
processing the current
unit(s).
PAUSED The tester is waiting for a
command (RESUME, STOP, or
ABORT).
None.
9 PROCESS The tester has received a
STOP command from a
valid source.
STOPPING The tester executes the actions
required to perform a STOP.
The definition of a valid
source is application
dependent.
10 PROCESS The tester has received an
ABORT command from a
valid source.
ABORTING The tester executes the actions
required to perform an ABORT.
The definition of a valid
source is application
dependent.
11 PROCESS An alarm occurs. ALARM
PAUSED
PROCESS activity is suspended
and the tester is waiting for all
alarms to be cleared.
12 SETTING UP An equipment initiated
transition indicating that
the process program failed
to load.
IDLE The hardware resources are
released. If the process program
load failure caused an alarm
condition, this transition is
followed immediately by a
transition 24 to IDLE WITH
ALARMS.
No process program is loaded.
13 PAUSED The tester receives a
RESUME command.
CHECKING If the RESUME command
contains variable process program
parameters, validation of the
process program parameters
begins.
If there are no parameters on
the RESUME command, the
CHECKING state is a pass
through.
14 CHECKING Error detected in a new
parameter setting.
PAUSED The tester waits for the parameter
correction by operator or host.
The definition of a valid
source is application
dependent.
SEMI E122-0703 © SEMI 2003 6
# Current State Trigger New State Actions Comments
15 CHECKING Parameter checking
completes successfully.
State based on
conditional
table.
The tester resumes PROCESS
execution.
This is a conditional re-entry
to the PROCESS state. (See
Table 2.) If there are no
parameters, the CHECKING
state is a pass through.
16 PROCESS
PAUSE
An alarm is set. ALARM
PAUSED
The tester waits for all alarms to
be cleared.
None.
17 ALARM
PAUSED
All alarms are cleared. PAUSED An operator has verified that all
alarms and abort conditions have
been cleared.
The tester is waiting for a valid
command.
None.
18 PAUSE The tester has received a
STOP command from a
valid source.
STOPPING The tester executes the actions
required to perform a STOP.
The definition of a valid
source is application
dependent.
19 PAUSE The tester has received an
ABORT command from a
valid source.
ABORTING The tester executes the actions
required to perform an ABORT.
The definition of a valid
source is application
dependent.
20 STOPPING The tester completes the
actions required to
perform a STOP.
IDLE The hardware resources for this
virtual tester are released.
21 STOPPING The tester has received an
ABORT command from a
valid source.
ABORTING The tester executes the actions
required to perform an ABORT.
The definition of a valid
source is application
dependent.
22 ABORTING The tester has completed
the action required to
perform an ABORT.
IDLE The hardware resources for this
virtual tester are released.
Unsafe conditions have been
resolved where possible.
An operator has verified that all
alarms and abort conditions have
been cleared.
23 IDLE The tester receives an
STOP EXEC command
from a valid source.
GEM READY The tester executive is unloaded
from all testers.
The definition of a valid
source is application
dependent.
24 IDLE An alarm is set. IDLE with
ALARMS
The tester waits for all alarms to
be cleared.
If the ALARM already exists
upon entering the IDLE state,
the tester transitions
immediately from IDLE to
IDLE with ALARMS.
25 IDLE WITH
ALARMS
All alarms on the tester
have been cleared.
IDLE An operator has verified that all
alarms and abort conditions have
been cleared.
The IDLE state is free of
alarms.
26 IDLE WITH
ALARMS
The tester executive has
been stopped by an STOP
EXEC command form a
valid source.
GEM READY An operator has verified that all
alarms and abort conditions have
been cleared.
The tester executive is unloaded
from all testers.
The definition of a valid
source is application
dependent.
27 INIT An error occurred during
the loading of the tester
exec.
INIT WITH
ALARMS
None.
28 INIT WITH
ALARMS
Alarms are cleared. INIT An operator has verified that all
alarms and abort conditions have
been cleared.
None.
SEMI E122-0703 © SEMI 2003 7
# Current State Trigger New State Actions Comments
29 INIT WITH
ALARMS
The tester executive has
been stopped by an STOP
EXEC command form a
valid source.
GEM READY An operator has verified that all
alarms and abort conditions have
been cleared.
The tester executive is unloaded
from all virtual testers.
The definition of a valid
source is application
dependent.
6.5 Process Model Conditions Table
Table 2 Process Resume Conditions
Condition Next State
Checking determines that process program conditions were
changed.
SETTING UP
Previous state EXECUTING, and no process program
conditions were changed.
READY
Previous state READY, and no process program conditions
were changed.
READY
Previous state was SETTING UP. SETTING UP
7 Virtual Testers
7.1 General Definitions
7.1.1 The virtual tester is defined as a single load
instance of a test program (regardless of how many test-
sites, test system resources, or test-heads are associated
with that instance) that is capable of operating as an
independent tester in accordance with the state model
shown in this document.
7.1.2 Loading another instance of the same test
program, which uses separate or shared test system
hardware resources, establishes another virtual tester.
The multiple copies of that test program are
independent of each other. In this context, program
independence describes the condition that one virtual
tester program does not expect or rely on the existence
of another virtual tester program in order to run.
7.1.3 For a single test system with one test-head that
must be dedicated to a single test program, the physical
tester and virtual tester are the same and a single GEM
communication interface is needed. In a test system
with two test-heads, where each test-head can execute a
unique process program autonomously, two virtual
testers may be operating at the same time with two
GEM communication sessions. If a test-head may be
divided into several segments, each capable of
autonomous execution of a unique program, there will
be one virtual tester and one matching GEM
communication session for each of those segments.
7.1.4 The number of virtual testers operating at any
time depends on how the test system is configured
(hardware and software) and may range from one to the
maximum capability of the particular test system. The
number of GEM communication sessions is equal to the
number of virtual testers supported by the tester.
7.2 GEM Communication Sessions
7.2.1 From the GEM communication host connection,
only one program and virtual tester exists and the host
GEM communication connection has no knowledge or
view of other virtual testers. Independence does not
preclude the tester executive or test hardware from
sharing resources between virtual testers, such as in the
case of power supplies or shared software libraries.
7.2.2 For each virtual tester, the test system must
provide a separate GEM client connection. The test
system controller has responsibility to manage the
multiple client connections.
7.2.3 For each virtual tester the station controller
establishes a unique host connection to a single tester
GEM client. The station controller has responsibility to
manage the multiple host connections.
7.2.4 The test system will have a set maximum number
of allowable unique GEM host/client connections. The
maximum number of connections (n) and the port IDs
for these GEM communication connections are
constants known to the station controller and available
from the test system controller after that controller is
booted.
7.2.5 The maximum number of GEM communication
sessions allowed by the test system is also the
maximum number of virtual testers allowed by the test
system, regardless of the number and allocation of
tester resources.