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SEMI M9-0999 © SEMI 1986, 1999 6 Figures 2A an d 2B Both Diagram s Show a GaAs Wafer with Su rface Orientation A and Flat Option Dove-Tai l

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SEMI M9-0999 © SEMI 1986, 19995
Figures 1A and 1B
Both Diagrams Show a GaAs Wafer with Surface Orientation A and Flat Option V-Groove
SEMI M9-0999 © SEMI 1986, 1999 6
Figures 2A and 2B
Both Diagrams Show a GaAs Wafer with Surface Orientation A and Flat Option Dove-Tail
SEMI M9-0999 © SEMI 1986, 19997
Figures 3A and 3B
Both Diagrams Show a GaAs Wafer with Surface Orientation B and Flat Option V-Groove