semi合集-English.pdf - 第1349页
SEMI E30-1103 © SEMI 1992, 2003 23 4.2.1.2.5 Scenario Collection Event R eporting Set-up: COMMENT HOST EQUIPMENT COMMENT [IF] Define Report is Multi-block [THEN] send Multi-block inquire S2,F39--> <-- S2,F40 Multi-…
SEMI E30-1103 © SEMI 1992, 2003
22
Host Requests Event Report:
COMMENT HOST EQUIPMENT COMMENTS
Host requests an event report S6,F15-->
<--S6,F16 Equipment sends event report.
4.2.1.2 Dynamic Event Report Configuration — This
section describes a capability which allows the host to
dynamically modify the equipment event reporting
setup.
4.2.1.2.1 Purpose — This capability is defined to
provide the data reporting flexibility required in some
manufacturing environments. It allows the host to
increase or decrease the data flow according to need.
For example, if the performance of an equipment
degrades, the data flow from that equipment may be
increased to help diagnose the problem.
4.2.1.2.2 Definitions
EventsEnabled — A variable data item that consists of
a list of currently enabled collection events (CEIDs).
See SEMI E5 for a full definition of this variable data
item.
Report ID (RPTID) — A unique identifier of a specific
report. See SEMI E5 for a full definition of this data
item.
Variable Data (V) — A data item containing status
(SV), data (DVVAL), or constant (ECV) values. See
SEMI E5 for a full definition of this data item.
Variable Data ID (VID) — A unique identifier of a
variable data item. The set of VID’s is the union of all
SVID’s, ECID’s, and ID’s for DVVAL’s
(DVNAME’s). See SEMI E5 for a full definition of this
data item.
4.2.1.2.3 Detailed Description — The equipment shall
support the following event report configuration
functionality through the SECS-II interface:
— Host definition/deletion of custom reports,
— Host linking/unlinking of defined reports to
specified collection events, and
— Host enabling/disabling the reporting of specified
collection events.
NOTE 4: The equipment may also supply alternative means
for defining reports and linking reports to events (e.g., via the
operator console). Implementation of alternate means is not
required.
The equipment can be instructed by the host to enable
or disable reporting of collection events on an
individual or collective basis. A status value (SV) shall
be available that consists of a list of enabled collection
events. (See Section 5.2, Variable Item List,
EventsEnabled variable.)
Reports may be attached to an event report message
(S6,F11). These reports are specifically linked to the
desired event and typically contain variable data
relating to that event. The reports may be provided by
the equipment supplier or created by the user. The user
must be able to create reports and link them to events
via the SECS-II interface.
The data reported in the event report messages may
consist of Status Values (SV’s), Equipment Constant
Values (ECV’s), or Data Values (DVVAL’s). Note that
data values shall be valid and current on certain events
and certain states and might not be current at other
times. The implementor shall document when a data
value will be current and available for reporting.
4.2.1.2.4 Requirements
— The equipment manufacturer must provide
documentation of all variable data available from
the equipment. This is to include variable name,
variable type or class (SV, ECV, DVVAL), units,
format codes, possible range of values, and a
description of the meaning and use of this variable.
— The equipment manufacturer must provide unique
VIDs for the various variable data (V) available for
data collection in the equipment. For example, this
means that no SV shall have a VID which is the
same as the VID of any ECV or DVVAL.
— All variable data must be available for report
definition and event data collection. See Section
5.2, Variable Item List, for a list of required
variable data.
— All report definitions, report-to-event links, and
enable/disable status of event reports must be
retained in non-volatile storage.
SEMI E30-1103 © SEMI 1992, 2003
23
4.2.1.2.5 Scenario
Collection Event Reporting Set-up:
COMMENT HOST EQUIPMENT COMMENT
[IF] Define Report is Multi-block
[THEN] send Multi-block inquire S2,F39-->
<-- S2,F40 Multi-block grant.
[ENDIF]
Send report definitions S2,F33--> DATAIDs, RPTIDs, and VIDs
received.
<-- S2,F34 DRACK
17
= 0 the reports are OK
[IF] Link Event/Report is Multi-block
[THEN] send Multi-block inquire S2,F39-->
<-- S2,F40 Multi-block grant.
[ENDIF]
Link reports to events S2,F35--> CEIDs and the corresponding
RPTIDs are received.
<-- S2,F36 LRACK = 0 the event linkages
are acceptable.
Enable specific collection S2,F37--> Enable/ disable codes (CEEDs)
events and the respective event
reporting CEIDs received.
<-- S2,F38 ERACK = 0 OK, will generate the
specified reports when the
appropriate collection events
happen
4.2.2 Variable Data Collection
4.2.2.1 Purpose — This capability allows the host to query for the equipment data variables and is useful during
initialization and synchronization.
4.2.2.2 Definitions
Report ID (RPTID) — A unique identifier of a specific report. See SEMI E5 for a full definition of this data item.
Variable Data (V) — A variable data item containing status, discrete, or constant data. See SEMI E5 for a full
definition of this data item.
4.2.2.3 Detailed Description — The host may request a report containing data variables from the equipment by
specifying the RPTID. It is assumed that the report has been previously defined (e.g., using the Define Report
S2,F33 transaction (see Section 4.2.1)). The values of any status variables (SV’s) and equipment constants (ECV’s)
contained within the report must be current. Discrete data values (DVVAL’s) are only guaranteed to be valid upon
the occurrence of a specific collection event. If DVVAL cannot be specified in equipment due to some restrictions
depend on hardware and/or software conditions, the zero length item is reported.
4.2.2.4 Requirements
— Variable data items (V’s) and associated units of measure must be provided by the equipment manufacturer.
17 Define Report Acknowledge Code, see SEMI E5 for full definition of this Data Item.
SEMI E30-1103 © SEMI 1992, 2003
24
4.2.2.5 Scenario
Host Requests Report:
COMMENT HOST EQUIPMENT COMMENT
Host requests data variables
contained in report RPTID S6,F19-->
<--S6,F20 Equipment responds with a list of
variable data for the given
RPTID.
4.2.3 Trace Data Collection
4.2.3.1 Purpose — Trace data collection provides a
method of sampling data on a periodic basis. The time-
based approach to data collection is useful in tracking
trends or repeated applications within a time window,
or monitoring of continuous data.
4.2.3.2 Definitions
Data Sample Period (DSPER) — The time delay
between samples. See SEMI E5 for a full definition of
this data item.
Reporting Group Size (REPGSZ) — The number of
samples included per trace report transmitted to the
host. See SEMI E5 for a full definition of this data item.
Status Variable (SV) — Status data item (included in
trace report). See SEMI E5 for a full definition of this
data item.
Status Variable ID (SVID) — A unique identifier of a
status variable. See SEMI E5 for a full definition of this
data item.
Total Samples (TOTSMP) — Number of samples to be
taken during a complete trace period. See SEMI E5 for
a full definition of this data item.
Trace Request ID (TRID) — An identifier associated
with a trace request definition. See SEMI E5 for a full
definition of this data item.
4.2.3.3 Detailed Description — The equipment shall
establish a trace report as instructed by the host
(S2,F23). For a trace report (S6,F1), the host shall
designate a name for the trace report (TRID), a time
interval for data sampling (DSPER), the total number of
samples to be taken (TOTSMP), the number of samples
per trace report (REPGSZ), and a listing of which data
will be sent with the report (SVID’s). The number of
trace reports sent to the host is determined by total
samples divided by reporting group size
(TOTSMP/REPGSZ).
The equipment shall sample the specified data (SV’s) at
the interval designated by the host (DSPER) and shall
send a predefined trace report to the host for the
specified reporting group size (REPGSZ). The trace
report definition shall be automatically deleted from the
equipment after the last trace report has been sent.
The host may modify or re-initiate a trace function
currently in progress by specifying the same TRID in a
trace request definition, at which point the old trace
shall be terminated and the new trace shall be initiated,
or the host can instruct the equipment to terminate a
trace report prior to its completion by specifying
TOTSMP = 0 for that TRID, at which point the trace
report definition shall be deleted.
A detailed example is included as Application Note
A.4.
4.2.3.4 Requirements
— The equipment must have a local mechanism (e.g.,
internal clock) for triggering the periodic sampling
and transmission of trace reports to the host.
— A minimum of four (4) concurrent traces shall be
supported by the equipment. The same SVID may
be collected in multiple traces simultaneously.
— All SVID’s available at the equipment shall be
supported for trace data collection. The exception to
this is any SV that will not fit into a single block.
NOTE 5: SEMI E5 provides for SV’s to be of a list format.
Since this may in practice be a variable list, there is a
potential problem with such an SV supported by the Trace
Data Collection capability. This is a problem with the SEMI
E5 standard. Care should be exercised in the use of SV’s
using the list format.