semi合集-English.pdf - 第2338页

SEMI E82-0705 © SEMI 1999, 2005 34 STEP COMMENTS HOST TSC COMMENTS 10. <-S6,F11 Event Report Send (ERS) Transferring . CommandID = “111111” 11. Event Report Acknowledge (ERA) S6,F12-> 12. <-S6,F11 Event Report S…

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SEMI E82-0705 © SEMI 1999, 2005 33
12.2.3 Continuous Multiple Carrier Transfer – Transfer Unit Size is Equal to 2 Carriers
12.2.3.1 Two carriers are transported from a single source port to a single destination port. This scenario is used to
demonstrate how the TSC would handle a continuous load/unload request. It also shows the sequence of events
associated with the continuous case. It is assumed that the source and destination ports must be the same equipment.
STEP COMMENTS HOST TSC COMMENTS
1. The carriers are prepared
for a TRANSFER command.
They are sitting
sequentially at the single
pickup point source
output. 123456 is at the
vehicle accessible source
port for the first acquire
of two. 654321 is sitting
right behind it, and it
will be shuttled out after
123456 is acquired by the
vehicle. The vehicle will
then acquire 654321 once
in position. The
depositing order depends
on the IBSEM supplier’s
functional specification.
2. Enhanced Remote
Command(ERC)
TRANSFER
. COMMANDID = “111111”
. PRIORITY = 5
. REPLACE = 0
. TRANSFERINFO
1
– L,3
1. CARRIERID = “123456”
2. SOURCEPORT = “PORTXX”
3. DESTPORT = “PORTYY”
. TRANSFERINFO
2
– L,3
4. CARRIERID = “654321”
5. SOURCEPORT = “PORTXX”
6. DESTPORT = “PORTYY”
S2,F49->
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “RGVXX”
. CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->
8. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “RGVXX”
. TransferPortList – L,1
1. TransferPort =
“PORTXX”
9. Event Report Acknowledge
(ERA)
S6,F12->
SEMI E82-0705 © SEMI 1999, 2005 34
STEP COMMENTS HOST TSC COMMENTS
10. <-S6,F11 Event Report Send (ERS)
Transferring
. CommandID = “111111”
11. Event Report Acknowledge
(ERA)
S6,F12->
12. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “RGVXX”
13. Event Report Acknowledge
(ERA)
S6,F12->
14. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “RGVXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
15. Event Report Acknowledge
(ERA)
S6,F12->
16. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “RGVXX”
. CarrierID = “654321”
. CarrierLoc = “LOC2”
17. Event Report Acknowledge
(ERA)
S6,F12->
18. <-S6,F11 Event Report Send (ERS)
VehicleAcquireCompleted
. VehicleID = “RGVXX”
19. Event Report Acknowledge
(ERA)
S6,F12->
20. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “RGVXX”
. TransferPortList – L,1
1. TransferPort =
“PORTXX”
21. Event Report Acknowledge
(ERA)
S6,F12->
22. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “RGVXX”
. TransferPortList – L,1
1. TransferPort =
“PORTYY”
23. Event Report Acknowledge
(ERA)
S6,F12->
24. <-S6,F11 Event Report Send (ERS)
VehicleDepositStarted
. VehicleID = “RGVXX”
25. Event Report Acknowledge
(ERA)
S6,F12->
26. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “RGVXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
27. Event Report Acknowledge
(ERA)
S6,F12->
SEMI E82-0705 © SEMI 1999, 2005 35
STEP COMMENTS HOST TSC COMMENTS
28. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “RGVXX”
. CarrierID = “654321”
. CarrierLoc = “LOC2”
29. Event Report Acknowledge
(ERA)
S6,F12->
30. <-S6,F11 Event Report Send (ERS)
VehicleDeposit-Completed
. VehicleID = “RGVXX”
31. Event Report Acknowledge
(ERA)
S6,F12->
32. <-S6,F11 Event Report Send (ERS)
VehicleUnassigned
. VehicleID = “RGVXX”
. CommandID = “111111”
33. Event Report Acknowledge
(ERA)
S6,F12->
34. <-S6,F11 Event Report Send (ERS)
TransferCompleted
(Complete parameters)
. CommandName =
“TRANSFER”
. CommandID = “111111”
. Priority = 5
. Replace = 0
. ResultCode = 0
. CarrierLoc
1
= “PORTYY”
. TransferInfo
1
– L,3
1. CarrierID = “123456”
2. SourcePort = “PORTXX”
3. DestPort = “PORTYY”
. CarrierLoc
2
= “PORTYY”
. TransferInfo
2
– L,3
4. CarrierID = “654321”
5. SourcePort = “PORTXX”
6. DestPort = “PORTYY”
35. Event Report Acknowledge
(ERA)
S6,F12->
12.2.4 Carriers Replace
12.2.4.1 One carrier is transported from the source port (e.g., stocker output port) to the destination port (e.g.,
process equipment port-1) and the other carrier is transported from the same port (process equipment port-1) to the
destination ports (e.g., stocker input port) by the same vehicle. The transport vehicle is capable of acquiring and
depositing these two carriers sequentially. This function is used for the depressuring process equipment with door,
because the door opening time should be shorten for this type of equipment.
STEP COMMENTS HOST TSC COMMENTS
1. Both carriers are prepared
for a TRANSFER command at
the source ports.