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SEMI E64-0600 © SEMI 1997, 2005 6 NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability of the …
SEMI E64-0600 © SEMI 1997, 2005 5
Figure R1-1
Front Elevation View
R1-10 Note that an installed docking interface may cause a potential trip hazard as shown in Figure R1-2.
Equipment suppliers and/or docking interface suppliers may be required to eliminate the potential of this hazard
(e.g., by adding covers or shields).
Figure R1-2
Side Elevation View
SEMI E64-0600 © SEMI 1997, 2005 6
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
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respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
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the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
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consent of SEMI.
SEMI E66-1103 © SEMI 1997, 2003 1
SEMI E66-1103
TEST METHOD FOR DETERMINING PARTICLE CONTRIBUTION BY
MASS FLOW CONTROLLERS
This test method was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 27, 2003. Initially available at www.semi.org October 2003; to be published November
2003. Originally published September 1997.
1 Purpose
1.1 The purpose of this test is to measure particle
contribution by mass flow controllers (MFCs) in high-
purity gas systems.
2 Scope
2.1 This document describes a test method that yields
statistically significant comparisons of particle
contribution among mass flow controllers under test
conditions.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This document is not intended as a method for
monitoring in situ particulate performance once a
particular MFC has been tested.
3.2 The test medium is limited to nitrogen. Actual
performance under normal operating conditions may
differ.
3.3 The accuracy of the data generated by this method
is limited to the accuracy of the particle measuring
instruments used.
3.4 This test method is intended for use by operators
who understand the use of the apparatus at a level
equivalent to one year of experience.
3.5 This test method should not be expected to yield
comparable results from one test set up to another, due
to the limitations of current particle counting
technology.
3.6 Results may be compromised by the methods used
to construct the apparatus.
4 Referenced Standards
4.1 SEMI Standards
SEMI E29 — Standard Terminology for the Calibration
of Mass Flow Controllers and Mass Flow Meters
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
4.2 ANSI Standards
1
ANSI B46.1 — Surface Texture (Surface Roughness,
Waviness, and Lay)
4.3 ISO Standards
2
ISO 14644-1 — Cleanrooms and associated controlled
environments Part 1: Classification of air cleanliness.
ISO 14644-2 — Cleanrooms and associated controlled
environments Part 2: Specifications for testing and
monitoring to prove continued compliance with ISO
14644-1
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CNC — condensation nucleus counter
5.1.2 dof — degrees of freedom
5.1.3 DUT — device under test
5.1.4 FS — full scale
5.1.5 IKS — isokinetic sampler
5.1.6 kPa — kiloPascal
5.1.7 LPC — laser particle counter
5.1.8 ppm — parts per million
5.1.9 psia — pounds per square inch absolute
5.1.10 psid — pounds per square inch differential
1 American National Standards Institute, Headquarters: 1819 L
Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020;
Fax: 202.293.9287, New York Office: 11 West 42nd Street, New
York, NY 10036, USA. Telephone: 212.642.4900; Fax:
212.398.0023, Website: www.ansi.org
2 International Organization for Standardization
ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-
1211 Geneva 20, Switzerland. Telephone: 41.22.749.01.11; Fax:
41.22.733.34.30 Website: www.iso.ch