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SEMI F58-1000 © SEMI 2000 4 9 Reporting Results 9.1 Co mplete m o isture response c u r ve s for all test syste ms and relevant te st blanks should b e include d. A summary s heet may compare systems in terms of “ind uct…

SEMI F58-1000 © SEMI 20003

be such that some flow can be maintained through the

bypass loop and the test system simultaneously as well

as through each separately. Use of pneumatic valves to

facilitate rapid and simultaneous switching is

recommended.

7.4.2 Other arrangements than that s hown may also be

used. The moisture pulse generator should be designed

so as to give the fastest possible response of the blank

to a change in input moisture level.

7.5 Temperature Control and Measurement — A

stable temperature during the test is of critical import-

ance. The test system shall be kept at 30ºC. TESTS AT

DIFFERENT TEMPERATURES CANNOT BE

COMPARED. Ideally, the blank and test system should

be maintained in a temperature-controlled chamber.

However, if this is impractical, a heating tape can be

used. Temperature control should be to ± 1ºC. A

continuous record of temperature during the test shall

be maintained.

8 Procedure

8.1 Blank Tests — A blank test sha ll be carried out

after each calibration. If initial dry-down testing of

system is not of interest, the initial dry-down test of the

test blank may be omitted and the test blank brought to

equilibrium with zero gas in whatever manner is most

convenient, except that the test blank should not be

heated above 200ºC. Permanent changes in moisture

interaction have been observed at temperatures above

this level.

8.1.1 Initial Dry-down — Start the experiment with the

blank in place of the test system and a flow of dry gas

through the APIMS. The APIMS output should be at

equilibrium with the lowest moisture level of interest,

and in any case no higher than 200 ppt.

8.1.1.1 Switch the gas flow to pass pri marily through

the bypass loop while maintaining a small flow through

the test blank. Remove the test blank completely from

the system. If a glove box or other such enclosure is

used, do not remove the test blank from the glove box.

Immediately reconnect the test blank to V

, leaving it

disconnected from V

. Allow dry nitrogen to flow

through the test blank for five minutes to purge the air

from inside before reconnecting to V

. Switch the gas to

flow only through the blank and not through the bypass

loop. The APIMS will show an increase in moisture

concentration. Record the APIMS output until it

reaches 800 ppt or 48 hours, whichever is less.

8.1.1.2 Repeat the above test twice for a total of three

data sets.

8.2 Tests on Actual Test System

8.2.1 Initial Dry-down — This porti on of the test is

designed to determine the quantity of removable

moisture on the wetted surfaces of the system in the

condition in which it is typically supplied. Thus, the

results of this test will reflect, by design, any

precautions which the supplier has taken to remove

moisture and maintain its dryness during shipping.

8.2.1.1 Start the test as in Section 8.1. 1. The test

system should not be unpacked until after the APIMS

has equilibrated with the background moisture level. If

a glove box or other such enclosure is used, unpack the

system in the glove box. Switch the dry nitrogen flow

to pass through the bypass loop while maintaining a

small flow through the test blank. Bake the sample line

to APIMS at 170°C for 10 min and the APIMS ion

chamber at 150°C for 10 min. Undo the final layer of

packing and any shipping caps or plugs on the system at

this point. Remove the sample blank and connect the

test system to valve V

as quickly as possible. Ensure

that the gas lines going to APIMS will be under N

purge during the removal of test blank and installation

of test system. Allow the dry nitrogen flow to purge out

any ambient air in the system for five minutes, then

connect the system to V

. Switch the gas to flow (1.2

slpm) only through the test system and not through the

bypass loop. The APIMS will show an increase in

moisture concentration. Record the APIMS output until

it reaches 200 ppt or for 24–48 hours, whichever is less.

8.2.1.2 After 24–48 hours, the initial d ry-down part of

the test can be terminated. Remove the filters from the

test system and install special spool pieces. This is done

since filters have a large surface area and would

dominate the dry-down performance.

8.2.2 Moisture Input Test — Flow 1 .2 slpm of dry

nitrogen gas (200 ppt moisture) through appropriate

process channels of the test system. Connect the outlet

of the gas panel to the sample line connecting to the

APIMS. Bake the appropriate process channels using

heater tapes at 60°C for 12 h to remove atmospheric

contamination.

8.2.2.1 At the conclusion of baking, equilibrate the test

system to 30°C. Bake the sample line at 170°C for 10

min and ion source of APIMS at 150°C for 10 min.

Perform a leak check at the inlet and outlet connections

of the test system using 1% methane gas in nitrogen,

after warming up the APIMS for 30 min. Switch the

input gas to nitrogen with 200 ppb moisture (by

switching valves V

, V

, and V

simultaneously, if the

arrangement shown in Figure 1 is used) while recording

the APIMS response. Maintain this input for 20 min

and then switch the input gas to dry nitrogen (200 ppt

moisture) and monitor the dry-down.

SEMI F58-1000 © SEMI 2000 4

9 Reporting Results

9.1 Complete moisture response curves for all test

systems and relevant test blanks should be included. A

summary sheet may compare systems in terms of

“induction time,” peak height, and/or decay time

(detected moisture concentrations may be plotted as a

function of time for the test systems). Temperature,

pressure, and flow measurements, and as complete a

record as possible of all experimental variables should

be noted.

Regulator

3-port Valve

Pressure gauge/

Transducer

MFC

Dryer +

Filter

Moisture

Generator

APIMS

Regulator

MFC

Test system

(At 30°C)

To vent

UHP N

Bypass loop

UHP N

To vent

Figure 1

APIMS Moisture Test Schematic

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature with respect to any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F59-0302 © SEMI 2000, 2002 1

SEMI F59-0302

TEST METHOD FOR DETERMINATION OF FILTER OR GAS SYSTEM

FLOW PRESSURE DROP CURVES

This test method was technically approved by the Global Facilities Committee and is the direct responsibility

of the North American Facilities Committee. Current edition aproved by the North American Regional

Standards Committee on November 27, 2001. Initially available at www.semi.org December 2001; to be

published March 2002. Originally published October 2000.

NOTE: This document was entirely rewritten for

publication in 2002.

1 Purpose

1.1 The purpose of this document is to define a method

for testing filters or gas systems being considered for

installation into a high-purity gas distribution system or

on semiconductor manufacturing equipment,

respectively. Application of this test method is

expected to yield comparable data among filters or gas

systems.

1.2 This document establishes a test method for

preparing a pressure drop versus flow rate curves for

filters and gas systems.

2 Scope

2.1 This procedure applies to clean filters including

those cartridges of metal, ceramic and membrane

construction. The pressure drops for integral

housing/cartridge combination units are determined as a

single set of values. For housings with removable filter

cartridges, the flow curves of the housing and

housing/cartridge combination are determined

separately.

2.2 This procedure applies to high-purity gas systems.

This procedure applies to face-seal, surface mount—

modular, and monolithic integrated gas systems.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate and safety health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 For separable filtration units, a single cartridge

pressure drop value cannot be combined to give the

pressure drop value for an extended length cartridge,

because of the limitations imposed by a common outlet

port for the assembly.

3.2 This method is written with the assumption that the

operator understands the use of the apparatus at a level

equivalent to six months of experience.

3.3 This method is written to test a filter under normal

operating conditions. It does not prescribe a procedure

for reverse flow testing since operation of the filter in

this manner is not recommended by the manufacturers.

3.4 Components that induce line pressure changes on a

system such as pressure regulators, and MFCs are not

considered in this test method.

3.5 Proper flow of low vapor pressure gases can be

effected by small pressure drops and may need to be

evaluated independently.

4 Referenced Standards

NOTE 1: As listed or revised, all documents cited shall be

the latest publications of adopted standards.

4.1 ASME Performance Test Code PTC 19.5, 1972 

“Applications.” Part II of “Fluid Meters, Interim

Supplement on Instruments and Apparatus.”

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CDA  clean, dry air

5.1.2 °C  degrees Celsius

5.1.3 DUT  device under test

5.1.4 kg  kilogram

5.1.5 kPa  kilopascals, (kNm

-2

)

5.1.6 m  meter

5.1.7 MFC  mass flow controller

5.1.8 N  Newton (kg m/s

)

5.1.9 P  pressure in kiloPascal (kPa)

5.1.10 POC — point of connection

5.1.11 psi  pounds per square inch

5.1.12 psia  pounds per square inch absolute

5.1.13 psid  pounds per square inch differential

5.1.14 psig  pounds per square inch gauge

1 American Society of Mechanical Engineers (ASME) International,

3 Park Avenue, New York, NY 10016-5990