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SEMI E116-0705 © SEMI 2002, 2005 6  EPT module i dle. 9.2.2 The equipm ent shall maintain an EPT state model for eac h major m o dule (e. g., process stations and c hambers, wafer handling systems, etc.) through which a…

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8 Overview

8.1 This section defines the concepts that enable EPT to provide information required for determining equipment

performance.

8.2 Equipment processing times, including throughput and cycle times, are determined by two factors: (1) the

sequence of tasks performed by the equipment’s EPT modules, including the number of each task performed, as well

as the series and parallel relationships between tasks, and (2) the execution time of each individual task. By tracking

equipment systems in terms of modules that perform tasks, it will be possible to precisely identify the affect of both

factors toward overall system performance.

8.3 EPT enables tracking to this level of detail by introducing the concept of an EPT module and the concept of a

task. EPT-compliant equipment are required to report events according to a breakdown of equipment operations

into tasks and EPT modules. An EPT module is an equipment component that affects processing or throughput, and

is capable of executing only one task at a time. Examples of EPT modules include process stations, process

chambers, wafer handling systems, etc. A task is a planned and repeatable activity with an expected duration and a

definite beginning and end. Examples of tasks include the following:

 Move wafer from cassette to stage

 Pre-align wafer

 Align reticle

 Preheat chamber

 Increase vacuum etc.

8.4 EPT-compliant equipment consist of EPT modules that perform tasks. Thus, the state of the equipment can be

effectively modeled as a composition of the states of the EPT modules. In addition, EPT provides detailed

information required for performance tracking by providing the task-level details for each EPT module.

8.5 EPT modules and tasks are to be defined such that each EPT module executes only one task at a time. An

example is given in Related Information §R1-7. Each equipment system must have defined at least as many EPT

modules as tasks that may be performed simultaneously by that system.

8.6 Each task should be defined such that the units involved (e.g., wafers, substrates, reticles), the EPT modules

involved (e.g., process station, robot, etc.), and the task type (e.g., “process”, “support”, etc.) are constant throughout

the duration of the task. A change in any of the following items should result in the start of a new task or completion

of current task:

 Change in material involved (e.g., arrival of wafer, removal of wafer)

 Change of EPT modules involved (e.g., robot moves wafer, chamber processes wafer)

 Change in task type (e.g., purge recipe followed by production recipe)

NOTE 1: It is not practical for equipment to define tasks or modules at an indefinite level of detail. It is therefore recommended

that in each instance for which the material involved, the EPT modules involved, and the task types are all constant, events for

only one task should be reported. Any further breakdown is not required for EPT compliance. EPT places no limitations on

supplemental event reporting within any task. However, these supplemental events should not be reported as EPT events.

9 EPT State Model

9.1 This section defines the basic Equipment Performance Tracking State Model, which is applied to the equipment

and its EPT modules.

9.2 EPT State Model Requirements

9.2.1 The EPT state model is intended to capture the different states of the equipment and its EPT modules from an

operational point of view:

 EPT module busy executing a task.

 EPT module blocked from executing a task.

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 EPT module idle.

9.2.2 The equipment shall maintain an EPT state model for each major module (e.g., process stations and chambers,

wafer handling systems, etc.) through which a unit passes throughout the entire equipment from removal of units

from the carrier to the return of units to the carrier.

9.2.3 The equipment shall maintain an EPT state model for any major component of the equipment that impacts

processing and throughput.

9.2.4 The equipment shall maintain its own EPT state model for the overall equipment.

9.2.5 The equipment is responsible for communicating all EPT state transitions.

9.2.6 The EPT state model can be applied to the Equipment Front-End Module (EFEM).

9.2.7 There are two types of EPT Modules: (1) Production EPT modules, and (2) EFEM/LoadPort EPT modules.

Both types have a module-level EPT State Machine.

9.3 EPT State Model Diagram

9.3.1 Figure 1 shows the EPT state module diagram.

IDLE

BLOCKED BUSY

EPT State Model

Figure 1

Equipment Performance Tracking State Model

9.4 EPT State Definitions

This section describes the EPT states.

9.4.1 IDLE

9.4.1.1 EPT Module — The following conditions are required for the module to be in the IDLE state:

 No material is present in the module and

 The module is not executing a task and

 No fault condition exists in the module that prevents it from starting a new task.

9.4.1.2 Equipment — The following conditions are required for the equipment to be in the IDLE state:

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 No BLOCKED EPT modules prevent an EPT module from starting a new task, and

 There is no EPT module in the BUSY state with a task type of 1, 2, 3, 4 or 5.

9.4.1.3 For both the equipment and modules the following conditions may

exist in the IDLE State:

 The equipment or module is maintaining and monitoring environmental requirements (e.g., background

temperature, particle monitoring, etc).

9.4.2 BUSY

9.4.2.1 EPT Module — The following conditions are required for the module to be in the BUSY state:

 The module is executing a task and

 No fault condition exists in the module that prevents the execution of a task.

9.4.2.2 Equipment — The following condition is required for the equipment to be in the BUSY state:

 At least one EPT module is BUSY with a task type of 1, 2, 3, 4, or 5.

9.4.2.3 For both the equipment and modules the following conditions may

exist in the BUSY State:

 Material is present.

9.4.3 BLOCKED

9.4.3.1 EPT Module — One or more of the following conditions are required for the module to be in the

BLOCKED state:

 Conditions exist that do not allow the EPT module to continue or start execution of a task:

 A fault condition(s) exists that prevents the EPT module from completing its task.

 A fault condition(s) exists that prevents the EPT module from starting a new task.

 The EPT module is pausing (or aborting) as the result of a pause (or abort) directive.

 The EPT module has paused its task and is awaiting a resume directive.

 The EPT module fails to initialize upon start-up.

9.4.3.2 Equipment — The following condition is required for the EPT equipment to be in the BLOCKED state:

 No EPT module is BUSY with task type of 1, 2, 3, 4 or 5, and

 At least one BLOCKED EPT module prevents any EPT module from starting a new task or completing a

current task.

9.4.3.3 For both the EPT equipment and modules the following conditions may

exist in the BLOCKED State:

 Material is present.

9.5 EPT State Transition Table – Module Level

9.5.1 This section defines the state transitions for the EPT modules within the equipment.

9.5.2 For each status variable updated with the event change, the corresponding event variable shall also be updated

(see Table 4).