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SEMI F34-0998 © SEMI 1998 1 SEMI F34-0998 GUIDE FOR LIQUID CHEMIC A L PI PE LABELING 1 Purpose 1.1 Thi s docum ent establishes a re c o m mended scheme for labeli ng liquid process ch emical piping systems used in semico…

SEMI F33-0998 © SEMI 19985

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SEMI F34-0998 © SEMI 19981

SEMI F34-0998

GUIDE FOR LIQUID CHEMICAL PIPE LABELING

1 Purpose

1.1 This document establishes a recommended scheme

for labeling liquid process chemical piping systems

used in semiconductor manufacturing facilities and

equipment.

1.2 consistent labeling system facilitates rapid

identification of piping contents and avoids confusion

within the industry by eliminating the need for each

company or locality to develop their own guides.

2 Scope

2.1 This guide applies to compone nts typically found

in a liquid process chemical piping system for

semiconductor manufacturing processes. The following

list of included components is not exhaustive:

• Piping

• Valves

• Filters

• Regulators

• Tubing

3 Limitations

3.1 This guide does not replace or supersede any

labeling or identification requirements established by

local, state, or national authorities. Local laws and

regulations should be reviewed to ensure compliance.

3.2 This guide does not apply to containers regulated

by the United States Department of Transportation

(DOT), International Air Transport Association (IATA)

or other regulatory bodies.

3.3 This guide was prepared to address piping systems

conveying liquid process chemicals located within

semiconductor facilities. See Sections 6.6 and 6.11 for

application inside equipment.

4 Referenced Documents

NOTE: All documents cited should be the latest published

versions.

4.1 ANSI Document

ANSI/ASME A13.1 — Scheme for the Identification of

Piping Systems

5 Terminology

5.1 liquid chemical distribution system — The

collection of components and subsystems used to

control and deliver liquid process chemicals from a

source location to a point of use in a semiconductor

manufacturing facility.

6 Recommendations

6.1 Piping system labels and identification, should be

designed, and implemented in accordance with the

following recommendations.

6.2 The following color schemes should be used to

identify all liquid process chemical piping systems.

When a chemical has characteristics of more than one

category, the color scheme should be determined by the

most significant health or safety hazard of the chemical.

6.3 Background colors may be applied to the piping by

using pigments, paints, or other means acceptable to the

owner; or may be applied as the background color for

labels or tags used to identify the contents of the piping

system.

6.4 Primary label information consists of the name of

the material contained in the piping system; spelled out

in the predominant language of the country or region

where the piping system is used. Additional languages

may be used to supplement the primary language.

1 American National Standards Institute, 11 West 42nd Street, 13th

floor, New York, NY 10036, USA, Telephone:+ 1.212.642.4900,

Telefax:+ 1.212.398.0023, E-mail: info@ansi.org, WWW:

http://www.ansi.org/

Table 1 Piping and Label Color Codes

Chemical Category Background Color Text Color

Highly Toxic, Poisonous Black White

Flammable, Combustible, and Pyrophoric Red White

Acidic Orange Black

Basic (Caustic) Magenta White

Oxidizer Yellow Black

Non-Toxic, Non-Flammable,Low to Moderate Physical Hazard Green White

6.5 Additional information such as the chemical category, chemical formula, acronyms, hazard ratings, or other

information may be added, provided that it does not interfere with the primary information required. A separate label

may be used for the additional information.

6.6 The color field label length and lettering sizes shown in Table 2 should be used for all diameters of pipe and

tubing. For pipe diameters smaller than 12.7 mm (0.5 inch), the label should be large enough to wrap at least half

way around the pipe, and not obstruct the text. If labeling inside equipment, the size of the labels may be adjusted,

provided they remain easily seen and readable. Consideration should be given to using tags instead of labels.

NOTE: Labeling sizes for piping 19 mm (0.75 inch) or larger in outside diameter were taken directly from ANSI A13.1. Smaller

sizes were developed for this guide.

6.7 The height of the label should be at least two times (2×) the height of the text, with the text centered in the

label. The label should allow a length of background color on each end of the text at least one half pipe diameter in

length but not less than 12.7 mm (0.5 inch).

6.8 The orientation of text on the label should conform to local customs, conventions, or practices.

6.9 Directional flow arrows should be applied to all piping systems indicating the direction of material flow within

the system. The arrow(s) should be included as part of the primary label but may be applied separately within close

proximity to the primary label (e.g., less than 5 cm (2 inches) for pipe diameters up to 5 cm (2 inches); less than 15

cm for larger pipe diameters).

6.10 Labels should be applied to the piping system at the following minimum locations:

• On both sides of a barrier penetration (i.e., walls, floors, ceilings, equipment enclosures, etc.). The labels should

be applied within 1 meter (3.3 feet) or as close as practical to the barrier.

• As close as practical to all changes in direction where the length of run in the new direction is 1 meter (3.3 feet)

or greater. Where several directional changes are made within a short length of run, labels need not be applied

at every change in direction, but should be applied at sufficient intervals to readily identify the piping.

• On long runs, the labels should be applied at intervals not exceeding 6 meters (20 feet). Shorter intervals should

be used for small diameter pipe and where several pipes are run in close proximity.

• Where several pipes are run parallel to each other, the labeling for all pipes should be in line with each other

(i.e., should not be staggered).

• A sufficient number of labels should be applied at each location to ensure that they can be readily seen and read

from all viewing or approach direction(s).

• Each side of a “T” connection should be labeled within 1 meter (3.3 feet) of the “T”.