semi合集-English.pdf - 第815页
SEMI E111-0305 © SEMI 2001, 2005 12 Symbol Used Figure Value Spe cified Reference Measured From Feature Measured To x 242 7 56 mm (2.205 in.) maximum bilateral referenc e plane edge of rear retainer volume x 243 4 77.35 …
SEMI E111-0305 © SEMI 2001, 2005 11
Table 2 External and Internal Dimensions for RSP150
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
1 45° ± 0.5° facial reference plane sides of orientation notches
1 45° ± 0.5° facial reference plane edge of side handling flange chamfer
2 45° ± 0.5° facial reference plane sides of side handling flange
orientation notches
5 45° ± 1° bilateral and facial plane
intersection
surface of the center hole in the top
robotic handling flange
r65 n/a 1 mm (0.039 in.)
maximum
not applicable all required concave features (radius)
r66 n/a 2 mm (0.079 in.)
maximum
not applicable all required convex features (radius)
r67 11 5 mm (0.197 in.)
minimum
info pad center perimeter of info pad
d63 5 35.0 + 0.9 / - 0.1 mm
(1.378 + 0.035 / -
0.004 in.)
centered on bilateral and
facial plane intersection
top robotic handling flange hole
design feature
x41 1 30 ± 1 mm
(1.181 ± 0.039 in.)
bilateral reference plane orientation notch center
x42 1 50 ± 1 mm
(1.969 ± 0.039 in.)
bilateral reference plane orientation notch center
x43 1 50 ± 1 mm
(1.969 ± 0.039 in.)
bilateral reference plane orientation notch center
x44 1 53 mm (2.087 in.)
maximum
bilateral reference plane side of robotic handling flange
column
x45 1 65.3 ± 1 mm
(2.571 ± 0.039 in.)
bilateral reference plane orientation notch tip
x46 1 71 ± 1 mm
(2.795 ± 0.039 in.)
bilateral reference plane edge of robotic handling flange
x47 1 58 mm (2.283 in.)
minimum
bilateral reference plane edge of robotic handling flange
corner beveling
x100 1 92.5 mm (3.642 in.)
minimum
bilateral reference plane edge of recess
x114 None 0 ± 1 mm
(0 ± 0.039 in.)
bilateral reference plane reticle bisecting plane
x119
4
65.2 mm (2.567 in.)
minimum
bilateral reference plane edge of pellicle exclusion volume
x129 2 5.68 ± 0.25 mm
(0.224 ± 0.010 in.)
side edge of side handling
flange
side handling flange alignment notch
tip
x223 1, 3 106.5 ± 1 mm
(4.193 ± 0.039 in.)
bilateral reference plane edge of side handling flange
x227 1 107.5 mm
(4.232 in.) maximum
bilateral reference plane side of pod
x236 3 100 mm (3.937 in.)
maximum
bilateral reference plane edge of side handling exclusion
volume
x238 4 68.2 mm (2.685 in.)
maximum
bilateral reference plane edge of end-effector exclusion
volume
x239 4 78.3 mm (3.083 in.)
maximum
bilateral reference plane edge of end-effector exclusion
volume
x240 4 85.3 mm (3.358 in.)
minimum
bilateral reference plane edge of end-effector exclusion
volume
x241 4 90 mm (3.543 in.)
maximum
bilateral reference plane edge of safety rail exclusion volume
SEMI E111-0305 © SEMI 2001, 2005 12
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
x242 7 56 mm (2.205 in.)
maximum
bilateral reference plane edge of rear retainer volume
x243 4 77.35 mm (3.045 in.)
minimum
bilateral reference plane edge of lift clearance exclusion
volume
x245 9 67.7 mm (2.665 in.) bilateral reference plane center of reticle contact surface
x246 10 0.5 mm (0.019 in.)
maximum
center of reticle contact
surface
edge of reticle contact surface
x247 11 104.5 mm (4.114 in.)
maximum
bilateral reference plane edge of conveyor rail surface
x248 11 107.5 +0 –0.5 mm
(4.232 +0 –0.020 in.)
bilateral reference plane edge of conveyor rail surface
x249 7 36 mm (1.417 in.)
maximum
bilateral reference plane edge of reticle backstops
x250 7 45 mm (1.772 in.)
minimum
bilateral reference plane edge of reticle backstops
x251 12 94 mm (3.700 in.)
minimum
bilateral reference plane edge of RFID exclusion volume
x252 12 105mm (4.134 in.)
maximum
bilateral reference plane edge of RFID exclusion volume
x253 11
27.25 0.5 mm
(1.073 0.039 in.)
bilateral reference plane center of info pads A and B
x254 11
45.75 0.5 mm
(1.801 0.039 in.)
bilateral reference plane center of info pads C and D
y44 1 53 mm (2.087 in.)
maximum
facial reference plane side of robotic handling flange
column
y45 1 65.3 ± 1 mm
(2.571 ± 0.039 in.)
facial reference plane orientation notch tip
y46 1 71 ± 1 mm
(2.795 ± 0.039 in.)
facial reference plane edge of robotic handling flange
y47 1 58 mm (2.283 in.)
minimum
facial reference plane edge of robotic handling flange
corner beveling
y106 1 92.5 mm (3.642 in.)
minimum
facial reference plane edge of recess
y126 1 71.1 ± 0.5 mm
(2.799 ± 0.020 in.)
facial reference plane depth of side handling flange
y127 1 61.9 ± 0.5 mm
(2.437 ± 0.020 in.)
facial reference plane edge of side handling flange corner
bevel
y225 1 115.25 mm (4.537
in.) maximum
facial reference plane side of pod
y227 7, 8 45 mm (1.771 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
y228 7, 8 12.6 ± 0.4 mm
(0.496 ± 0.016 in.)
facial reference plane reticle bisecting plane
y231 7, 8 70 mm (2.756 in.)
minimum
facial reference plane edge of rear retainer volume
y232 9 45.5 mm (1.791 in.)
maximum
facial reference plane edge of end effector exclusion
volume
y233 9 44.5 mm (1.752 in.) facial reference plane center of reticle contact surface
y234 9 77.5 mm (3.051 in.) facial reference plane center of reticle contact surface
y235 10 1 mm (0.039 in.)
maximum
center of reticle contact
surface
edge of reticle contact surface
SEMI E111-0305 © SEMI 2001, 2005 13
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
y236 11 82.5 mm (3.248 in.)
minimum
facial reference plane end of conveyor rail surface
y238 9 78.5 mm (3.091 in.)
maximum
facial reference plane edge of end effector exclusion
volume
y239 7 88.8 mm (3.496 in.)
maximum
bilateral reference plane edge of reticle backstops
y240 1 10 mm (0.394 in.)
minimum
facial reference plane edge of RFID placement zone
y241 1 58 mm (2.283 in.)
maximum
facial reference plane edge of RFID placement zone
y242 11 80.25 ± 0.5 mm
(3.159 ± 0.020 in.)
facial reference plane center of info pads
z2 None 2 mm (0.079 in.)
maximum
horizontal reference plane surface of info pads (when down)
z26 None 9 mm (0.354 in.)
minimum
horizontal reference plane surface of info pads (when up)
z276 6 ± 0.15 mm
(0.006 in.)
each nominal reticle seating
plane
entire bottom surface of the reticle
z290 4 22 mm (0.866 in.)
maximum
horizontal reference plane edge of first reticle pellicle exclusion
volume
z291 4 32 mm (1.260 in.) horizontal reference plane nominal reticle seating plane
z297 6 1.5 mm (0.059 in.)
minimum
each nominal reticle seating
plane
edge of end-effector exclusion
volume
z299 6 8.95 mm (0.352 in.)
minimum
each nominal reticle seating
plane
edge of end-effector exclusion
volume
z301 4 22 mm (0.866 in.)
maximum
horizontal reference plane edge of safety rail exclusion volume
z302 4 23.5 ± 0.5 mm
(0.945 ± 0.020 in.)
horizontal reference plane edge of first reticle end-effector
exclusion volume
z303 3 52.5 mm (2.067 in.)
maximum
horizontal reference plane top surface of dome recess
z304 3 55 mm (2.165 in.)
maximum
horizontal reference plane top surface of dome
z305 3, 5 70 ± 0.5 mm
(2.756 ± 0.020 in.)
horizontal reference plane bottom surface of robotic handling
flange
z306 3 49 ± 0.5 mm
(1.929 ± 0.020 in.)
horizontal reference plane bottom edge of side handling flange
z307 3 52.5 mm (2.067 in.)
maximum
horizontal reference plane top surface of side handling flange
z308 3, 12 25 mm (0.984 in.)
maximum
horizontal reference plane edge of side handling exclusion
volume and RFID placement zone
z310 3, 5 8 mm (0.315 in.)
maximum
bottom surface of robotic
handling flange
top of robotic handling flange
z312 8 44 mm (1.732 in.)
maximum
horizontal reference plane top of rear retainer exclusion volume
z313 n/a 43 ± 1 mm
(1.1693 ± 0.039 in.)
horizontal reference plane top of reticle backstops
z314 12 10 mm (0.394 in.)
minimum
horizontal reference plane bottom of RFID placement zone
z315 12 30 mm (1.181 in.)
maximum
horizontal reference plane top of RFID placement zone