semi合集-English.pdf - 第4260页
SEMI F78-0304 © SEMI 2003, 2004 13 Figure 6 Maximum Open Gap N ot to Exced 0.006 in. (0.15 mm) Figure 7 OD or ID Chamfering
SEMI F78-0304 © SEMI 2003, 2004 12
Figure 4
Tube Facing to Remove Distorted Material
Figure 5
Weld Fit-Up Gap Not to Exceed 0.003 in. (0.08 mm)
SEMI F78-0304 © SEMI 2003, 2004 13
Figure 6
Maximum Open Gap Not to Exced 0.006 in. (0.15 mm)
Figure 7
OD or ID Chamfering
SEMI F78-0304 © SEMI 2003, 2004 14
Figure 8
All Welds Must Use Positive and Repeatable Form of ID Purge