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SEMI F97-0305 © SEMI 2005 1 SEMI F97-0305 SPECIFICATION FOR FACILITY PACKAGE INTEGRATION, MONITORING AND CONTROL This specification was technically approv ed by the Global Facilities Com mittee and is the direct responsi…
SEMI F96-0704 © SEMI 2004 2
5.5 The height difference between the tops of the ports
will be no more than 0.5 mm.
5.6 Additional ports may be provided so long as they
do not interfere with the above specifications.
NOTE 1: The user of this standard should evaluate the
consequences of connecting a given precursor to a point
intended for other precursors. The nature of the precursor
itself and of the other precursors expected to be in use at the
same location should be taken into account. Consider
packaging precursors with a non-standard connector on the
canister outlet if necessary to avoid a dangerous situation.
6 Valves
6.1 The inlet and outlet port are each provided with a
valve but the details of those valves are not specified
here. If pneumatic valves are provided, the pneumatic
connection shall be a 1/8” quick-connect type.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F97-0305 © SEMI 2005 1
SEMI F97-0305
SPECIFICATION FOR FACILITY PACKAGE INTEGRATION,
MONITORING AND CONTROL
This specification was technically approved by the Global Facilities Committee and is the direct
responsibility of the European Global Facilities Committee. Current edition approved by the European
Regional Standards Committee on November 10, 2004. Initially available at www.semi.org January 2005; to
be published March 2005.
1 Purpose
1.1 The purpose of this specification is to provide the requirements for the architecture, functionality and interfaces
for Facility Monitoring and Control Systems and the various Facility Package Units to enable a standardized and
integrated communication between them. This specification is appended with related information to provide
application examples.
1.2 Background and Motivation
1.2.1 Today, the suppliers of Facility Package Units (e.g., chemicals, power supply, gases, HVAC) are often using
individual communication concepts. This leads to high efforts to specify the communication structures between
Facility Package Units (FPU) and the Facility Monitoring and Control Systems (FMCS), to evaluate the quoted
solutions and to eventually integrate these units. These individual, not standardized concepts today are not reusable,
bear risks in execution and lead to high maintenance costs.
1.2.2 This specification is a first step to standardize the communication between facility and monitoring
components. Therefore, it focuses in its scope to a small set of requirements which are common to all FPUs. As
this communication concept is adopted by the various FPU suppliers and their customers, more specific standards
describing particular FPUs and their services may evolve.
1.3 Who and what is addressed by this standard.
1.3.1 A standardization of the communication concept between FMCS and FPUs will support Facility Package Unit
manufacturers, general contractors, system integrators, purchasers, and control system manufacturers. It will lead to
substantially reduced costs, more reliable execution times, and optimized maintenance concepts.
2 Scope
2.1 This standard specifies the requirements for the architecture, common services, data, and its semantic meaning
to integrate the FPUs into the FMCS. For this purpose, a basic set of common services (operations) between the
FMCS and the FPUs are specified to exchange FPU status information and data. In addition, the state models for
FPUs are described.
2.2 Out of scope for this standard are:
Services of FMCS provided to interface to Manufacturing Execution Systems or Enterprise Resource Planning
Systems,
Specification of functionality of particular FMCS functions (graphical user interface (GUI), data archives,
reporting archives, alarm handling, etc.), and
The specification of the interface between FPU control level and FPU field level.
2.3 Applicability — This standard applies to the field of facility management and is targeted for FPU suppliers and
FMCS suppliers for systems integration, engineering and commissioning as well as the operation of such systems by
the purchasers.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
SEMI F97-0305 © SEMI 2005 2
3 Limitations
3.1 This standard focuses on the semantic definition of data exchanged between FMCS and FPUs. It is not intended
to specify the protocols to be used for data being exchanged.
3.2 The standard does not focus on any specific hardware or software products to be used.
4 Referenced Standards
4.1 SEMI Standards
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E54 — Sensor Actuator Network Standards Series
4.2 Other Standards
4.2.1 OPC — Data Access Automation Interface Standard, Version 2.0, OPC Foundation 1998, available from
http://www.opcfoundation.com/
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CPU — Central Processing Unit
5.1.2 ERP — Enterprise Resource Planning
5.1.3 FMCS — Facility Monitoring and Control System
5.1.4 FPU — Facility Package Unit
5.1.5 GUI — Graphical User Interface
5.1.6 HVAC — Heating Ventilation and Air Conditioning
5.1.7 I/0 — Input/Output Device
5.1.8 IT System — Information System
5.1.9 MES — Manufacturing Execution System
5.1.10 OLE — Object Linking and Embedding
5.1.11 OP-Mode — Operating Mode
5.1.12 OPC — OLE for Process Control
1
5.1.13 PLC — Programmable Logic Controller
5.1.14 UPW — Ultra Pure Water
5.2 Definitions
5.2.1 alarm&event history — functionality inside a FMCS to store alarms and events in a persistent storage (e.g. a
database). Focus is to later retrieve alarms and events for investigation purposes.
5.2.2 Client/Server-System — a system consisting of two different sub systems: a server system which provides
services and client systems which access these services.
5.2.3 communication interface — interface of an IT system to communicate with other IT systems. Usually the
communication takes place via a network.
1 For OPC and OPC Foundation see OPC Foundation (http://www.opcfoundation.com/).