semi合集-English.pdf - 第5986页

SEMI P42-0304 © SEMI 2004 19 <AlignmentMarkInf ormation> <AlignmentMarkID> G3</AlignmentM arkID> <Group>LSA</Gro up> <WaferMarkTy pe>NLPD-G-3N</WaferMarkTy pe> < W a f e r M a…

SEMI P42-0304 © SEMI 2004 18

<X>50000</X>

<Y>-81250</Y>

<UnitType>um</UnitType>

</ShotPosition>

</ShotInformation>

</ShotMap>

<ReticleDesign>

<ReticleInformation>

<ReticleID>RET-A</ReticleID>

<ReticleName>SEMI-G</ReticleName>

<BarCode>SEMI-G01-V01</BarCode>

<ReticleSize>

<Size>6</Size>

<UnitType>inch</UnitType>

</ReticleSize>

<ReticleType>HT</ReticleType>

<ReticleMarkID>N-STD</ReticleMarkID>

<ReticleMarkType>STD-S</ReticleMarkType>

<ProjectionMagnification>4</ProjectionMagnification>

</ReticleInformation>

</ReticleDesign>

<AlignmentMarkDesign>

<AlignmentMarkInformation>

<AlignmentMarkID>G1</AlignmentMarkID>

<Group>Global</Group>

<WaferMarkType>NGD-G-N11</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>9997</X>

<Y>245</Y>

</X-Mark>

<Y-Mark>

<X>-5150</X>

<Y>-9997</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G2</AlignmentMarkID>

<Group>Global</Group>

<WaferMarkType>NGD-G-N40F</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>9997</X>

<Y>175</Y>

</X-Mark>

<Y-Mark>

<X>-4850</X>

<Y>-9997</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

SEMI P42-0304 © SEMI 2004 19

<AlignmentMarkInformation>

<AlignmentMarkID>G3</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-6850</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>-6180</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G4</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-6750</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>6850</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G5</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>6250</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>6750</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G6</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

SEMI P42-0304 © SEMI 2004 20

<X-Mark>

<X>6150</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>-6080</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G7</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-8810</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>-7660</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G8</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-8630</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>8810</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G9</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>7730</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>