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SEMI E120.1-0705 © SEMI 2004, 2005 15 Figure 11 IODeviceType 6.3.9 MaterialLocation => MaterialLocationType 6.3.9.1 The MaterialLocation class is mapped to the XML Ma terialLocationType. MaterialLocationType exten ds …

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SEMI E120.1-0705 © SEMI 2004, 2005 14
Table 9 Translation Table For Subsystem
Attribute or Role
Name
UML Type
XML Element or Attribute
(or Reference)
XML Name/Type
element (used first time a Subsystem is
defined in the system)
Subsystems: SubsystemArrayType
subsystems aggregation
element (references a previously
defined Subsystem)
SubsystemRefs: SubsystemRefArrayType
element (used first time an IODevice is
defined in the system)
IODevices: IODeviceArrayType
iodevices aggregation
element (references a previously
defined IODevice)
IODeviceNodeArrayType
materialLocations composition element
MaterialLocations:
MaterialLocationArrayType
Figure 10
SubsystemType
6.3.8 IODevice => IODeviceType
6.3.8.1 The IODevice class is mapped to the XML IODeviceType. IODeviceType defines no attributes or
navigable associations, but it does extend EquipmentElementType (see Figure 11). It is included in multiple
associations, but it cannot navigate any of them. Therefore, its translation table is empty.
Table 10 Translation Table For IODevice
Attribute or Role Name UML Type
XML Element or Attribute
(or Reference)
XML Name/Type
none
SEMI E120.1-0705 © SEMI 2004, 2005 15
Figure 11
IODeviceType
6.3.9 MaterialLocation => MaterialLocationType
6.3.9.1 The MaterialLocation class is mapped to the XML MaterialLocationType. MaterialLocationType extends
NameableType (see Figure 12).
6.3.9.2 Table 11 shows how the attribute of the MaterialLocation class is mapped into XML.
Table 11 Translation Table For MaterialLocation
Attribute or Role Name UML Type
XML Element or Attribute
(or Reference)
XML Name/Type
materialType enumeration element MaterialType: MaterialTypeEnum
Figure 12
MaterialLocationType
6.3.10 SoftwareModule => SoftwareModuleType
6.3.10.1 The SoftwareModule class is mapped to the XML SoftwareModuleType. Table 12 shows how the
attributes of SoftwareModule are mapped to XML. The resulting XML structure is illustrated in Figure 13.
Table 12 Translation Table For SoftwareModule
Attribute or Role Name UML Type
XML Element or Attribute
(or Reference)
XML Name/Type
name string element Name: xs:string
supplier string element Supplier: xs:string
description string element Description: xs:string
version string element Version: xs:string
SEMI E120.1-0705 © SEMI 2004, 2005 16
Figure 13
SoftwareModuleType
6.4 Added XML Constructs
6.4.1 In the process of translating the UML model for CEM into a useful XML schema, is was necessary to add
certain types and constructs to the schema. This section describes these XML constructs and explains the purpose of
each.
6.4.2 XML simpleTypes
6.4.2.1 Table 13 describes each simpleType
9
contained in the XML schema.
Table 13 simpleTypes In The CEM Schema
Type Description
UuidType Pattern for 36-character uuid string is defined.
LocatorType String pattern defined for the Locator value as defined in the Related Information section of
SEMI E120 This is included to promote common definition of Locator. Its use is not
required by SEMI E120 or this specification.
NameType String pattern is defined, limited to certain characters as defined in SEMI E120.
MaterialTypeEnum Defines possible values “Carrier”, “ProcessDurable”, and “Substrate” for
MaterialLocationType.
ProcessTypeEnum Defines possible values “Measurement”, “Process”, “Storage”, and “Transport” for
ExecutionElementType.
6.4.3 Added XML complexTypes
6.4.3.1 Table 14 describes each added complexType
10
contained in the XML schema that was not described above.
Table 14 complexTypes In The CEM Schema
Type Description
ExtensionArrayType Array of ExtensionType associated with NameableType.
SoftwareModuleArrayType Array of SoftwareModuleType aggregated by EquipmentElementType.
MaterialLocationArrayType Array of MaterialLocationType aggregated by EquipmentComponentsType,
ModuleComponentsType, and SubsystemComponentsType.
IODeviceArrayType Array of IODeviceType aggregated by EquipmentComponentsType,
ModuleComponentsType, and SubsystemComponentsType.
IODeviceRefArrayType Array of IODeviceRef (UuidType) aggregated by EquipmentComponentsType,
ModuleComponentsType, and SubsystemComponentsType.
SubsystemArrayType Array of SubsystemType aggregated by EquipmentComponentsType,
ModuleComponentsType, and SubsystemComponentsType.
SubsystemRefArrayType Array of SubsystemRef (UuidType) aggregated by EquipmentComponentsType,
ModuleComponentsType, and SubsystemComponentsType.
9 “simpleType” is an XML term (see also “xs:simpleType”).
10 “complexType” is an XML term (see also “xs:complexType”).