semi合集-English.pdf - 第665页
SEMI E85-0705 © SEMI 1999, 2005 19 NOTE: Dimension D10 will be 150 mm or 230 mm as specified by the user. Figure 11 Detailed Views of Center Exclusion Volume (where D6 > minimum to allow for tr ansfer from both sides)
SEMI E85-0705 © SEMI 1999, 2005 18
Dim Definition Option A Option B Option C Option D Option E Option F
D6 distance of the inner cavity or cut-out
of the interbay transport system as
measured from the facial datum plane
of the interbay transport system to
allow for stocker pick up using the
secondary kinematic pins
N/A SEMI E15.1 90 mm
TBD TBD TBD
H height of the horizontal datum plane
of the interbay load port (stocker) or
interbay transport system (vehicle)
determined by user and supplier
TBD
#1
and must
be
adjustable
by ± 10
mm
TBD
#1
and
must be
adjustable
by ± 10 mm
TBD
#1
and
must be
adjustable
by ± 10 mm
TBD
#1
and
must be
adjustable
by ± 10 mm
TBD
#1
and must
be
adjustable
by ± 10
mm
TBD
#1
and must
be
adjustable
by ± 10
mm
H2 depth of exclusion zone below the
horizontal datum plane (HDP) of the
stocker load port (A,B) OR the
interbay transport system (C,D)
140 mm SEMI E15.1 100 mm 110 mm 50 mm 100 mm
H4 depth of the exclusion zone below the
horizontal datum plane (HDP) of
interbay transport system (C,D)
starting at a distance D10 from the
facial datum plane (FDP)
N/A N/A 170 mm 180 mm 180 mm 170 mm
S distance between the bilateral datum
plane of two adjacent load ports
450 mm SEMI E15.1 N/A N/A N/A N/A
T3 height of the open volume in that it
allows the interbay transport system to
enter the stocker the transport. This
exclusion zone is occupied by the
transport itself, the maximum height
of the carrier, a clearance above
carrier, and a clearance below the
transport.
N/A N/A 800 mm or
1150 mm
#1
N/A N/A N/A
#1
User to specify which dimension (see §6).
SEMI E85-0705 © SEMI 1999, 2005 19
NOTE: Dimension D10 will be 150 mm or 230 mm as specified by the user.
Figure 11
Detailed Views of Center Exclusion Volume
(where D6 > minimum to allow for transfer from both sides)
SEMI E85-0705 © SEMI 1999, 2005 20
NOTE: Dimension D10 will be 150 mm or 230 mm as specified by the user.
Figure 12
Detailed Views of Center Exclusion Volume
(where D6 = minimum to allow for the carrier to seat on all 3 kinematic pins)