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SEMI P10-0705 © SEMI 1990, 2005 187 RELATED INFORMATION 9 SEMI PHOTOMASK MASK ORDER STRUCTURE TREE DIAGRAM NOTICE : The information contained in this rel ated information is not an offici al part of SEMI P10, and it is n…

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SEMI P10-0705 © SEMI 1990, 2005 186
RELATED INFORMATION 8
EXAMPLE OF A DATA FUNCTION
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
The following is an excerpt of a P10 file which demonstrates how the
<data_function> capability might be applied.
START_DATA_FUNCTION CPL
DATA_FUNCTION_PURPOSE CPL Mask Synthesis for Poly-Gate Layer
SOFTWARE_NAME MaskWeaver
SOFTWARE_REVISION 1.2
RUNSET_NAME cpl090.mw
RUNSET_REVISION 1.4
DATA_LOCATION /n/raidhost/r5/mwlib/
PARAMETER_FILE_NAME cpl090.par
PARAMETER_FILE_REVISION 2.2
INPUT_FILE_NAME qtiac90_1.5.gds
INPUT_FILE_FORMAT gds
TOP_CELL MASTER
DATA_LOCATION /n/raidhost/r8/tapeouts/qtiac90_1.5/
RESULT_FILE_NAME qtiac90_1.5_cpl.o32
SUMMARY_FILE_NAME qtiac90_1.5_cpl.sum
LOG_FILE_NAME qtiac_90_1.5_cpl.log
END_DATA_FUNCTION CPL
SEMI P10-0705 © SEMI 1990, 2005 187
RELATED INFORMATION 9
SEMI PHOTOMASK MASK ORDER STRUCTURE TREE DIAGRAM
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the <mask_order> portion of the standard in XML format.
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complexType AerialImageDataType
diagram
complexType BarcodeDataType
diagram
SEMI P10-0705 © SEMI 1990, 2005 188
complexType CdDefinitionType
diagram