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SEMI E109-0305 © SEMI 2001, 2005 6 7.3 Services 7.3.1 Services are functio ns or methods that may be p rovided by either the equipment o r the host. A service message may be either a request message, which always re quir…
SEMI E109-0305 © SEMI 2001, 2005 5
Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting
with “UD” (User Defined). Care should be taken to ensure the name of the attribute is unique.
7.1.5 Object Attribute Table
7.1.5.1 The object attribute table is used to list all the attributes related to the defined object as shown below the
access is defined as Read only (RO) or Read/Write (RW). The REQD column is used to specify whether the
attribute is required for implementation. Finally, the Form column is used to specify the format of that particular
attribute.
Table 1 Object Attribute Table
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text = “Carrier”
7.2 State Model Methodology
7.2.1 A state model has three elements: definitions of each state and sub-state, a diagram of the states and the
transitions between states, and a state transition table. The diagram of the state model uses the Harel State Chart
notation. An overview of this notation is presented in an Appendix of SEMI E30. The definition of this notation is
presented in Science of Computer Programming 8, “Statecharts: A Visual Formalism for Complex Systems”, by D.
Harel, 1987.
1
7.2.2 State Model Requirements
7.2.2.1 The state models included in this standard are a requirement for RPMS compliance. A state model consists
of a state model diagram, state definitions, and a state transition table. All state transitions in this standard, unless
otherwise specified, shall correspond to collection events.
7.2.2.2 A state model represents the host’s view of the equipment, and does not necessarily describe the internal
equipment operation. All Reticle and Pod Management state model transitions shall be mapped sequentially into the
appropriate internal equipment collection events that satisfy the requirements of those transitions. In certain
implementations, the equipment may enter a state and have already satisfied all of the conditions required by the
RPMS state model for transition to another state. In this case, the equipment makes the required transition without
any additional actions in this situation.
7.2.2.3 Some equipment may need to include additional sub-states other than those in this standard. Additional sub-
states may be added, but shall not change the Reticle and Pod Management defined state transitions. All expected
transitions between Reticle and Pod Management states shall occur.
7.2.2.4 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,
Actions, and Comments. The “trigger” (column 3) for the transition occurs while in the “previous” state. The
“actions” (column 5) includes a combination of:
Actions taken upon exit of the previous state,
Actions taken upon entry of the new state, and
Actions taken which are most closely associated with the transition.
Table 2 State Transition Table
Num Previous State Trigger New State Actions Comments
1 Elsevier Science, P. O. Box 945, New York, NY 10159-0945, http://www.elsevier.nl/homepage/browse.html
SEMI E109-0305 © SEMI 2001, 2005 6
7.3 Services
7.3.1 Services are functions or methods that may be provided by either the equipment or the host. A service
message may be either a request message, which always requires a response, or a notification message that does not
require a response.
7.3.2 Service Message Description
7.3.2.1 A service message description table defines the parameters used in a service, as shown in the following
table:
Table 3 Service Message Description Table
Service Name Type Description
#1
Type can be either “N” = Notification or “R” = Request & Response.
7.3.2.2 Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does
not expect to get a response from the service user. Request messages are initiated by a service user (e.g., the host).
Request messages ask for data or an activity from the provider. Request messages expect a specific response
message (no presumption on the message content).
7.3.3 Service Message Parameter Definition
7.3.3.1 A service parameter dictionary table defines the description, range, and type for parameters used by
services, as shown in the following table:
Table 4 Service Message Parameter Definition Table
Parameter Name Form Description
#1
A row is provided in the table for each parameter used on a service.
7.3.4 Service Message Definition
7.3.4.1 A service message description table defines the parameters used in a service message. It also describes each
message and its cause/effect to the equipment. The columns labeled Req/Ind and Resp/Conf link the parameters to
the direction of the message.
Service Parameter Req/Ind Resp/Conf Description
7.3.4.2 The columns labeled Req/Ind and Rsp/Conf link the parameters to the direction of the message. The
message sent by the initiator is called the “Request”. The receiver terms this message the “Indication”. The receiver
may then send a “Response”, which the original sender terms the “Confirmation”.
7.3.4.3 The following codes appear in the Req/Ind and Rsp/Conf columns and are used in the definition of the
parameters (e.g., how each parameter is used in each direction):
“M” Mandatory Parameter – must be given a valid value.
“C” Conditional Parameter – may be defined in some circumstances and undefined in others. Whether a value is given may
be completely optional or may depend on the values of other parameters.
“U” User-Defined Parameter.
“-” The parameter is not used.
“=” (for response only) Indicates that the value of this parameter in the response must match that in the primary (if
defined).
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7.4 Alarm Requirements Definition
7.4.1 An alarm requirements definition table defines the specific set of alarms required by RPMS. The table is
divided up by equipment configuration, and then by alarm. The danger and affected columns are marked with “X”
characters to show each alarm and its possible impact to operators, equipment, and material. The table format is
shown in the following example:
Equipment Danger Affected
Configuration Alarm Text Potential Imminent Operator Equipment Material
Configuration 1 Alarm 1 X X X X
Alarm 2 X X
Configuration 2 Alarm 3 X X X
Alarm 4 X X X
8 Overview
8.1 The Reticle and Pod Management standard defines the behavior, data, and services required for equipment
supporting automated reticle pod transfer, reticle pod management, and reticle management. This document
provides a standard interface for host/equipment communications regarding the transfer of reticle pods, reticle pod
identification and verification, transfer of reticles to and from equipment, reticle identification and verification,
reticle inspection and qualification, and tracking of reticles. The standardized reticle pod transfer host interface
include transfers to and from the external reticle load ports and internal reticle pod locations, the standardized reticle
host interface include transfers to and from the reticle pod, transfers to and from the internal reticle library positions,
and reticle identification, inspection, verification, qualification and tracking of reticles.
8.2 Single Connection Requirement
8.2.1 The expectation of the production and storage equipment supplier is that this standard be implemented in con-
junction with the GEM interface to their production equipment and without the use of a separate communication
connection.
9 Load Port
9.1 A reticle pod load port (port) is used by the factory to load and unload reticle pods to and from Lithography,
reticle inspection, and bare reticle storage equipment. A reticle pod load port may be used as a reticle pod input load
port, a reticle pod output load port, or as a reticle pod input/output load port, depending upon equipment type,
configuration and/or factory practices. This classification may be fixed or it may be programmable by the user. A
reticle pod load port is generally designed to handle one specific carrier type, reticle SMIF pods (RSP).
9.1.1 The equipment supplier is free to implement Load Ports as objects, but this is not a requirement for
compliance to this standard.
9.2 Load Port Numbering
9.2.1 The reticle pod load port number shall be assigned incrementally from the bottom left to bottom right, then
top left to top right when facing the reticle load ports. The numbering system should start with 101 to differentiate
from FOUP load ports. The reticle pod load port-numbering requirement is to provide a common reference base to
external entities, such as humans.
9.3 Reticle Pod Slot Numbering
9.3.1 The slot numbers for a reticle pod shall be assigned incrementally from the bottom, starting with “1.”
9.4 Reticle Pod Load Port Resource Sharing
9.4.1 A model of a reticle pod load port must account for any mechanical assemblies that are either active during
reticle pod transfer or are capable of interacting with the transfer. The reticle pod load port is responsible for such
mechanisms when the reticle pod load port is in the TRANSFER READY state. If these mechanisms are shared
with other reticle pod load ports, then the sharing must be coordinated.