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SEMI D6-0305 © SEMI 1992, 2005 1 SEMI D6-0305 SPECIFICATION FOR LIQUID CR YSTAL DISPLAY (LCD) MASK SUBSTRATES This specification was technicall y approved by the Global Flat Panel Displa y Mask Committee and is the direc…

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SEMI D5-94 © SEMI 1992, 2003 1
SEMI D5-94 (Reapproved 0703)
STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
This standard was technically reapproved by the Global Flat Panel Display Committee and is the direct
responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the
Japanese Regional Standards Committee on April 28, 2003. Initially available at www.semi.org June 2003;
to be published July 2003. Originally published in 1993; previously published in 1994.
1 Purpose
1.1 This standard covers the specification of nominal
edge length and thickness and related tolerances of a
flat panel display substrate.
2 Scope
2.1 These dimensions apply to substrates that are
principally used in fabricating AMLCD displays. These
dimensions may also be applicable to substrates for
other display types. The edge lengths specified range
from 300 × 300 mm to 500 × 500 mm. A single
thickness, 1.1 mm, applied to all substrates.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel
Display Substrates
SEMI D4 — Method for Referencing Flat Panel
Display Substrates
SEMI D12 — Specification for Edge Condition of Flat
Panel Display (FPD) Substrates
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Dimensions
4.1 Edge Length
Table 1 Standard (Arithmetical Progression) Edge
Length (mm)
300 × 300 300 × 350 300 × 400 300 × 450 300 × 500
350 × 350 350 × 400 350 × 450 350 × 500
400 × 400 400 × 450 400 × 500
450 × 450 450 × 500
500 × 500
NOTE 1: For substrates larger than 500 mm × 500 mm, it is
recommended that the edge lengths be increased in increments of 50
mm.
Table 2 Standard Edge Length (mm)
320 mm × 300 mm
320 mm × 400 mm
360 mm × 465 mm
Table 3 Edge Length Tolerance
Nominal Tolerance
< 400 mm ± 0.2 mm
≥ 400 mm ± 0.3 mm
4.2 Thickness — 1.1 ± 0.1 mm
NOTE 1: Nominal values and tolerances for thickness < 1.1
mm, and > 1.1 mm are under discussion.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI D6-0305 © SEMI 1992, 2005 1
SEMI D6-0305
SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK
SUBSTRATES
This specification was technically approved by the Global Flat Panel Display Mask Committee and is the
direct responsibility of the Japanese Flat Panel Display Materials and Mask. Current edition approved by the
Japanese Regional Standards Committee on January 11, 2005. Initially available at www.semi.org January
2005; to be published March 2005. Originally published in 1992; previously published November 2001.
1 Purpose
1.1 This specification defines standard for substrates used to fabricate liquid crystal display masks.
2 Scope
2.1 This specification applies to photomasks that are principally used in fabricating liquid crystal displays. The edge
lengths specified range from 202.8 × 202.8 mm to 700 × 800 mm.
2.2 Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (see
SEMI P1).
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards
3.1 SEMI Standard
SEMI P1 — Specification for Hard Surface Photomask Substrates
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 None.
5 Ordering Information
5.1 Ordering information shall be discussed between suppliers and users.
6 Edge Length and Thickness Specification
6.1 Edge Length — Units are in mm. See Tables 1 and 2, 3 and 4, 5 and 6, and 7 and 8 for a combination of
materials, edge length, and thickness.
6.2 Edge Length Tolerance — 0.4 mm. Applies to all groups.
6.3 Thickness, Tolerance
6.3.1 Thickness of substrates shall be specified by the edge length group and materials as shown in Tables 2, 4, and
6.
6.3.2 Tolerance — For Groups A and B: –0.4 ~ + 0.2 mm. For Group C: See Table 6. For Group D: See Table 8.
6.4 Material — See §7.
SEMI D6-0305 © SEMI 1992, 2005 2
Table 1 Edge Length (Group A) in mm
202.8 × 202.8
200 × 250 250 × 250
250 × 300 300 × 300
300 × 350 350 × 350
350 × 400 400 × 400
Table 2 Plate Thickness and Materials (Group A) in mm
Material
HTE MTE/LTE ULTE Thickness(mm)
+ + + 3.0
+ 4.8
+ + 5.0
Table 3 Edge Length (Group B) in mm
330 × 450
400 × 500
450 × 550
500 × 600
Table 4 Plate Thickness and Materials (Group B) in mm
Material
HTE MTE/LTE ULTE Thickness(mm)
+ 4.8
+ + 5.0
Table 5 Edge Length (Group C) in mm
620 × 720
650 × 750
650 × 800
700 × 800
Table 6 Plate Thickness and Materials (Group C) in mm
Material
ULTE Thickness (mm) Tolerance (mm)
+ 5.0 ± 0.2