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SEMI 30.1-0200 © SEMI 1998, 2000 24 11.4 TABL E-DE F Column Header D es criptions and Formats Table 6 Description and Formats for ISEM Tabl e Data Column Head er Description Fo rmat Co mments “ALIGNNAME” The ide ntifier …

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SEMI 30.1-0200 © SEMI 1998, 200023
NOTE 4: Die origin is located at lower left-hand corner (LLHC).
NOTE 5: Data format must comply with the ISEM standard.
NOTE 6: In order to signify tool context, anomaly attributes are labeled as follows:
Column name starts with “insp*_” for inspection data, “rev*_” for defect review data, “and “anal*_” for analysis data, where “*”
is a numeric string that ensures each set of columns added is uniquely named (e.g., “rev1_” and “rev2_”).
NOTE 7: Inspection, review and analysis tools must add a table attribute called “insp*_ Header,” “rev*_Header” and
“anal*_Header” respectively (ATTRID) each time they add data to the table.
3
It must be a list that includes the following items in
the given order: EquipmentID (A[1..16]), EquipmentType (A[1..16]), OperatorID (A[1..16]), and CLOCK
4
(A[16]).
Column # Column Name Description
1 Insp_Anomaly ID ID # for the defect
2 Insp_Table specifier Specifies table with other relevant information
3 Insp_Coordinate X Intra die X Coordinate wrt LLHC of die in um
4 Insp_Coordinate Y Intra die Y Coordinate wrt LLHC of die in um
5 Insp_X index X axis die index wrt center of wafer (COW)
6 Insp_Y index Y axis die index wrt center of wafer (COW)
7 Insp_X size Defect size along X axis in microns
8 Insp_Y size Defect size along Y axis in microns
9 Insp_Defect area Defect area in square microns
10 Insp_Defect size Linear measure of defect size in microns
11 Insp_Scatter intensity Anomaly scattering intensity
12 Insp_Defect class number Previously defined class number assigned to the defect
13 Insp_Test number Inspection test in which defect was found
14 Insp_# Optical image count Number of optical images stored for a given defect
15 Insp_Optical image data Optical image data specifier
16 Insp_Cluster = 1 if defect is part of a systematic defect cluster
17 Insp_Cluster class Systematic defect class name
18 Sampled for SEM = 1 if defect chosen for SEM review
19 Rev_SEM image data SEM image data specifier
20 Rev_SEM class SEM defect class name
21 Rev_Defect height Defect height in microns
22 Sampled for analysis = 1 if defect chosen for EDX,
= 2 if defect chosen for FIB or other analysis
23 Anal_EDX data EDX data specifier
24 Anal_FIB data FIB data specifier
3 Where “*” is a numeric string that corresponds to the one in the column names the header refers to.
4 Date and time of the start of inspection, review, or analysis per SEMI E5 CLOCK data item variable.
SEMI 30.1-0200 © SEMI 1998, 2000 24
11.4 TABLE-DEF Column Header Descriptions and Formats
Table 6 Description and Formats for ISEM Table Data
Column Header Description Format Comments
“ALIGNNAME” The identifier given to an alignment site. A[1..16]
ANOMALYATTRIBUTE
(n) NOTE: String defined
by equipment supplier.
Tool-specific information associated
with an ANOMALY for which no
specific ISEM data item has been
defined.
U2, F4, F8,
A[1..16]
Examples: Include information such as
magnification, voltage, current,
wavelength, brightness, color, height,
or chemical spectra. The equipment
supplier shall document all attributes
that are supported.
“ANOMALYID” A unique identifier for an anomaly. A[1..16]
“AREANAME” A unique identifier given to an
inspection area.
A[1..16]
ATTRIBUTE(n)
NOTE: String defined by
equipment supplier.
Tool-specific information associated
with an alignment or measurement site
for which no specific ISEM data item
has been defined.
U2, F4, F8,
A[1..16]
Examples: Include information such as
magnification, voltage, current,
wavelength, number of scans,
integration time, or film stack. The
equipment supplier shall document all
attributes that are supported.
“COORDSYS” The identification for applicable
coordinate system.
A[1..16] Options are “M20”, “M20P”, and
“M21”.
“COORDX” The x-coordinate for a site. F4 Units are in microns.
“COORDY” The y-coordinate for a site. F4 Units are in microns.
“ELEMENTID” The SEMI M21 address for a specific
rectangular element on a substrate.
I4[2]
“XTENTX” The extent in the X-direction of an area
to inspect as measured from the lower
left-hand corner of the area given by
CoordX.
F4 Units in microns.
“XTENTY” The extent in the Y-direction of an area
to inspect measured from the lower left-
hand corner of the area given by
CoordY.
F4 Units in microns.
12 Process Program Management
12.1 Definition and Rules for ISEM Process Programs
12.1.1 A process program contains information and/or
instructions required for the Inspection/Review
equipment to process a given run of material. The
process program shall supply all of the information
required for a remotely executed run to be processed
without operator intervention.
12.2 Requirements
12.2.1 The ISEM requires that the SEMI E30
capability of Process Program Management be fully
supported for this class of equipment. ISEM requires
that the process program have a structure that enables
the user to build process programs with default
conditions that can be overridden for a run. ISEM
requires the ability to vary the quantity of substrates
processed, the alignment information used, and the
number and/or location of the areas/anomalies to be
inspected/reviewed through the uses of process program
variable parameters. The concepts of process program
structure and process program variable parameters are
discussed in the following sections.
12.3 Process Program Structure
12.3.1 The purpose of this process program structure
and the related concepts is to provide flexibility in
using process programs to reduce the number of process
programs needed. This structure enables the user or
host to vary certain parameters of a given process
program as needed for any particular run.
12.3.2 Often a process program may be very similar
from one run to another and may differ only in a few
parameters such as: which substrate slots to run, which
areas to inspect, which parameters to run on each
substrate, etc. Previously this small variation from run
to run would require a large number of process
programs to be created and maintained. The flexibility
SEMI 30.1-0200 © SEMI 1998, 200025
of the method described in this section will reduce the
number of process programs.
12.4 Process Program Variable Parameters — A
process program parameter specifies a value that
temporarily modifies the value of a process program
variable parameter. A process program variable
parameter is formally defined within a process program
body and contains (1) a variable parameter name that is
unique in the body (CPNAME), and (2) a parameter
default value for use when the process program is
selected for execution without specification of an
override value for this variable parameter
(CPVAL/CPEVAL).
12.4.1 Overriding Process Program Variable
Parameters Default Values
12.4.1.1 Any process-related information that is
normally requested from the operator console in manual
operation shall have a process program variable
parameter identified in the process program and default
values assigned in the body of the process program. An
equipment would run the process program using the
default values unless those values were overridden.
12.4.1.2 These process program variable parameters
allow a host to tailor a process program for a specific
run of material by temporarily modifying (replacing)
the process program default values using a remote
command of PP-UPDATE. The modification does not
permanently change the process program; the
modifications remain in effect only until the next run or
until the next PP-UPDATE remote command is
received.
12.4.2 Requirements and Rules
12.4.2.1 ISEM equipment is required to support
variable process program parameters. Additionally,
ISEM process programs are required to contain variable
process program parameters that specify a name for
each of the four previously defined ISEM table types.
Specifically, parameters for “TABLE-AREA-DEF”,
“TABLE-ALIGN-DEF”, “TABLE-ANOMALY-DEF”,
and “TABLE-M21-ANOMALY-DEF” table names are
required. Only the names that refer to these TABLE-
DEFs are required to be included in the process
program body. The actual TABLE-DEF data is external
to the process program body. The host may always
assume that there are variable process program
parameters for these four ISEM tables.
12.4.2.2 Before execution of a CARRIERBLD can
begin, the presence of all the ISEM Tables that it
references shall be verified by the equipment. If they
are not all present, an error shall be reported. The
equipment shall support data items that may be linked
to the event report that specifies the name of missing
ISEM Tables. S7,F27 is used for reporting this error
condition.
12.4.2.3 The following table summarizes the variable
process program parameters that ISEM equipment shall
support and the remote command parameters that the
host may use to override their values (as defined in
Section 13 and Table 9).
Table 7 Required Variable Process Program Parameters
Variable Process Program Parameter and Host
Command Parameter Name (CPNAME)
Description
“ALIGNLIST” A list of location identifiers to be reviewed.
“ANOMALYLIST” A list of location identifiers to be reviewed.
“AREALIST” A list of area identifiers to be inspected or reviewed.
“ELEMENTLIST” A list of array element identifiers to be inspected.
“SLOTLIST” A list of carrier slot numbers with material to be inspected or to be reviewed.
“SUBSTRATELIST” A list of substrate IDs with material to be inspected or to be reviewed.
“TABLE-ALIGN-DEF” A set of alignment site definitions.
“TABLE-ANOMALY-DEF” A set of (SEMI M20) anomaly location and attribute definitions.
“TABLE-AREA-DEF” A set of area definitions.
“TABLE-M21-ANOMALY-DEF” A set of SEMI M21 anomaly location and attribute definitions.