semi合集-English.pdf - 第660页
SEMI E85-0705 © SEMI 1999, 2005 14 Figure 8 AMHS Interb ay Load Por t Option F’ (Ca rrier Oriented perpendicular to face plane) (Top Access Only)
SEMI E85-0705 © SEMI 1999, 2005 13
Figure 7
AMHS Interbay Load Port Option F (Carrier Oriented perpendicular to face plane)
(Top and Bottom Access)
SEMI E85-0705 © SEMI 1999, 2005 14
Figure 8
AMHS Interbay Load Port Option F’ (Carrier Oriented perpendicular to face plane)
(Top Access Only)
SEMI E85-0705 © SEMI 1999, 2005 15
Option A
E84 plug zones
Top View
Front View
Stocker
HDP
Side View
225 mm (2)
200 mm
225 mm (2)
300 mm
HDP
BDP
300 mm
200 mm
Stocker facial
plane
Figure 9
Drawing of Example Available Area for Connector on Stocker for Option A