semi合集-English.pdf - 第4490页
SEMI D18-0299 E © SEMI 19 99, 2001 11 Figure 4 Cassette Vertical Dimensions
SEMI D18-0299
E
© SEMI 1999, 2001 10
Figure 3
Cassette Bottom Domain
SEMI D18-0299
E
© SEMI 1999, 200111
Figure 4
Cassette Vertical Dimensions
SEMI D18-0299
E
© SEMI 1999, 2001 12
Figure 5
Cassette Physical Alignment Interface-Type A
Coupling Pin Shape