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SEMI 30.1-0200 © SEMI 1998, 2000 25 of the method describ ed in this section will reduce the number of process programs . 12.4 Pr ocess Program Var iable Pa r a m eters — A process program parameter specifies a value th …

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SEMI 30.1-0200 © SEMI 1998, 2000 24
11.4 TABLE-DEF Column Header Descriptions and Formats
Table 6 Description and Formats for ISEM Table Data
Column Header Description Format Comments
“ALIGNNAME” The identifier given to an alignment site. A[1..16]
ANOMALYATTRIBUTE
(n) NOTE: String defined
by equipment supplier.
Tool-specific information associated
with an ANOMALY for which no
specific ISEM data item has been
defined.
U2, F4, F8,
A[1..16]
Examples: Include information such as
magnification, voltage, current,
wavelength, brightness, color, height,
or chemical spectra. The equipment
supplier shall document all attributes
that are supported.
“ANOMALYID” A unique identifier for an anomaly. A[1..16]
“AREANAME” A unique identifier given to an
inspection area.
A[1..16]
ATTRIBUTE(n)
NOTE: String defined by
equipment supplier.
Tool-specific information associated
with an alignment or measurement site
for which no specific ISEM data item
has been defined.
U2, F4, F8,
A[1..16]
Examples: Include information such as
magnification, voltage, current,
wavelength, number of scans,
integration time, or film stack. The
equipment supplier shall document all
attributes that are supported.
“COORDSYS” The identification for applicable
coordinate system.
A[1..16] Options are “M20”, “M20P”, and
“M21”.
“COORDX” The x-coordinate for a site. F4 Units are in microns.
“COORDY” The y-coordinate for a site. F4 Units are in microns.
“ELEMENTID” The SEMI M21 address for a specific
rectangular element on a substrate.
I4[2]
“XTENTX” The extent in the X-direction of an area
to inspect as measured from the lower
left-hand corner of the area given by
CoordX.
F4 Units in microns.
“XTENTY” The extent in the Y-direction of an area
to inspect measured from the lower left-
hand corner of the area given by
CoordY.
F4 Units in microns.
12 Process Program Management
12.1 Definition and Rules for ISEM Process Programs
12.1.1 A process program contains information and/or
instructions required for the Inspection/Review
equipment to process a given run of material. The
process program shall supply all of the information
required for a remotely executed run to be processed
without operator intervention.
12.2 Requirements
12.2.1 The ISEM requires that the SEMI E30
capability of Process Program Management be fully
supported for this class of equipment. ISEM requires
that the process program have a structure that enables
the user to build process programs with default
conditions that can be overridden for a run. ISEM
requires the ability to vary the quantity of substrates
processed, the alignment information used, and the
number and/or location of the areas/anomalies to be
inspected/reviewed through the uses of process program
variable parameters. The concepts of process program
structure and process program variable parameters are
discussed in the following sections.
12.3 Process Program Structure
12.3.1 The purpose of this process program structure
and the related concepts is to provide flexibility in
using process programs to reduce the number of process
programs needed. This structure enables the user or
host to vary certain parameters of a given process
program as needed for any particular run.
12.3.2 Often a process program may be very similar
from one run to another and may differ only in a few
parameters such as: which substrate slots to run, which
areas to inspect, which parameters to run on each
substrate, etc. Previously this small variation from run
to run would require a large number of process
programs to be created and maintained. The flexibility
SEMI 30.1-0200 © SEMI 1998, 200025
of the method described in this section will reduce the
number of process programs.
12.4 Process Program Variable Parameters — A
process program parameter specifies a value that
temporarily modifies the value of a process program
variable parameter. A process program variable
parameter is formally defined within a process program
body and contains (1) a variable parameter name that is
unique in the body (CPNAME), and (2) a parameter
default value for use when the process program is
selected for execution without specification of an
override value for this variable parameter
(CPVAL/CPEVAL).
12.4.1 Overriding Process Program Variable
Parameters Default Values
12.4.1.1 Any process-related information that is
normally requested from the operator console in manual
operation shall have a process program variable
parameter identified in the process program and default
values assigned in the body of the process program. An
equipment would run the process program using the
default values unless those values were overridden.
12.4.1.2 These process program variable parameters
allow a host to tailor a process program for a specific
run of material by temporarily modifying (replacing)
the process program default values using a remote
command of PP-UPDATE. The modification does not
permanently change the process program; the
modifications remain in effect only until the next run or
until the next PP-UPDATE remote command is
received.
12.4.2 Requirements and Rules
12.4.2.1 ISEM equipment is required to support
variable process program parameters. Additionally,
ISEM process programs are required to contain variable
process program parameters that specify a name for
each of the four previously defined ISEM table types.
Specifically, parameters for “TABLE-AREA-DEF”,
“TABLE-ALIGN-DEF”, “TABLE-ANOMALY-DEF”,
and “TABLE-M21-ANOMALY-DEF” table names are
required. Only the names that refer to these TABLE-
DEFs are required to be included in the process
program body. The actual TABLE-DEF data is external
to the process program body. The host may always
assume that there are variable process program
parameters for these four ISEM tables.
12.4.2.2 Before execution of a CARRIERBLD can
begin, the presence of all the ISEM Tables that it
references shall be verified by the equipment. If they
are not all present, an error shall be reported. The
equipment shall support data items that may be linked
to the event report that specifies the name of missing
ISEM Tables. S7,F27 is used for reporting this error
condition.
12.4.2.3 The following table summarizes the variable
process program parameters that ISEM equipment shall
support and the remote command parameters that the
host may use to override their values (as defined in
Section 13 and Table 9).
Table 7 Required Variable Process Program Parameters
Variable Process Program Parameter and Host
Command Parameter Name (CPNAME)
Description
“ALIGNLIST” A list of location identifiers to be reviewed.
“ANOMALYLIST” A list of location identifiers to be reviewed.
“AREALIST” A list of area identifiers to be inspected or reviewed.
“ELEMENTLIST” A list of array element identifiers to be inspected.
“SLOTLIST” A list of carrier slot numbers with material to be inspected or to be reviewed.
“SUBSTRATELIST” A list of substrate IDs with material to be inspected or to be reviewed.
“TABLE-ALIGN-DEF” A set of alignment site definitions.
“TABLE-ANOMALY-DEF” A set of (SEMI M20) anomaly location and attribute definitions.
“TABLE-AREA-DEF” A set of area definitions.
“TABLE-M21-ANOMALY-DEF” A set of SEMI M21 anomaly location and attribute definitions.
SEMI 30.1-0200 © SEMI 1998, 2000 26
12.4.3 Modifying Process Program Variable
Parameters — The remote commands of PP-SELECT,
PP-ASSIGN, or PP-UPDATE are used to modify any
of the identified process program variable parameters
within the process program. The modification is done
by including CPNAME/CPVAL pairs within the
“PROCESS-BLD-GROUP”, which is part of the
remote commands of PP-SELECT or PP-ASSIGN, or
by including a different list name in the PP-UPDATE
remote command. A CPNAME in a process program
shall be identical to the process program variable
parameter name as specified in the “PROCESS-BLD-
GROUP”. See next section for details of these
parameters.
12.5 Use of Process Programs, Remote Commands,
and “PROCESS-BLD-GROUP” — This is a brief
description of the steps involved in using the process
program structure, the process program variable
parameters, the TABLE-DEFs, and the modification of
process program variable parameters through the use of
“PROCESS-BLD-GROUP” and CPNAME/CEPVAL
pairs in the enhanced remote command (S2,F49).
• A process program is created with certain items in
the body identified as process program variable
parameters, along with their default values.
• The host sends to equipment one or more TABLE-
DEFs: such as “TABLE-AREA-DEF” and
“TABLE-ALIGN-DEF”, along with the names of
those tables using Stream 13 commands (See SEMI
E5). These tables are now resident on the
equipment.
• The host sends an enhanced remote command
(S2,F49) to the equipment (either PP-SELECT or
PP-ASSIGN) that contains the information needed
for processing (“CARRIERBLD”). The
“CARRIERBLD” contains a “PROCESS-BLD-
GROUP” for each different set of run parameters
that are needed during the inspection or review
process.
• “PROCESS-BLD-GROUP” shall contain the
ProcessBuildGroupID to identify which program is
selected.
• If the default list of slots in the process program
needs to be changed for this run, then “PROCESS-
BLD-GROUP” contains a “MATERIALLIST” and
the list of selected slots or substrates, designated by
SlotIDs or SubstrateIDs.
• If the default set of inspection areas in the process
program needs to be changed for this run, then
“PROCESS-BLD-GROUP” contains the name of a
specific “TABLE-AREA-DEF” (in AreaTable
Name). If not all of the inspection areas given in
that “TABLE-AREA-DEF” are needed for this run,
then “AREALIST” is used and includes a list of the
names of the specific inspection areas which are
needed. Those names refer to inspection areas
defined in the “TABLE-AREA-DEF”.
• If the default set of alignment sites in the process
program needs to be changed for this run, then
“PROCESS-BLD-GROUP” contains the name of a
specific “TABLE-ALIGN-DEF” (in AlignTable
Name). If not all of the alignment sites given in
that “TABLE-ALIGN-DEF” are needed for this
run, then “ALIGNLIST” is used and includes a list
of the names of the specific alignment sites which
are needed. Those names refer to alignment sites
defined in the “TABLE-ALIGN-DEF”.
• If the SEMI M21 coordinate system is being used
and a pattern has been defined with pattern element
names and if only certain of those elements need to
be inspected for this run, then “PROCESS-BLD-
GROUP” contains an “ELEMENTLIST” and the
list of selected elements, designated by
ElementIDs.
• If certain equipment-specific process program
variable parameters need to have different values
for this run, then for each needed parameter,
“PROCESS-BLD-GROUP” contains a CPNAME
(unique name of a specific process program
variable parameter) and the new CEPVAL (new
value for that parameter).
• The equipment executes the process program with
the new values.
• If indicated in the process program, the equipment
generates the list of anomalies found and sends it to
the host in the format of a “TABLE-ANOMALY-
DEF” using the ISEM table definition and Stream
13 transfer messages (see SEMI E5 for format
specification).
• The host would send the “TABLE-ANOMALY-
DEF” to a review equipment. The host might need
to modify part of the table if required by the review
equipment. This anomaly table is now resident on
the review equipment. (NOTE: The host might
choose to not send all of the table of anomalies, but
rather a desired selection of them.)
• The host sends the equipment the enhanced remote
command (PP-SELECT or PP-ASSIGN) that
contains a “CARRIERBLD”. The
“CARRIERBLD” has a “PROCESS-BLD-
GROUP” for each different set of run parameters
that is needed by the review equipment. It is
required for the host to use the Enhanced Remote
Command S2,F49 for transferring the information