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SEMI E98-1102 © SEMI 2000, 2002 18 10.2.5 AbstractEquipmen tElement Attributes — Table 4 defines the at tributes of the Abstract Equipment Element. Table 4 A bstractEquipmentElement A ttribute Definitions Attribute Name …

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10.2.3.8 State Transition Table — Table 3 defines the state transitions of the AbstractEquipmentElement object.
Table 3 AbstractEquipmentElement State Transitions
# Previous State Trigger New State Action(s) Comment
1 INITIALIZATION Initialization is complete. Depends upon previous
state and current condition
None If the user made the element
unavailable, it shall remain
unavailable. If the element has a
fault, it shall be made unavailable
by the equipment.
2 IN SERVICE The user has placed the
element OUT OF
SERVICE by the user or
the equipment.
OUT OF SERVICE None The equipment should put the
element out of service whenever
a fault condition exists at the
element.
3 OUT OF SERVICE The element has been
returned to service by the
entity that placed it out of
service. All exceptions
and any user restriction
have cleared.
IN SERVICE None The original out of service
condition has cleared. The
element may be used for work.
4 IN SERVICE or
INITIALIZING
Default entry into
OUT OF SERVICE
USER SELECT or
EQUIPMENT SELECT
None
10.2.4 AbstractEquipmentElement Object — Figure 8 represents the AbstractEquipmentElement object.
Abstract Equipment
Element
ChangeService
Cycles
ResetDate
Description
Function
InService
ImmutableID
Supplier
Figure 8
AbstractEquipmentElement Object Type
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10.2.5 AbstractEquipmentElement Attributes — Table 4 defines the attributes of the AbstractEquipmentElement.
Table 4 AbstractEquipmentElement Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text=“EqpElement”
ObjID Object identifier RO Y Text
Cycles Number of cycles (or hours) since installation or last reset. RO Y Unsigned long integer
ResetDate Date cycles set to zero. RO Y Text
Description User-definable text RW Y Text
Function Describes function of object (e.g., substrate-chuck, apply/develop track). RO Y Text
Supplier Name of manufacturer or provider RO Y Text
ImmutableID An unchangeable identifier such as serial number. RO Y Text
InService Available for work. RO Y Boolean
10.2.6 AbstractEquipmentElement Services — The user may be allowed to change the operational state of specific
AbstractEquipmentElement objects that are of significance for preventive maintenance. This is particularly
desirable for those subsystems for which preventive maintenance may be performed while the equipment is still
assigned to manufacturing operations.
10.2.6.1 ChangeService
10.2.6.1.1 The user may request that an element currently in the IN SERVICE state be placed in the OUT OF
SERVICE\ USER SELECT state. This request shall not affect any current activity for which the element is being
used. However, an element in the OUT OF SERVICE state shall not be used for any new activities.
10.2.6.1.2 The user may request that an element currently in the OUT OF SERVICE/USER SELECT state be
placed back into the IN SERVICE state.
10.3 EquipmentIODevice Object
10.3.1 An EquipmentIODevice object is a specialization of AbstractEquipmentElement used to represent the
sensors, actuators, and intelligent sensor/actuator devices that provide most of the process data sought by
manufacturing engineering. Individual I/O points are represented by individual Observables contained within the
EquipmentIODevice object.
10.3.2 Observables are not formalized as standardized objects, as indicated by the thin line in Figure 9. The
EquipmentIODevice may represent a single I/O point, an aggregation of I/O points, or a virtual sensor providing
composite data.
10.3.3 Table 5 defines the attributes of the EquipmentIODevice. Attributes are in alphabetical order, with the
exception of the Observables
i
attribute, which is placed at the end with its structure members for clarity.
1+
Observable
DataDimensions
DataType
DeltaValue
InterlockStatus
Name
NominalValue
ObservableType
PossibleUnits
Range
ReadRate
ReportRate
ReportChange
Timestamp
Units
Value
AlgorithmID
Description
DeviceType
Function
HardwareRevision
ModelNumber
NumberOfObservables
Observables
SoftwareRevision
Equipment
IODevice
GetProgramDirectory
SelectProgram
Figure 9
EquipmentIODevice and Observable Object Types
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Table 5 EquipmentIODevice Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text = “EqpIODevice”
ObjID Object identifier RO Y Text
AlgorithmID Identifier of any algorithm used
to produce the set of observable
values.
RO or RW Y Text
HardwareRevision Revision level for hardware. RO Y Text. 1–5 characters.
ModelNumber Manufacturer model number. RO Y Text. 1–20 characters.
Numberof-Observables The number of data items
provided
RO Y Integer
SoftwareRevision Revision level for s/w or
firmware
RO Y Text. 1–5 characters.
Observables
I
Information about the ith item of
observable data values.
RO Y Structure comprised of Name, Value,
Units, and Range, and Timestamp as
follows.
Name The name of the data, sensor, or
actuator.
RO Y Text
DataDimension Used for arrays to indicate the
number and length of “rows” of
data.
RO N.
Required
for arrays.
List of unsigned integers.
Datatype The form of the data. RO Y Enumerated.
DeltaValue Amount of change from the target
for reporting. Zero value
indicates it is not used.
RW N As indicated by Datatype.
InterlockStatus Status of current interlock. RO N.
Required
for
Actuator
types.
Enumerated: None, Off, On
NominalValue Target used for reporting change
of DeltaValue.
RW N Numeric text string. If empty, is not used.
ObservableType Type of Observable. RO Y Enumerated
Possible Units List of possible units RO N List of text
Range Valid interval or set of possible
discrete values.
RO Y Text
ReadRate Interval between sequential reads,
in seconds.
RO Y Floating point
ReportChange A user-settable switch to enable
or disable reporting.
RW N Boolean. Set TRUE when enabled.
ReportRate Interval between sequential
reports, in seconds.
RW N Floating point. Zero indicates no time-
based reporting.
Timestamp The date and time when the value
was last read or set.
RO Y Numeric. Specific form to be resolved.
Units Units of measurement RO or RW Y if value
is scalar.
Text. Conforms to units specified in SEMI
E5 (SECS-II) Units of Measurement
Identifiers.
Value Current value. RO Y Single item or array of numeric, or text
DeviceType Defines the type of device (e.g.,
“MFC”, “OES”, FTIR”, “CDG”,
etc.)
RO Y Text 1–8 characters