semi合集-English.pdf - 第3072页

SEMI E123-0703 © SEMI 2003 13 10.3 Remote Comm and Descriptions 10.3.1 ABORT — This command terminates the current proces sing . ABORT makes no guarantee about completion of the curre nt unit. Level s of ABORT may be spe…

100%1 / 7923
SEMI E123-0703 © SEMI 2003 12
types, and format of these parameters. HSEM does
recommend a minimum list of data items for the
common handler process-sites. These include:
9.2.4.1 Thermal Conditioning Site Parameters
• Temperature Set Point
• Upper-Temp Guardband Set Point
• Lower-Temp Guardband Set Point
• Soak Time
• Test-Site Temp
9.2.4.2 Test-Site Parameters
• Device Pick Up/Place
• Speed of Device Pick Up/Place
• Device Insertion/Retraction
• Speed of Device Insertion/Retraction
• Speed of Index Mechanism
• Insertion/Place Force/Stroke
9.2.4.3 Lead Condition Site Parameters
• Device Pick Up/Place
• Speed of Device Pick Up/Place
• Speed of Insertion
• Insertion Force/Stroke
9.2.4.4 Sort Sites Parameters
• Device Pick Up/Place
• Speed of Device Pick Up/Place
• Device Index
• Insertion Force/Stroke
• Sort Category Set
• Sort Category – Full/Empty/Partial
• Sort Media – In place or empty.
9.2.5 Unit/Device-Specific Information — The
unit/device-specific section contains information
necessary for the configuration and execution of the
specific units to be handled by the equipment. HSEM
requires a minimum list of data items be available to
determine package dimensions, terminal dimensions,
package height, and coplanarity.
9.2.6 Media-Type-Specific Information — The media-
type-specific information section contains information
necessary for the configuration and execution of the
specific media type in use on the equipment. HSEM
requires a minimum list of data items be available to
determine row/column count, X/Y distance to a cell,
device height in tray, media height, and X/Y pitch.
9.3 Methods of Process Program Creation — The
method by which an equipment manufacturer creates a
process program may be unique to that manufacturer.
However, it is required that the customer at least be
given both of the following options for the creation of a
process program.
9.3.1 Off-Line Development — Using this method, the
customer is given a set of software tools (process
program compilers, decompilers, and debuggers) that
enables him/her to generate or create a process program
using the above mentioned information (flow,
parameter, functional test, etc.). The newly generated
process program then is downloaded onto a specific
handler, verified, and is now ready to be selected and
executed locally by the operator or remotely by the host
computer. If this process is used, the supplied software
tools should closely mimic or simulate a handler so that
a user can create a complete process program. In many
situations, minor adjustments may be needed to the
process program on the equipment before it is
completely ready for execution.
9.3.2 On-Line Development — The second option is to
enable the user to download the above-mentioned
information (tables or files) onto the equipment and
create the actual process program on the equipment
itself.
10 Remote Commands
10.1 The purpose of this section is to identify remote
commands, command parameters, and valid commands
versus states in the processing state models.
10.2 Requirements
• All the remote commands defined by HSEM are
required.
• The alphanumeric strings defined by HSEM for
remote commands and command parameters are
required.
• If additional remote commands are supported, then
the “Remote Command Versus Valid States”
matrix must be generated for these additional
commands. Place an “X” in the table for each state
in which a given command is valid.
SEMI E123-0703 © SEMI 2003 13
10.3 Remote Command Descriptions
10.3.1 ABORT — This command terminates the current processing. ABORT makes no guarantee about completion
of the current unit. Levels of ABORT may be specified by selecting a particular process site or the equipment itself.
“Cleanup” removes all material that belongs to the lot and then the equipment enters the aborting state.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M “ABORT”
ProcessSiteID C - ID of handler process site.
Cleanup C -
Ack - M Response acknowledge.
Status - C Error code and Error text if any
10.3.2 BIN-UNITS — This command instructs the handler to start unloading the units from process sites and
transfer to output locations. The required bin list parameter combined with the currently loaded mapping of bin
values to output locations will tell handler how to disposition the units.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “BIN-UNITS”
Bins M - Bin results of current processed units, one bin value per test site.
Bin values for disabled or empty sites are ignored.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.3 BREAK-CONTACT — This command instructs the handler to break contact on the unit(s) at the specified
site(s). This allows user to remove parts from socket(s), replace socket(s) if applicable, perform testhead calibration
etc.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “BREAK-CONTACT”
Sites M - List of sites to break contact. Empty list implies all sites.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.4 DISABLE-SITE — This command instructs handler to disable sites from been used for processing.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “DISABLE_SITE”
Sites M - List of sites to disable. Empty list implies all sites.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.5 ENABLE-SITE — This command instructs the handler to enable sites for processing.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “ENABLE-SITE”
Sites M - List of sites to enable. Empty list implies all sites.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
SEMI E123-0703 © SEMI 2003 14
10.3.6 MAKE-CONTACT — This command instructs the handler to recontact the unit(s) at the specified site(s) and
resume processing. This command is only available to the Host after a BREAK-CONTACT command has been
issued or selected sites have units that have broken contact.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “MAKE-CONTACT”
Sites M - List of sites to make contact after a break command is issued.
Empty list implies all sites.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.7 PAUSE — This command transitions the handler to the PAUSING process state when the current unit/media
completes processing.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “PAUSE”
ProcessSiteId C - ID of handler process site.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.8 PP-SELECT — This command instructs the handler to copy the indicated Process Program from non-volatile
storage to the handler' s Process Program execution area. Process Program Variable Parameters can be specified in
this command which modify the default values for these Variable Parameters in the Process Program.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “PP-SELECT”
ProcessSiteID C - ID of handler process site.
LotID C - Lot to be processed.
ProcessProgramID M - Id of the processes program to be used.
MediaList C - One or more media to be processed with this program.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.9 PRELOAD-UNITS — This command instructs the handler to begin preloading unit(s) to temperature soak
chambers or some equivalent process buffers. Handler transitions to PRELOADING state while action is performed
and returns to READY upon completion, reporting PreloadComplete collection event to Host. Command must still
be accepted even if handler does not support process buffers or preloading, in which case, it transitions back to
READY state immediately.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “PRELOAD-UNITS”
Ack - M Response acknowledge.
Status - C Error code and Error text if any.