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SEMI M11-0704 © SEMI 1988, 2004 20 Table 4 Guide for the Specification of 0.35 µm Design Rule, T w in-Tub CMOS, Epitaxial Wafers CUSTOMER: PART NUMBER: REVISION: DATE: TESTING LEVEL WAFER TEST PIECE M18 ITEM # SPECIFICAT…

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SEMI M11-0704 © SEMI 1988, 2004 19
Table 3 Guide for Specification of 1.0 µm Design Rule, Twin-Tub CMOS, Epitaxial Wafers
CUSTOMER: PART NUMBER: REVISION: DATE:
TESTING LEVEL
WAFER TEST PIECE
M18 ITEM # SPECIFICATION
100% SAMPLE 100% SAMPLE
11. GENERAL EPITAXIAL WAFER AND LAYER CHARACTERISTICS
11.1 Conductivity Type/
Structure
p/p+
11.2 Primary Dopant Boron
11.3 Silicon Source Gas Fixed
11.4 Reactor Type Fixed
Carrier Density (Center) 2.00 ± 1.0 × 10
15
Units carriers per cm
3
11.5
Test Method Mercury Probe SEMI MF1392
11.6 Carrier Density Variation 10% max per SEMI M11
11.7 Thickness (Center) Target ± 10%
11.8 Thickness Variation 10% per SEMI M11
11.11 Phantom Layer none
12. MECHANICAL CHARACTERISTICS: POST EPI
12.5 Flatness/Site
95% of the 18 mm × 18 mm sites " 0.5 µm (SFQD)
includes partial sites
13. FRONT SURFACE CHARACTERISTICS
13.1 Stacking Faults 1 per cm
2
maximum
13.2 Slip/Dislocations none per SEMI MF1726
13.14 Localized Light Scatterers
2000 per m
2
max. ! 0.5 µm LSE, based on calibration
of surface scanning inspection systems with latex
spheres, 90% capture rate
13.5 Scratches none per SEMI MF523, Section 12.2
13.6 Dimples none per SEMI MF523, Section 12.3
13.7 Orange Peel none per SEMI MF523, Section 12.3
13.8 Cracks/Fractures none per SEMI MF523, Section 12.3
13.9 Crow’s Feet none per SEMI MF523, Section 12.3
13.10 Edge Chips none per SEMI MF 523, Section 12.3
13.12 Haze none per SEMI MF523, Section 12.2
12.13 Foreign Matter none per SEMI MF523, Section 12.3
13.15 Nominal Edge Exclusion 4 mm
Surface Metals
" 1 × 10
12
per cm
2
for Zn, Al, Ni " 2 × 10
11
per cm
2
for
each element: Na, Cr, K, Fe, Cu
14. BACK SURFACE CHARACTERISTICS
14.1 Contamination none per SEMI MF523, Section 12.4
15. OTHER CHARACTERISTICS - POLISHED WAFER: EPITAXIAL SUBSTRATE — MEETS SEMI M1
15.1 Resistivity 0.005–0.020 #·cm
15.2 Back Seal polysilicon [ ], silicon oxide [ ], silicon nitride [ ],
combination and thickness as required, none [ ]
15.3 Nominal Diameter 125 mm [ ], 150 mm [ ], 200 mm [ ], 300 mm [ ]
SEMI M11-0704 © SEMI 1988, 2004 20
Table 4 Guide for the Specification of 0.35 µm Design Rule, Twin-Tub CMOS, Epitaxial Wafers
CUSTOMER: PART NUMBER: REVISION: DATE:
TESTING LEVEL
WAFER TEST PIECE
M18 ITEM # SPECIFICATION
100% SAMPLE 100% SAMPLE
11. GENERAL EPITAXIAL WAFER AND LAYER CHARACTERISTICS
11.1 Conductivity Type/
Structure
p/p+
11.2 Primary Dopant Boron
11.3 Silicon Source Gas Fixed
11.4 Reactor Type Fixed
Net Carrier Density
(Center)
2.00 ± 0.5 × 10
15
Units carriers per cm
3
11.5
Test Method Mercury Probe SEMI MF1392 or SEMI MF1393
11.6 Net Carrier
DensityVariation
10% max per SEMI M11
11.7 Thickness (Center)
Target ± 5% (1σ)
11.8 Thickness Variation 10% per SEMI M11
11.11 Phantom Layer none
12. MECHANICAL CHARACTERISTICS: POST EPI
12.5 Flatness/Site
95% of the 22 mm × 22 mm " 0.23 um (SFQD)
includes partial sites
13. FRONT SURFACE CHARACTERISTICS
13.1 Stacking Faults 0.1 per cm
2
maximum
13.2 Slip/Dislocations none per SEMI MF1726
13.5 Scratches none per SEMI MF523, Section 12.2
13.6 Dimples none per SEMI MF523, Section 12.3
13.7 Orange Peel none per SEMI MF523, Section 12.3
13.8 Cracks/Fractures none per SEMI MF523, Section 12.3
13.9 Crow’s Feet none per SEMI MF523, Section 12.3
13.10 Edge Chips none per SEMI MF523, Section 12.3
13.12 Haze none per SEMI MF523, Section 12.2
13.13 Foreign Matter none per SEMI MF523, Section 12.3
TBD Localized Light Scatterers
2000 per m
2
max. ! 0.2 µm size, based on calibration
of surface scanning inspection systems with latex
spheres, 90% capture rate
13.15 Nominal Edge Exclusion 4 mm for all front surface characteristics except
cracks/fractures, edge chips, crow’s feet, and foreign
matter
7.1 Surface Metals " 1 × 10
11
atoms per cm
2
for each element:
Na, Al, Cr, K, Fe, Ni, Cu, Zn
14. BACK SURFACE CHARACTERISTICS
14.1 Contamination none per SEMI MF523, Section 13.4
TBD Back Seal user specified
15. OTHER CHARACTERISTICS: POLISHED WAFER-EPITAXIAL SUBSTRATE — MUST MEET SEMI M1 EXCEPT
AS NOTED
2.1 Resistivity 0.005–0.010 #·cm
TBD Bulk Micro Defects user specified
SEMI M11-0704 © SEMI 1988, 2004 21
CUSTOMER: PART NUMBER: REVISION: DATE:
TESTING LEVEL
WAFER TEST PIECE
M18 ITEM # SPECIFICATION
100% SAMPLE 100% SAMPLE
TBD Denuded Zone user specified
TBD Back Seal polysilicon [ ], silicon oxide [ ], silicon nitride [ ],
combination and thickness as required, none [ ]
6.1 Diameter 125 mm [ ], 150 mm [ ], 200 mm [ ], 300 mm [ ]
Table 5 Guide for the Specification of 0.35
µm Design Rule Epitaxial Wafers for DRAM Applications
CUSTOMER: PART NUMBER: REVISION: DATE:
TESTING LEVEL
WAFER TEST PIECE
M18 ITEM # SPECIFICATION
100% SAMPLE 100% SAMPLE
11. GENERAL EPITAXIAL WAFER AND LAYER CHARACTERISTICS
11.1 Conductivity Type/
Structure
p/p+
11.2 Primary Dopant Boron
11.3 Silicon Source Gas not specified
11.4 Growth Method not specified
Net Carrier
Density(Center)
Target must be ! 1.34 × 10
15
Tolerance ± 25% of target
Units Carriers per cm
3
11.5
Test Method SEMI MF1392 or SEMI MF1393
11.6 Net Carrier
DensityVariation
± 20% per SEMI M11
11.7 Thickness (Center)
Target must be " 5 µm, Tolerance ± 5 % (1σ) or target
11.8 Thickness Variation 10% per SEMI M11
11.9 Transition Width user specified
11.11 Phantom Layer none
6. MECHANICAL CHARACTERISTICS: PRE EPI
6.11 Warp user specified
6.13 Global Flatness
3 µm max. (GFLR)
6.8 Total Thickness
Variation (TTV)
5 µm max. (GBIR)
6.14 Flatness/Site
95% of the 22 mm × 22 mm sites " 0.35 µm (SFQD),
partial sites not included, substrate form
13. FRONT SURFACE CHARACTERISTICS
13.1 Stacking Faults 0.1 per cm
2
maximum
13.2 Slip/Dislocations total length " diameter/2 per SEMI MF1726
13.10 Edge Chips none per SEMI MF523, Section 12.3
13.14 Localized Light Scatters
including haze, stacking
faults and scratches
2000 per m
2
max. ! 0.16 µm size, based on calibration of
surface scanning inspection systems
with latex spheres, 90% capture rate
13.15 Nominal Edge Exclusion 4 mm for all front surface characteristics except
cracks/fractures, edge chips, crow’s feet, and foreign
matter