semi合集-English.pdf - 第1089页
SEMI E5-1104 © SEMI 1982, 2004 31 Name Format Description Values Where Used RCPID 20 Recipe identifier. Formatted text conforming to the requirements of OBJSPEC. S15F21, F23, F28, F29, F30, F33, F35, F37, F41, F44, F53 R…
SEMI E5-1104 © SEMI 1982, 2004 30
Name Format Description Values Where Used
PRRECIPEMETHOD 51 Indicates the recipe
specification type, whether
tuning is applied and which
method is used:
1 – Recipe only
2 – Recipe with variable tuning
S16F11, F13,
F15
PRSTATE 51 Enumerated value, 1 byte
S16F20
PTN 10, 51 Material Port number, 1 byte
S3F17, F21,
F25;
S4F1, F3, F5,
F7, F9, F11,
F13, F15, F17;
S16F13, F17,
F21
QUA 10 Quantity in format, 1 byte
S3F2, F4, F5,
F7
RAC 31, 51 Reset acknowledge, 1 byte
0 = Reset to be done
1 = Reset denied
>1 = Other errors
2-63 Reserved
S2F20
RCMD 20, 31,
51
Remote command code or
string
S2F21, F41,
F49
RCPATTRDATA 0, 10,
11, 20,
3(), 4(),
5()
The contents (value) of a
recipe attribute
S6F25;
S15F13, F15,
F18, F27, F28,
F30, F32, F49,
F51
RCPATTRID 20 The name (identifier) of a
non-identifier recipe attribute
S6F25;
S15F13, F15,
F18, F27, F28,
F30, F32, F49,
F51
RCPBODY 10, 20,
3(), 5()
Recipe body
S15F13, F15,
F18, F27, F32,
F49, F51
RCPCLASS 20 Recipe class
S15F11
RCPCMD 51 Indicates an action to be
performed on a recipe
5 = Delete
8 = Unprotect
9 = Protect
10 = Verify
11 = Link
12 = Unlink
13 = Certify
14 = De-certify
15 = Download
16 = Upload
0-4, 6-7, 17-63 Reserved
S15F21, F22
RCPDEL 51
0 = Delete
1 = Deselect
>1 Reserved
S15F35
RCPDESCLTH 5() The length in bytes of a
recipe section
S15F24
RCPDESCNM 20 Identifies a type of descriptor
of a recipe: “ASDesc”,
“BodyDesc”, “GenDesc”
S15F24
RCPDESCTIME 20 The timestamp of a recipe
section, in the format
“YYYYMMDDhhmmsscc”
S15F24
SEMI E5-1104 © SEMI 1982, 2004 31
Name Format Description Values Where Used
RCPID 20 Recipe identifier. Formatted
text conforming to the
requirements of OBJSPEC.
S15F21, F23,
F28, F29, F30,
F33, F35, F37,
F41, F44, F53
RCPNAME 20 Recipe name
S15F11
RCPNEWID 20 The new recipe identifier
assigned as the result of a
copy or rename operation.
S15F19, F41,
F44
RCPOWCODE 11 Indicates whether any pre-
existing recipe is to be
overwritten (= TRUE) or not
(= FALSE) on download
S15F27, F49
RCPPARNM 20 The name of a recipe variable
parameter. Maximum length
of 256 characters.
S15F25, F33;
S16F3, F11,
F13, F15, F23
RCPPARRULE 20 The restrictions applied to a
recipe variable parameter
setting. Maximum length of
80 characters.
S15F25
RCPPARVAL 10, 11,
20, 3(),
4(), 5()
The initial setting assigned to
a recipe variable parameter.
Text form restricted to
maximum of 80 characters.
S15F25, F33;
S16F3, F11,
F13, F15, F23
RCPRENAME 11 Indicates whether a recipe is
to be renamed (= TRUE) or
copied (= FALSE)
S15F19
RCPSECCODE 10 Indicates the sections of a
recipe requested for transfer
or being transferred:
1 = Generic attributes only
3 = Generic attributes and body
4 = All agent-specific datasets
(zero or more)
7 = Generic attributes, body,
and all agent-specific datasets
8 = Single agent-specific
dataset (zero or one)
11 = Generic attributes, body,
and single agent-specific
datasets
All other values reserved
S15F15, F16,
F17
RCPSECNM 20 Recipe section name:
“Generic”, “Body”, or
“ASDS”
S15F15, F18
RCPSPEC 20 Recipe specifier. The object
specifier of a recipe.
S15F1, F9, F13,
F15, F17, F19,
F27, F28, F31,
F32, F45, F49,
F51, F53;
S16F11, F13,
F15, F23
RCPSTAT 51 The status of a managed
recipe
0 = Does not exist
8 = Unprotected
9 = Protected
S15F10
RCPUPDT 11 Indicates if an existing recipe
is to be updated (= True) or a
new recipe is to be created (=
False)
S15F13
RCPVERS 20 Recipe version
S15F10, F12
READLN 3(), 5() Maximum length to read
S13F5
SEMI E5-1104 © SEMI 1982, 2004 32
Name Format Description Values Where Used
RECLEN 3(), 5() Maximum length of a
Discrete record
S13F4
REFP 3() Reference Point
S12F1, F4
REPGSZ 20, 3(),
5()
Reporting group size
S2F23;
S17F5
RESC 31, 51 Resolution code for numeric
data
1 = Absolute. Value may be
specified to nearest increment
of RESV
2 = Significant Digits. Value
may be specified with no more
significant digits than RESV
allows
S7F22
RESPEC 20 Object specifier for the recipe
executor
S15F29, F33,
F35
RESV 3(), 4(),
5()
Resolution value for numeric
data
If RESC=1, then RESV contains
smallest increment allowed for
parameter
S7F22
RETICLEID 20 The object identifier for a
reticle. Conforms to
OBJSPEC.
S3F35
RETPLACEINSTR 51 Instructions to indicate which
pod slots will have reticles
placed. Possible values for
ReticlePlacementInstruction
are:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
S3F35
RETREMOVEINSTR 51 Instructions to indicate which
pod slots will have reticles
removed
0 = REMOVE
1 = PASS BY
S3F35
RIC 31, 51 Reset code, 1 byte
0 = Not used
1 = Power up reset
>1 Other reset conditions
2-63 Reserved
S2F19
RMACK 51 Conveys whether a requested
action was successfully
completed, denied, completed
with errors, or will be
completed with notification to
the requestor
0 = Successful completion
1 = Cannot perform action
2 = Completed with errors
3 = Action will be completed
and notification sent
4 = No request for this action
exists
S15F4, F6, F8,
F10, F12, F14,
F16, F18, F20,
F22, F24, F25,
F26, F28, F30,
F32, F34, F36,
F38, F40, F42,
F44, F48, F53
RMCHGSTAT 5() Indicates the change that
occurred for an object
0 = No change
1 = Created
2 = Updated
3 = Stored (new)
4 = Replaced
5 = Deleted
6 = Copied (new object)
7 = Renamed
8 = Unprotected
9 = Protected
10 = Verified
11 = Linked
12 = Unlinked
13 = Certified
14 = De-certified
15 = Selected
16 = Deselected
S15F25