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SEMI S22-1103a © SEMI 2003, 2005 44 Table A1-7 Non-insula ted Bus Bar Sizes Thickness Thickness Width Wi dth Area Area Amperage mm Inches mm Inches mm 2 Inches 2 A 1.59 0.063 12.7 19.1 25.4 38.1 50.8 76.2 0.50 0.75 1.00 …

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SEMI S22-1103a © SEMI 2003, 2005 43
Table A1-6 Ambient Temperature Correction Factors for Tables A1-1 through A1-5
Ambient Temperature
(Degrees C)
60 degree C
Insulation
75 degree C
Insulation
90/105 degree C
Insulation
21–25 1.08 1.05 1.04
26–30 1.00 1.00 1.00
31–35 0.91 0.94 0.96
36–40 0.82 0.88 0.91
41–45 0.71 0.82 0.87
46–50 0.58 0.75 0.82
51–55 0.41 0.67 0.76
56–60 - 0.58 0.71
61–70 - 0.33 0.58
71–80 - - 0.41
SEMI S22-1103a © SEMI 2003, 2005 44
Table A1-7 Non-insulated Bus Bar Sizes
Thickness Thickness Width Width Area Area Amperage
mm Inches mm Inches mm
2
Inches
2
A
1.59 0.063 12.7
19.1
25.4
38.1
50.8
76.2
0.50
0.75
1.00
1.50
2.00
3.00
20.0
30.3
40.6
60.6
80.6
121.3
0.031
0.047
0.063
0.094
0.125
0.188
31
47
63
94
125
188
3.18 0.125 12.7
19.1
25.4
38.1
50.8
63.5
76.2
101.6
0.50
0.75
1.00
1.50
2.00
2.50
3.00
4.00
40.6
60.6
80.6
121.3
161.3
201.9
241.9
322.6
0.063
0.094
0.125
0.188
0.250
0.313
0.375
0.500
63
94
125
188
250
313
375
500
6.35 0.250 12.7
19.1
25.4
38.1
50.8
63.5
76.2
88.9
101.6
127.0
152.4
0.50
0.75
1.00
1.50
2.00
2.50
3.00
3.50
4.00
5.00
6.00
80.6
121.3
161.3
241.9
322.6
403.2
483.9
564.5
645.2
806.5
967.7
0.125
0.188
0.250
0.375
0.500
0.625
0.750
0.875
1.00
1.25
1.50
125
188
250
375
500
625
750
875
1000
1250
1500
9.53 0.375 12.7
19.1
25.4
38.1
50.8
63.5
76.2
88.9
101.6
0.50
0.75
1.00
1.50
2.00
2.50
3.00
3.50
4.00
121.3
181.3
241.9
363.2
483.9
605.2
725.8
847.1
967.7
0.188
0.281
0.375
0.563
0.750
0.938
1.125
1.313
1.500
188
281
375
563
750
938
1125
1313
1500
12.7 0.500 19.1
25.4
38.1
50.8
76.2
101.6
0.75
1.00
1.50
2.00
3.00
4.00
241.9
322.6
483.9
645.2
967.7
1290.3
0.375
0.500
0.750
1.00
1.50
2.00
375
500
750
1000
1500
2000
#1
Refer to Table A1-12 for creepage and clearance distances between non-insulated bus-bars.
SEMI S22-1103a © SEMI 2003, 2005 45
Table A1-8 Indicator Lights and Illuminated Pushbuttons With Respect To The Safety Of Persons, Property
And/Or The Environment
Color Meaning Explanation Action by Operator
A
ction by Other Persons
#1
Red Danger Dangerous Situation Or
Imperative Order
Immediate Response To
Deal With A Dangerous
Situation
Escape Or Stop
Yellow Caution/Warning - Out Of Order
- Faulty Situation
- Permanent Or
Temporary Risk (E.G.
Accessibility To
Hazardous Areas)
Intervention To Prevent
A Dangerous Situation
Evacuation Or Restricted
Access
Green Safe - Indication Of A Safe
Situation
- Safe to Proceed
- Way Clear
No Specific Action
Demanded
No Specific Action
Demanded
Blue Mandatory - Indication Of A Need
For Mandatory Action
Mandatory Action Mandatory Action
White
Gray
No Meaning Assigned General Information No Specific Action
Demanded
No Specific Action
Demanded
#1
Other Persons - Persons who are in the vicinity of the plant or process, but who are not themselves operators.