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SEMI M21-0304 © SEMI 1992, 2004 8 Figure R1-2 Truncated Array on the Wafer

SEMI M21-0304 © SEMI 1992, 2004 7

RELATED INFORMATION 1

AN EXAMPLE OF ASSIGNING ADDRESSES TO AN ARRAY

NOTICE: This related information is not an official part of SEMI M21. It was developed during the

original development of the document. This related information was approved for publication by full

letter ballot on October 16, 2003.

R1-1 An example of a regular 29-column by 9-row

array, truncated for application to a wafer, is shown in

Figure R1-1. The Starting Element includes the array

center because there are odd numbers of both columns

and rows. In addition, Figure R1-1 shows the element

addresses for elements along the right half of the

horizontal array centerline, for elements along column

1, and for selected other elements in the array. Also

shown are the left hand corner elements (which lie

outside the truncated array).

R1-2 Figure R1-2 shows the same truncated array

fitted onto a wafer. Because the truncation is not

symmetrical around the vertical array centerline, the

array center is located to the left of the wafer center.

Figure R1-1

Array Truncated for Application to a Wafer

SEMI M21-0304 © SEMI 1992, 2004 8

Figure R1-2

Truncated Array on the Wafer

SEMI M21-0304 © SEMI 1992, 2004 9

RELATED INFORMATION 2

EXTENSIONS TO OTHER ELEMENT ADDRESSING CONVENTIONS

NOTICE: This related information is not an official part of SEMI M21. It was developed during the

original development of the document. This related information was approved for publication by full

letter ballot on October 16, 2003.

R2-1 Element addressing conventions other than that

covered by this guide are also widely used in

engineering. Two of these are illustrated in Figure R2-1

with the use of the same truncated array discussed in

Related Information 1.

R2-2 First-Quadrant Convention

R2-2.1 Addresses in this convention start at the lower

left corner of the array and increase to the right and

upward in the same way as in the convention covered

by this guide. The lower left corner of the array is

defined by the intersection of the bottom boundary of

the lowest row and the left boundary of the leftmost

column. In the case of tiling, the boundaries are those of

the lowest elements and the leftmost elements in the

array. The lower left corner may fall outside the useful

portion of the array. The lower left element of the array

is the element immediately to the right and above the

lower left corner of the array.

R2-2.2 The First-Quadrant Convention uses a column,

row address but does not have a zero row or a zero

column.

R2-2.3 The addresses of the corners of an array with m

columns and n rows in the First-Quadrant Convention

are as follows:

• lower left (Starting Element): (1,1)

• lower right: (m,1)

• upper left: (1,n)

• upper right: (m,n)

R2-2.4 The general formulas for obtaining the

addresses of any element (i

) in the First-Quadrant

Convention from the addresses (i,j) in the convention

covered by this guide are as follows:

= i + integer(m/2) + 1

= j + integer(n/2) + 1

R2-2.5 These equations also apply to arrays with

column or row tiling if n

′

= n or m

′

= m, respectively. If

this condition is not met, the displacement of the row or

column which defines the array centerline with respect

to the boundary of the array must be known to

transform the addresses.

R2-3 Row, Column (Matrix) Convention

R2-3.1 Addresses in this convention start at the upper

left corner of the array and increase to the right and

downward. The upper left corner of the array is defined

by the intersection of the top boundary of the highest

row and the left boundary of the leftmost column. In the

case of tiling, the boundaries are those of the highest

elements and the leftmost elements in the array. The

upper left corner may fall outside the useful portion of

the array. The upper left element of the array is the

element immediately to the right and below the upper

left corner of the array.

R2-3.2 The Row, Column (Matrix) Convention uses a

row, column address and, like the First-Quadrant

Convention, does not have a zero row or a zero column.

R2-3.3 The addresses of the corners of an array with m

columns and n rows in the Row, Column (Matrix)

Convention are as follows:

• upper left (Starting Element): (1,1)

• upper right: (1,m)

• lower left: (n,1)

• lower right: (n,m)

R2-3.4 The general formulas for obtaining the

addresses of any element (i

) in the Row, Column

(Matrix) Convention from the addresses (i,j) in the

convention covered by this guide are as follows:

=intege

n / 2

(

)

=integer m / 2

(

)

R2-3.5 These equations also apply to arrays with