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SEMI E52-0703 © SEMI 1995, 2003 31 MIXED GAS NAME SYMBOL CODE 5% CARBON DIOXIDE/NITROGEN 5% CO2/N2 0618 5% HYDROGEN/ARGON 5% H2/Ar 0619 8% PHOSPHINE/NITROGEN 8% PH3/N2 0620 5% NITROGEN/HYDROGEN 5% N2/H2 0621 5% NITROGEN/…

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SEMI E52-0703 © SEMI 1995, 2003 30
MIXED GAS NAME SYMBOL CODE
10%SILANE/HELIUM 10%SiH4/He 0573
8%CARBON TETRAFLUORIDE(FREON-14)/OXYGEN 8%CF4/O2 0574
10%SILANE/HYDROGEN 10%SiH4/H2 0575
10%NITROGEN/ARGON 10%N2/Ar 0576
20%SILANE/HYDROGEN 20%SiH4/H2 0577
15%ARGON/PHOSPHINE 15%Ar/PH3 0578
15%ARSINE/HYDROGEN 15%AsH3/H2 0579
15%DIBORANE/NITROGEN 15%B2H6/N2 0580
15%PHOSPHINE/15%SILANE/NITROGEN 15%PH3/15%SiH4/N2 0581
15%PHOSPHINE/ARGON 15%PH3/Ar 0582
15%PHOSPHINE/HYDROGEN 15%PH3/H2 0583
15%PHOSPHINE/SILANE 15%PH3/SiH4 0584
17%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 17%O2/CF4 0585
2%ARSINE/NITROGEN 2%AsH3/N2 0586
2%DIBORANE/ARGON 2%B2H6/Ar 0587
2%HYDROGEN/NITROGEN 2%H2/N2 0588
2%SILANE/HELIUM 2%SiH4/He 0589
20%ARSINE/HYDROGEN 20%AsH3/H2 0590
20%DIBORANE/SILANE 20%B2H6/SiH4 0591
20%HYDROGEN/CARBON MONOXIDE 20%H2/CO 0592
20%PHOSPHINE/HYDROGEN 20%PH3/H2 0593
21%OXYGEN/NITROGEN 21%O2/N2 0594
3%DIBORANE/NITROGEN 3%B2H6/N2 0595
3%HYDROGEN/HELIUM 3%H2/He 0596
3%HYDROGEN/NITROGEN 3%H2/N2 0597
3%OXYGEN/HELIUM 3%O2/He 0598
3%OZONE/AIR 3%O3/Air 0599
3%PHOSPHINE/NITROGEN 3%PH3/N2 0600
3%PHOSPHINE/SILANE 3%PH3/SiH4 0601
3%SILANE/HELIUM 3%SiH4/He 0602
30%HELIUM/OXYGEN 30%He/O2 0603
30%OXYGEN/HELIUM 30%O2/He 0604
4%DIBORANE/NITROGEN 4%B2H6/N2 0605
4%HYDROGEN/HELIUM 4%H2/He 0606
4%HYDROGEN/NITROGEN 4%H2/N2 0607
4%NITROGEN/HYDROGEN 4%N2/H2 0608
4%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 4%O2/CF4 0609
4%PHOSPHINE/HELIUM 4%PH3/He 0610
4%PHOSPHINE/SILANE 4%PH3/SiH4 0611
40%HELIUM/SILANE 40%He/SiH4 0612
8%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 8%O2/CF4 0613
5%ARSINE/HYDROGEN 5%AsH3/H2 0614
5%DIBORANE/ARGON 5%B2H6/Ar 0615
5%BORON TRICHLORIDE/HYDROGEN 5%BCI3/H2 0616
5%PROPANE/HYDROGEN 5%C3H8/H2 0617
SEMI E52-0703 © SEMI 1995, 2003 31
MIXED GAS NAME SYMBOL CODE
5%CARBON DIOXIDE/NITROGEN 5%CO2/N2 0618
5%HYDROGEN/ARGON 5%H2/Ar 0619
8%PHOSPHINE/NITROGEN 8%PH3/N2 0620
5%NITROGEN/HYDROGEN 5%N2/H2 0621
5%NITROGEN/PHOSPHINE 5%N2/PH3 0622
5%OXYGEN/ARGON 5%O2/Ar 0623
5%OZONE/OXYGEN 5%O3/O2 0624
5%PHOSPHINE/5%SILANE/NITROGEN 5%PH3/5%SiH4/N2 0625
5%PHOSPHINE/ARGON 5%PH3/Ar 0626
5%PHOSPHINE/SILANE 5%PH3/SiH4 0627
5%DICHLOROSILANE/ARGON 5%SiH2CI2/Ar 0628
5%SILANE/ARGON 5%SiH4/Ar 0629
50%HELIUM/OXYGEN 50%He/O2 0630
50%NITROGEN/OXYGEN 50%N2/O2 0631
50%PHOSPHINE/SILANE 50%PH3/SiH4 0632
50%SILANE/HYDROGEN 50%SiH4/H2 0633
6.5%DIBORANE/15%SILANE/NITROGEN 6.5%B2H6/15%SiH4/N2 0634
6.5%DIBORANE/HYDROGEN 6.5%B2H6/H2 0635
8%PHOSPHINE/SILANE 8%PH3/SiH4 0636
30%OXYGEN/HYDROGEN 30%O2/H2 0637
25%AMMONIA/HYDROGEN 25%NH3/H2 0638
8%OZONE/OXYGEN 8%O3/O2 0639
2%PHOSPHINE/NITROGEN 2%PH3/N2 0640
15%OZONE/OXYGEN 15%O3/O2 0641
40%OXYGEN/SULFUR HEXAFLUORIDE 40%O2/SF6 0642
13%HYDROGEN/NITROGEN 13%H2/N2 0643
1%HYDROGEN SULFIDE/HYDROGEN 1%H2S/H2 0644
1%HYDROGEN SELENIDE/HYDROGEN 1%H2Se/H2 0645
10%SILANE/NITROGEN 10%SiH4/N2 0646
10%DISILANE/HELIUM 10%Si2H6/He 0647
20%DISILANE/HELIUM 20%Si2H6/He 0648
10%OXYGEN/HELIUM 10%O2/He 0649
50%HYDROGEN BROMIDE/HYDROGEN CHLORIDE 50%HBr/HCI 0650
12%OZONE/OXYGEN 12%O3/O2 0651
15%NITRIC OXIDE/NITROGEN 15%NO/N2 0652
2%SILANE/NITROGEN 2%SiH4/N2 0653
5%DIBORANE/NITROGEN 5%B2H6/N2 0654
.5%BORON TRICHLORIDE/HYDROGEN .5%BCI3/H2 0655
.5%PHOSPHINE/HYDROGEN .5%PH3/H2 0656
3%DIBORANE/HYDROGEN 3%B2H6/H2 0657
1%GERMANE/NITROGEN 1%GeH4/N2 0658
3%DIBORANE/5%SILANE/NITROGEN 3%B2H6/5%SiH4/N2 0659
.3%PHOSPHINE/SILANE .3%PH3/SiH4 0660
30%NITROGEN TRIFLUORIDE/NITROGEN 30%NF3/N2 0661
.8%DIBORANE/NITROGEN .8%B2H6/N2 0662
SEMI E52-0703 © SEMI 1995, 2003 32
MIXED GAS NAME SYMBOL CODE
2%ARSINE/SILANE 2%AsH3/SiH4 0663
8%GERMANE/HYDROGEN 8%GeH4/H2 0664
3%ARSINE/HYDROGEN 3%AsH3/H2 0665
10%DIBORANE/NITROGEN 10%B2H6/N2 0666
8%PHOSPHINE/HELIUM 8%PH3/He 0667
10%AMMONIA/NITROGEN 10%NH3/N2 0668
5%FLUORINE/NITROGEN TRIFLUORIDE 5%F2/NF3 0669
10%DISILANE/ARGON 10%Si2H6/Ar 0670
3%PHOSPHINE/5%SILANE/NITROGEN 3%PH3/5%SiH4/N2 0671
3%NITROGEN/HYDROGEN 3%N2/H2 0672
.7%ARSINE/HYDROGEN .7%AsH3/H2 0673
10%PHOSPHINE/HELIUM 10%PH3/He 0674
.8%PHOSPHINE/HELIUM .8%PH3/He 0675
7.5%PHOSPHINE/SILANE 7.5%PH3/SiH4 0676
20%FLUORINE/HELIUM 20%F2/He 0677
22%PHOSPHINE/SILANE 22%PH3/SiH4 0678
5%TRICHLOROSILANE/HYDROGEN 5%SiHCI3/H2 0679
25%TRICHLOROSILANE/HYDROGEN 25%SiHCI3/H2 0680
.8%PHOSPHINE/DISILANE .8%PH3/Si2H6 0681
13%TRICHLOROSILANE/HYDROGEN 13%SiHCI3/H2 0682
5%DIBORANE/SILANE 5%B2H6/SiH4 0683
1%SILANE/DIBORANE 1%SiH4/B2H6 0684
7%METHYLENE CHLORIDE/3%OZONE/AIR 7%CH2CI2/3%O3/Air 0685
50%FLUOROFORM/ARGON 50%CHF3/Ar 0686
20%HELIUM/OXYGEN 20%He/O2 0687
3%ARSINE/ARGON 3%AsH3/Ar 0688
10%METHYLSILANE/HYDROGEN 10%CH6Si/H2 0689
.05%DIBORANE/HYDROGEN .05%B2H6/H2 0690
4%PHOSPHINE/ARGON 4%PH3/Ar 0691
8%HYDROGEN/ARGON 8%H2/Ar 0692
5%PHOSPHINE/HELIUM 5%PH3/He 0693
15%HYDROGEN/ARGON 15%H2/Ar 0694
2%DIBORANE/NITROGEN 2%B2H6/N2 0695
2%PHOSPHINE/SILANE 2%PH3/SiH4 0696
15%DIBORANE/ARGON 15%B2H6/Ar 0697
10%GERMANE/ARGON 10%GeH4/Ar 0698
5%METHANE/HELIUM 5%CH4/He 0699
4%HYDROGEN/ARGON 4%H2/Ar 0700
10%DIBORANE/HYDROGEN 10%B2H6/H2 0701
40%SILANE/HELIUM 40%SiH4/He 0702
2%ARSINE/HYDROGEN 2%AsH3/H2 0703
10%GERMANE/HELIUM 10%GeH4/He 0704
9.4%ARGON/NITROGEN TRIFLUORIDE 9.4%Ar/NF3 0705
8.6%ARGON/NITROGEN TRIFLUORIDE 8.6%Ar/NF3 0706
.8%PHOSPHINE/HYDROGEN .8%PH3/H2 0707