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SEMI E123.1-0703 © SEMI 2003 6 Variable Name Descrip tion Class SECS-II Type LinkPortStatus (3 = Input/Output linked, 2 = Input linked, 1 = Output linked, 0 = HANDLER not Linked) SV U4, enumerated values as indicated. Me…

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SEMI E123.1-0703 © SEMI 2003 5
6 Variable Data Item Mapping
The purpose of this section is to define the list of variable items required by the HSEM. Values of these variables
will be available to the host through collection event reports and host status queries.
6.1 Requirements
6.1.1 Any supplier-defined variables shall be documented in the same format used by this document. The following
minimum information is required:
<variable name> Class: <ECV, SV, or DVVAL> Format: <SML>
Description: <If class = DVVAL, description must contain statement of when data is valid.>
<If format = ASCII, then a length is required. It is assumed to be left-justified unless otherwise noted.>
6.2 Data Types
6.2.1 Equipment Constants (ECVs) can be changed by the host using S2,F15 (New Equipment Constant Send). The
operator may be able to change some values, but the equipment does not change the values on its own. The value of
an equipment constant may be queried by the host at any time, using the S2,F13/14 transaction. They reside in non-
volatile memory of the equipment. Equipment constants remain in effect until they are overwritten either by manual
entry or by a S2,F15.
6.2.2 Status Variables (SVs) are valid at all times. An SV may not be changed by the host but may be changed by
the equipment or operator. The value of status variables may be queried by the host at anytime using the S1,F3/4 or
S6,F19/20 transactions.
6.2.3 DVVALs are variables that are valid only upon the occurrence of specific collection events. An attempt to
read a variable item at the wrong time does not generate an error, but the data reported may not have relevant
meaning.
6.3 For multiple sites scenarios, if a variable is described as List by number of sites, then a list is expected, one
value for each site.
Table 4 Variable Item Mapping Table
Variable Name Description Class SECS-II Type
Physical Handler Group
BufferID Identifier of the buffer. This is implementation specific
depending if handler supports any input, sort or output
buffers.
DVVAL A[1..16]
BufferType Supplier defined buffer type. This is implementation
specific, and may include input, output or sort buffers.
DVVAL Enumerated value for
each buffer type.
CategoryID List of sort category IDs currently configured in handler. ECV L, n
1. A[1..16]
2. A[1..16]
:
n. A[1..16]
CategoryCount Count of units in each sort category. List by number of
categories.
L,n # n=number of categories
L, 2
1. CategoryID
2. Count of units in this category
SV L, n
L,2
1. A[1..16]
2. U4
EquipSerialID Identification of Equipment. SV A[1..16]
KitID ID of unique tooling unit. SV A[1..24]
LightPoleStatus Color/status (i.e., Red/flash). SV A[1..16]
SEMI E123.1-0703 © SEMI 2003 6
Variable Name Description Class SECS-II Type
LinkPortStatus (3 = Input/Output linked,
2 = Input linked,
1 = Output linked,
0 = HANDLER not Linked)
SV U4, enumerated values as
indicated.
MediaID Media Serial Number. SV A[1..24]
MediaType Name of Media Type. SV A[1..24]
OperationType Current Operation Mode (i.e., maintenance, production). ECV A[1..24]
OperatorID Current Operator ID. ECV A[1..24]
QueueStatus PPID Queued to be run. SV U4
ReaderType Type of reader installed on handler. DVVAL A[1..24]
ReaderErrorType Type of error detected by the material reader. DVVAL A[1..24]
Process-Site Components
AlignmentCount Number of units since last alignment (i.e.,
Homing/Adjustment).
SV U4
InsertionForce Insertion-Force energy. DVVAL F8
InsertionForceSetpoint Insertion-Force set point (setpoint). ECV F8
MediaChangeTime Elapsed time to replace media and send ready. SV A[16]
MediaCount Number of media since last reset. SV U4
MediaCountInterval Event generated when number of media is completed. SV U4
PresentPositionActual Present position actual. ECV U4
PresentPositionSetpoint Present position set points (setpoint). ECV U4
ProcessSiteTemp Process-site temperature (setpoint). SV F8
ProcessSiteID ID of process-site in configuration. SV U4
ProcessSiteStatus Site
n
Availability (1 = enabled, 0 = disabled). List by
number of sites.
DVVAL L, n # n=number of sites
1. U4
2. U4
:
n. U4
ProcessSiteCount Total count of process sites. SV U4
ProcessSiteLoaded Site
n
loaded status, normally associated with UnitsReady
event. 0=No unit, 1=Loaded. List by number of sites.
L, n # n=number of sites
1. Loaded status of Site 1
2. Loaded status of Site 2
:
n. Loaded status of Site n
SV L, n # n=number of sites
1. U4
2. U4
:
n. U4
SkipCount Number of units skipped since last reset (Skip + Process =
Total).
SV U4
SkipCountInterval Event generated when number of units is skipped. SV U4
StartProcessPortID Start process source (i.e., hand, keyboard, host). SV U4
UnitCount Number of units since last reset. SV U4
UnitCountInterval Event generated when number of units is completed. SV U4
UnitPosition X, Y, Z media location of a unit. SV U4
UnitStatus (1 = Processed, 0 = Skipped) SV U4, enumerated values as
indicated.
SEMI E123.1-0703 © SEMI 2003 7
7 Additional Alarm Management Requirements
7.1 Alarm Definition
7.1.1 SEMI E30 has a very restrictive definition of alarms conflicting with the SEMI E5. This standard requires the
broader SEMI E5 definition.
7.1.2 Messages S5,F1 through S5,F8 of this section provide basic alarm messages. The messages S5,F9 through
S5,F18 provide extended capabilities for Exception Handling. When using messages F1–F8, alarms may be divided
into categories as follows:
Table 5 Alarm Code Mapping
Alarm Name ALCD Description
Personal Safety 1 Condition may be dangerous to people.
Equipment Safety 2 Condition may harm equipment.
Parameter Control Warning 3 Parameter variation outside of preset limits — may harm product.
Parameter Control Error 4 Parameter variation outside of reasonable control limits — may indicate an
equipment malfunction.
Irrecoverable Error 5 Intervention required before normal use of equipment can resume.
Equipment Status Warning 6 An unexpected condition has occurred, but operation can continue.
Attention Flags 7 A signal from a process program indicating that a particular step has been reached.
Data Integrity 8 A condition that may cause loss of data; usually related to Stream 6.
7.1.3 For messages F1 through F8, it will be the equipment’s responsibility to categorize the alarm. Some alarm
conditions may cause more than one type of alarm to be issued. For example, a parameter control error on over
temperature may also trip a protective device that makes the alarm irrecoverable without some intervention.
• Exceptions reported with an ALCD with a category of 1–3 and 5 should cause a transition to
ALARM_PAUSED.
7.2 Recoverable Exceptions
7.2.1 Any exception that may be programmatically recoverable should be reported as an exception using S5F9
Exception Post Notify (EXPN) with a minimum recovery action of RETRY.
7.2.2 If a machine reports recoverable exceptions it should implement the other S5 functions for Exception Clear,
Recovery Request, and Recovery Request Abort.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
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respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.