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SEMI T11-0703 © SEMI 2002, 2003 4 139.6 ± 0.5 152.0 ± 0.4 11 0 .4 ± 0 . 5 1 5 2. 0 ± 0 .4 124 (nominal) 1.6 ± 0.7 Pellicle Substrate Reference Corner Data Matrix Code Symbol (see detail in Figure 3) NOTE: All dime nsions…
SEMI T11-0703 © SEMI 2002, 2003 3
Data Matrix Code Symbol Reference Corner
C
2
C
1
R
1
R
2
Secondary Border Ro
w
Secondary Border Column
Primary Border Row
Primary Border Column
NOTE: All dimensions in millimeters.
Figure 1
Data Matrix Code Symbol Showing Border Rows and Columns
SEMI T11-0703 © SEMI 2002, 2003 4
139.6
±
0.5
152.0
±
0.4
11
0
.4
±
0
.
5
1
5
2.
0
±
0
.4
124 (nominal)
1.6
±
0.7
Pellicle
Substrate Reference Corner
Data Matrix
Code Symbol
(see detail in
Figure 3)
NOTE: All dimensions in millimeters.
Figure 2
Location of Data Matrix Code Symbol in Reticle Substrate Edge Exclusion Area
(Nominally 14 mm Wide)
SEMI T11-0703 © SEMI 2002, 2003 5
Pellicle
Frame
Pellicle misalignment (±0.5)
}
Area of
Unpatterned
Chrome Film
6.0
(
End Effector
)
Reticle
misalignment
(
±
1.5
)
0.7
8.8
14.0 (nominal)
(Edge Exclusion)
Quiet Zone
139.6 ± 0.5 to
Substrate
Reference Corner
(see Figure 2)
110.4 ± 0.5 to
Substrate Reference
Corner (see Figure 2)
1.6
±
0.7
4.0
3.2
0.4
0.4
Data Matrix
Symbol Code
Reference
Corner
0.4
3.2
0.4
NOTE: All dimensions in millimeters.
Figure 3
Detail of Location of Data Matrix Code Symbol with Allowed Clearances to Related Elements
(see Related Information 1, Other Considerations, for Description of these Elements)
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