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SEMI F62-0701 © SEMI 2001 13 Table 4 Sample D a ta for 500 sccm MFC T g T s T e Q sp Q ind Q A Time min. 20.1 10 .5 20.2 15 1 20.3 11 1.5 20.4 14 2 20.5 24 2.5 . . . . . . 30.9 36 60 . . . 40.0 48 120 39.0 40 480 30.0 36…

100%1 / 7923
SEMI F62-0701 © SEMI 2001 12
Table 3 Data Presentation for 500 sccm MFC
Data Collection
T
e1
Q
a1
T
e2
Q
a2
T
e3
Q
a3
T
e4
Q
a4
T
e5
Q
a5
T
e6
Q
a6
T
e7
Q
a7
T
e8
Q
a8
T
e9
Q
a9
0% S.P.
Q
ind
25% S.P.
Q
ind
T
g
Avg. of 10 readings
50% S.P.
Q
ind
T
g
Avg. of 10 readings
75% S.P.
Q
ind
T
g
Avg. of 10 readings
100% S.P.
Q
ind
T
g
Avg. of 10 readings
Data Presentation
Tc
e
= Q
a
(30)-Q
a
(20) × 100%
T
e
(30)-T
e
(20) Q
s.p.
Tc
e
= 134-122 × 100%
30.1-20.1 (125)
= 0.96% of Reading @ 125 sccm
SEMI F62-0701 © SEMI 200113
Table 4 Sample Data for 500 sccm MFC
T
g
T
s
T
e
Q
sp
Q
ind
Q
A
Time min.
20.1 10 .5
20.2 15 1
20.3 11 1.5
20.4 14 2
20.5 24 2.5
.
.
.
.
.
.
30.9 36 60
.
.
.
40.0 48 120
39.0 40 480
30.0 36 560
20.0 10 600
NOTE 1: Plot as in Figure 8.
SEMI F62-0701 © SEMI 2001 14
Table 5 Gas Temperature Data Collection
Set point
(sccm)
T
s
(
°
C) T
g
(
°
C) T
b
(
°
C) T
e
(
°
C)
Q
a
(sccm) Q
ind
0 22.0 21.8 0.00
25 22.1 21.9 24.94
25 33.2 22.2 24.52
50 22.1 21.8 50.08
50 32.1 21.7 49.21
75 22.0 21.6 75.13
75 31.8 21.5 74.02
100 21.9 21.4 100.18
100 31.7 21.4 98.83
TC
g
= Q
af
-Q
ai
× 100%
[(T
g
-T
e
)
f
-(T
g
-T
e
)
i
] Q
sp
Example: For the 50 sccm setpoint data collection sample,
TC
g
= 49.21 sccm-50.08 sccm × 100%
[(32.1°C-21.7°C)-(22.1°C-21.8°C)](50 sccm)
= -0.17% of reading at 50 sccm