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SEMI E107-1102 © SEMI 2001, 2002 12 <AnalogDataUnit>8 18 100 CON TACT –0.600 V 200 IDD 125.0 mA PASS 300 IDDS 100.0 uA PASS</AnalogDataUnit> <AnalogDataUnit>9 18 100 CON TACT –0.567 V 200 IDD 120.2 mA P…

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SEMI E107-1102 © SEMI 2001, 2002 11
RELATED INFORMATION 1
NOTE: This related information is not an official part of SEMI E107, but was approved for publication by full letter ballot
procedure on July 19, 2002.
R1-1 Example of YMS Link Data
<? xml version=”1.0”? >
<ymsldfMap xmlns:semi=”http://www.semi.org” WaferId=“wafer1234” FormatRevision=“2.00" >
<Device ProductID=”product1234” LotId=”lot1234” Orientation=”180”
DeviceSizeX=” 4.8987000000e+ 03” DeviceSizeY=” 8.7395000000e+ 03”
Rows=”4” Columns=”1” BinType=”Decimal” NullBin=”255” CreateDate=” 03-18-2000 15:07:50”
Status=” prerepair_map”>
<ReferenceDevice RefDevicePosX=”-2030.55” RefDevicePosY=”1427.98”/>
<Bin BinCode=”001” BinCount=”35” BinQuality=”Pass”/>
<Bin BinCode=”002” BinCount=”4” BinQuality=”Fail”/>
<Bin BinCode=”003” BinCount=”1” BinQuality=”Fail”/>
<Data>
<Row><! [CDATA[255255255255255255255255255255]]></Row>
<Row><! [CDATA[255255255255255255001002003002]]></Row>
<Row><! [CDATA[255255255255255255255255255255]]></Row>
</Data>
</Device>
<Comment>Engineering Test</Comment>
<TestProgramName>pro123a</TestProgramName>
<TestEquipmentId>tester1</TestEquipmentId>
<DieCoordinate>BottomLeftXY</DieCoordinate>
<ErrorClassList>
<ErrorClass>
<ErrorClassName>0</ErrorClassName>
<ErrorClassQuality>bit-fail</ErrorClassQuality>
</ErrorClass>
<ErrorClass>
<ErrorClassName>1</ErrorClassName>
<ErrorClassQuality>line-fail</ErrorClassQuality>
</ErrorClass>
<ErrorClass>
<ErrorClassName>2</ErrorClassName>
<ErrorClassQuality>block-fail</ErrorClassQuality>
</ErrorClass>
</ErrorClassList>
<FailBitDataTemplate>Seq XAddress YAddress XMin XMax YMin YMax XCenter YCenter XSize YSize Area
DefectCate</FailBitDataTemplate>
<FailBitData>
<FailBitDataUnit>1 8 18 0.12345000e+ 03 0.91234000e+ 03 1.06367000e+ 03 7.27391000e+ 03 0.51789500e+ 03
4.16879000e+ 03 0.78889000e+ 03 6.21024000e+ 03 4.89919623e+ 06 block-fail</FailBitDataUnit>
<FailBitDataUnit>2 10 18 3.03120000e+ 03 3.03210000e+ 03 1.58330000e+ 03 1.58580000e+ 03 3.03165000e+ 03
1.58455000e+ 03 9.00000000e-01 2.50000000e+ 00 2.25000000e+ 00 bit-fail</FailBitDataUnit>
</FailBitData>
<AnalogDataTemplate>XAddress YAddress TestNumber Note Measure MeasureUnit TestNumber Comment
Measure MeasureUnit TestResult TestNumber Comment Measure MeasureUnit TestResult</AnalogDataTemplate>
<Invalid>99999</Invalid>
<AnalogData>
SEMI E107-1102 © SEMI 2001, 2002 12
<AnalogDataUnit>8 18 100 CONTACT –0.600 V 200 IDD 125.0 mA PASS 300 IDDS 100.0 uA
PASS</AnalogDataUnit>
<AnalogDataUnit>9 18 100 CONTACT –0.567 V 200 IDD 120.2 mA PASS 300 IDDS 321.0 uA
FAIL</AnalogDataUnit>
<AnalogDataUnit>10 18 100 CONTACT –0.612 V 200 IDD 123.4 mA PASS 300 IDDS 99.4 uA
PASS</AnalogDataUnit>
<AnalogDataUnit>11 18 100 CONTACT 99999 V 200 IDD 99999 mA PASS 300 IDDS 99.4 uA
PASS</AnalogDataUnit>
</AnalogData>
<ErrorTotal>234</ErrorTotal>
<TestDie>3</TestDie>
<Map>
R1-2 Example Datafile
Map = {
FormatRevision = “2.00"
CreateDate = “03-18-2000 15:07:50”
ProductId = " product1234"
LotId = " lot1234"
WaferId = “wafer1234”
Status = “prerepair_map”
Comment = " Engineering Test"
TestProgramName = " pro123a"
TestEquipmentId = “tester1”
WaferOrientation = 180
WaferSize = 200
DieSizeX = 4.8987000000e+ 03
DieSizeY = 8.7395000000e+ 03
ReferenceDieList = {
PosX = -2030.55 PosY = 1427.98
}
WaferCoordinate = “TopLeft”
DieCoordinate = “BottomLeftXY”
MapType = “Die”
BinType = “Decimal”
BinList = {
Code = 001 Count = 35 Quality = “Pass”
Code = 002 Count = 4 Quality = “Fail”
Code = 003 Count = 1 Quality = “Fail”
}
Data = {
007 018 001
008 018 002
009 018 003
010 018 002
}
ErrorClassList = {
Class = “0” Quality = " bit-fail"
Class = “1” Quality = " line-fail"
Class = “2” Quality = " block-fail"
}
FailBitDataTemplate = Seq XAddress YAddress XMin XMax YMin YMax XCenter YCenter XSize YSize Area
DefectCate
FailBitData = {
SEMI E107-1102 © SEMI 2001, 2002 13
1 8 18 0.12345000e+ 03 0.91234000e+ 03 1.06367000e+ 03 7.27391000e+ 03
0.51789500e+ 03 4.16879000e+ 03 0.78889000e+ 03 6.21024000e+ 03 4.89919623e+ 06 " block-fail"
2 10 18 3.03120000e+ 03 3.03210000e+ 03 1.58330000e+ 03 1.58580000e+ 03
3.03165000e+ 03 1.58455000e+ 03 9.00000000e-01 2.50000000e+ 00 2.25000000e+ 00 " bit-fail"
}
AnalogDataTemplate = XAddress YAddress TestNumber Note Measure
MeasureUnit TestNumber Comment Measure MeasureUnit TestResult
TestNumber Comment Measure MeasureUnit TestResult
Invalid = “99999”
AnalogData = {
8 18 100 “CONTACT” –0.600 “V” 200 “IDD” 125.0 “mA” “PASS” 300 “IDDS” 100.0 “µ A”
“PASS”
9 18 100 “CONTACT” –0.567 “V” 200 “IDD” 120.2 ”mA” “PASS” 300 “IDDS” 321.0 “µ A”
“FAIL”
10 18 100 “CONTACT” –0.612 “V” 200 “IDD” 123.4 “mA” “PASS” 300 “IDDS” 99.4 “µ A”
“PASS”
11 18 100 “CONTACT” 99999 “V” 200 “IDD” 99999 “mA” “PASS” 300 “IDDS” 99.4 “µ A”
“PASS”
}
ErrorTotal = 234
TestDie = 3
}
Table R1-1 Items and Attributes Used Yield Management specific part
Name Element or Attribute Define In Mandatory and Optional Relation Items
Comment Attribute Yms Map Data Items Optional ---
TestProgramName Attribute Yms Map Data Items Optional ---
TestEquipmentId Attribute Yms Map Data Items Optional ---
DieCoordinate Attribute Yms Map Data Items Optional WaferLocation
ErrorClassList Element Yms Map Data Format Optional ---
ErrorClassNumber Attribute Yms Map Data Items Optional ErrorClassList
ErrorQuality Attribute Yms Map Data Items Optional ErrorClassList
ErrorDescription Attribute Yms Map Data Items Optional ErrorClassList
FailBitDataTemplate Element Yms Map Data Format Optional ---
FailBitData Element Yms Map Data Format Optional FailBitDataTemplate
AnalogDataTemplate Element Yms Map Data Format Optional ---
Invalid Attribute Yms Map Data Items Optional ---
AnalogData Element Yms Map Data Format Optional AnalogDataTemplate
ErrorTotal Attribute Yms Map Data Items Optional ErrorClassList
TestDie Attribute Yms Map Data Items Optional ---