semi合集-English.pdf - 第5554页

SEMI P10-0705 © SEMI 1990, 2005 49 </xs:sequence> <xs:sequence minOccurs="0"> <xs:element name="EtchDepthMarkDrawing" type="xs:string"/> </xs:sequence> </xs:sequen…

SEMI P10-0705 © SEMI 1990, 2005 48

<xs:element name="PhaseAngleMarkLocation"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleMarkFeature"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element

name="PhaseAngleMarkLocationDrawing" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleMarkDrawing"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthTarget" type="xs:double"/>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthTolerance"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthRange"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthError"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="EtchDepthEquipReqd"

type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthModeReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthSiteId"

type="xs:string"/>

</xs:sequence>

<xs:element name="EtchDepthMarkLocation"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthMarkFeature"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthMarkLocationDrawing"

type="xs:string"/>

SEMI P10-0705 © SEMI 1990, 2005 49

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EtchDepthMarkDrawing"

type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartPhaseShift"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndPhaseShift"/>

</xs:complexType>

<xs:complexType name="RegistrationType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrQualityId"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrError" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrScale" type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element name="RegistrScaleReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrResidual" type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element name="RegistrResidualReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrThreeSigma" type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element

name="RegistrThreeSigmaReferenceOnly" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrResidualThreeSigma"

type="XYType"/>

<xs:sequence minOccurs="0">

<xs:element

name="RegistrResidualThreeSigmaReferenceOnly" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrTolerance"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrOrtho" type="xs:double"/>

SEMI P10-0705 © SEMI 1990, 2005 50

<xs:sequence minOccurs="0">

<xs:element name="RegistrOrthoReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrRelative" type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="RegistrRelativeReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrRefMaskId"

type="xs:string"/>

<xs:element name="RegistrRefMaskSetId"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrRefMaskName"

type="xs:string"/>

<xs:element name="RegistrRefMaskSetName"

type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="RegistrRefMaskSetVersion"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrEquipReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="EquipSiteReqd" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrStdGrid" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrRefMethodReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrAlgorithm"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrCompensationTemperature"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="RegistrMarkId"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">