semi合集-English.pdf - 第1309页
SEMI E5-1104 © SEMI 1982, 2004 251 handling of process programs by host system s and auto- mated handl ing of dat a reported t o a host by equipm ent. 12.2 Units Symb ols — Unde r SECS-II, a uni ts sym bol is a text stri…
SEMI E5-1104 © SEMI 1982, 2004 250
Stream,Function Name (Mnemonic) Direction
S18,F16 Read 2D Code Condition Data (R2DCCD) S,H<-E
Description
This message is used to return requested information on 2D Code Condition from the subsystem indicated in TARGETID or to
acknowledge the results of the request.
Structure
L,5
1. <TARGETID>
2. <SSACK>
3. <MID>
4. <STATUSLIST>
5. <CONDITIONLIST>
Exception
If <SSACK> is failure, the length of the <CONDITIONLIST> must be zero.
11 Message Documentation
11.1 Intent — Equipment makers using SECS-II
messages must communicate the equipment-specific
details of each message to the host designer in order for
the host to properly adapt to the equipment. The details
are communicated in a document which will follow a
standard form in order to convey most clearly the
information required. The following form is presented
here to act as a guide for organizing the equipment-
specific details.
11.2 Standard Form SECS-II Document — The
standard form will contain three clearly labeled parts as
follows.
Part I — General Information
Part II — Message Summary
Part III — Message Detail
11.2.1 Part I will contain general information on the
following:
Manufacturer and product number
General description of equipment function
Intended function of interface
Software revision code
Changes from previous versions
11.2.2 Part II will contain two lists of all messages
understood and all messages sent by the equipment in
terms of their stream and function codes. The first list
will have pairs of columns: the first for the message
received and understood and the second for the message
sent in response. The second list will also have two
columns: the first for the message sent and the second
for the response understood. The message will be
identified using the format “SxxFyy,” where xx is the
stream number and yy is the function number. Each
transaction will be on a separate line. A “-” will
indicate that one of a pair is not included. All messages
not listed on the received side are implied to cause an
error message to the host. All messages not listed on
the sent side are assumed never to be sent from the
equipment. Since some messages can be sent in two
directions, the same message pair may appear in each
list with the sent and received orders interchanged. A
transaction listed in the standard as being allowed in
two directions does not have to be implemented in both
directions. This list will indicate which directions are
implemented.
11.2.3 Part III will contain the details for every
message listed in Part II. Messages that appear on both
the sent and received sides must be detailed separately.
The details shall include the following information on
the data in each message:
1. For each fixed item, all the values or strings either
understood or possible to send are listed along with
their meaning to the equipment.
2. For each variable item, the restriction on or
possible range of value or length of string.
3. Any other special interpretation of the message.
11.2.4 Each message so detailed must be clearly
labeled with its stream and function code.
12 Units of Measure
12.1 Intent — Certain SECS-II transactions require
specification of units of measure for data items passed
between equipment and host. The concept of units of
measure has been included as part of the SECS-II stan-
dard to enhance the ability of the host system to prompt
its human operators for proper information when gener-
ating process programs, and also to facilitate automated
SEMI E5-1104 © SEMI 1982, 2004 251
handling of process programs by host systems and auto-
mated handling of data reported to a host by equipment.
12.2 Units Symbols — Under SECS-II, a units symbol
is a text string of unspecified length which specifies the
physical significance of a numeric value. Units of
measure symbols under SECS-II may be either a SECS-
II recognized unit identifier, a SECS-II unit identifier
with prefix and/or suffix symbols, or an arithmetic
expression of SECS-II identifiers.
12.2.1 A SECS-II units identifier is a text string which
may be the full name, an abbreviation of the full name,
or a special character which is unique for a specific unit
of weight or measure. Identifier strings may consist of
upper or lower case alphabetic characters and numerals
or special characters of the ASCII character set. The
first character of an identifier may not be a numeral.
The case of alphabetic characters is significant (e.g., G
and g, the units symbols for Gauss and gram,
respectively).
12.2.2 A unit identifier may be nationally or inter-
nationally recognized, may be unique to the
semiconductor industry, or, due to the special
requirements of SECS-II, may be unique to this stan-
dard. Section 12.4 lists all units identifiers recognized
by SECS-II. For each identifier defined in Section
12.4, six pieces of information are provided. They are:
1. Unit — Full name of the unit of measure in
question.
2. Unit Identifier — SECS-II-recognized identifier for
the unit.
3. Prefix Allowed — Specifies whether or not the unit
identifier may be combined with a prefix symbol to
generate a unit identifier which is a decimal
multiple or submultiple of the base unit. Metric (or
SI) units are usually capable of accepting a prefix
symbol while English units may not.
4. Suffix Allowed — Specifies whether or not the
unit identifier may be concatenated with a numeric
suffix which provides additional information to the
meaning of the associated unit symbol. The
numeric suffix is composed of the ASCII digits 0
through 9 and represents a decimal value. This
meaning of the numeric value is symbol-dependent
and must be specified in the description section of
the unit symbol’s definition.
5. Equivalence — In those cases where a unit can be
expressed as an arithmetic expression (of simpler
units), this column will contain the expression of
simpler units. For those units which are non-
standard to either of the standard systems of units
of measure (English or SI), this column will
contain an expression which relates the non-
standard unit to the equivalent unit of the standard
units system. In either case, the expression
provided in this column may be substituted for the
corresponding SECS-II units identifier whenever
required.
6. Description — Additional information as may be
required to uniquely define the unit of measure in
question.
12.2.3 Any SECS-II identifier which Section 12.4
indicates as being capable of taking on a prefix symbol
may be appended to one of the prefix symbols shown in
Table 23, forming a new unit which is a decimal
multiple or submultiple of the base unit. A prefix
symbol may not be used alone. It must appear
concatenated to one of the identifiers in Section 12.4.
Finally, only one prefix symbol may appear before any
identifier. A units symbol such as “mus”
(micromillisecond) is not allowed. The proper symbol
is “ns” (nanosecond).
SEMI E5-1104 © SEMI 1982, 2004 252
Table 23
Prefix Name Multiplicative Factor Prefix Symbol
exa 10^18 E
peta 10^15 P
Tera 10^12 T
giga 10^9 G
mega 10^6 M
kilo 10^3 k
hecto 10^2 h
deka (deca) 10^1 da
deci 10^-1 d
centi 10^-2 c
milli 10^-3 m
micro 10^-6 u
nano 10^-9 n
pico 10^-12 p
femto 10^-15 f
atto 10^-18 a
12.2.4 Any SECS-II identifier which Section 12.4
indicates as being capable of taking on a suffix value
may have a numeric string appended to it. This decimal
value allows the user to identify one of a family of
symbol names with only the generic symbol name of
the family being defined in Section 12.4. The meaning
of a numeric suffix is dependent on the particular
symbol with which it is being used and must be defined
in the description section of the symbol definition.
12.2.5 Arithmetic expressions of units of measure
identifiers are recognized by SECS-II as units symbols
if they are formed by the following rules:
1. All units identifiers in the expression are SECS-II
units identifiers defined in Section 12.4 or SECS-II
prefixed units identifiers as defined above.
2. Exponentiation is denoted by a circumflex (^)
between the identifier to be operated on and the
exponent. Exponents may be positive or negative
values. A negative value is denoted by a unary
minus sign (-) between the circumflex and
exponent. For positive values, the exponent will
immediately follow the circumflex (A^2 or A^-2).
3. Multiplication of units identifiers is expressed by
an asterisk (*) positioned between the factors to be
multiplied (A*B).
4. Division of units identifiers is expressed by a slash
(/) positioned between the dividend and divisor.
Division may also be expressed as the product of
the dividend and the divisor with a negative
exponent (A/B or A*B^-1).
5. Parentheses may be used to specify the order in
which the arithmetic operations will be performed.
6. Within expressions or sub-expressions where
parentheses do not specify the order of operations,
exponentiation will be carried out first, followed by
left-to-right evaluation of all multiplication and
division that is (A*B^-2*30*C^2) is equivalent to
(((A/(B^2))*30)*(C^2)).
12.3 Compliance — For the units of measure
information to have any value and to be in compliance
with SECS-II, equipment and host system
manufacturers must ensure that only units symbols
allowed by SECS-II are used by their systems. In those
instances where SECS-II does not provide a units
symbol required for a particular application, the
manufacturer requiring the new symbol may submit a
proposal to the SEMI Communications Subcommittee
requesting the enhancement. A proposal must include
all the information provided by each entry of Section
12.4 as described above.
12.3.1 A proposal must undergo the full approval cycle
as prescribed by SECS-II for amending a standard
(acceptance by committee, balloting, etc.). As a result,
the proposal should be submitted as soon as possible, so
that sufficient time is available to complete the standard
amendment process and to notify all interested parties
of the change before the product requiring the new
symbol becomes available for use in a manufacturing
facility.
12.4 SECS-II Units of Measure Identifiers — All units
of measure symbols recognized by SECS-II are defined
in this section or are compound symbols based on the
identifiers defined here and formed by the rules speci-
fied in Section 12.2. Portions of the information
provided below have been obtained from ANSI/IEEE
260-1978, ANSI X3.5-1976, ISO 2955-1974(E),
Webster’s New World Collegiate Dictionary (copyright
1977), and the CRC Handbook of Chemistry and
Physics (52nd edition for 1971-1972).