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SEMI E5-1104 © SEMI 1982, 2004 156 10.16.3. 3.1 Figu res 9 and 10 summa rize the conve rsation pr otocol in the form of a flow chart. Since a single transmit i nquire/grant can be used f or one of t hree message funct io…

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SEMI E5-1104 © SEMI 1982, 2004 155
specified by the row and column count. The origin then
lies on one of the four corners of that array or in a
center location determined by the following formula:
row ~ or ~ column 1
2
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10.16.2.7.1 It is implicit in determining the center
location that the upper-left-hand corner of the area, in
the normal position, be counted as the first row and
column position. An equipment requesting a map
provides the origin location that it wants the map to be
based on before transmission. If the equipment does
not provide an origin, the host must provide a default
value. An equipment transmitting a map must provide
the origin with the map setup data.
10.16.2.8 Bin Code Equivalents — Bin code
equivalents is a list of bin codes that the receiving
equipment will process. (i.e., if a map contains codes 1
through 10 and the good die are bins 1 and 2, then bin
code equivalent list could indicate 1 and 2 if only the
good die categories were needed. These are the only
bin codes to which an equivalent will drive for its
respective process function.) In the case of X/Y
coordinate format, the locations transmitted will be only
those with the bin codes stated in the Bin Code
Equivalent list, unless the length byte is set to zero, in
which all of the bin codes in the map will be
transmitted.
10.16.2.9 Process Axis — The process axis is the axis,
either rows or columns, increasing or decreasing, and
the side of the map, (top, bottom, left, or right,
respectively) that the map data will originate from.
This is based on the coordinate system as described
under the General Rules section of this document.
10.16.2.10 ID Type — ID type indicates the
appropriate material ID type (i.e., wafer, cassette, or
film frame).
10.16.3 General Rules
10.16.3.1 Map Data Size — Stream 12 provides for the
transmission of a complete map regardless of size.
Equipment requiring segmented maps for transmission
or reception will not be able to use the Stream 12
functions to handle the complete conversation.
10.16.3.2 Orientation Conventions — The orientation
of a wafer presented for processing will differ from
equipment to equipment. Stream 12 specifies
conventions for expressing wafer orientation so that a
map can be translated from one geometric
representation to another.
10.16.3.2.1 The bottom of the wafer is the notch or the
line of the major flat. The orientation of a wafer is
measured in positive degrees clockwise (CW) from the
“normal” position. The “normal” position is where the
bottom of the wafer is closest to you when the wafer is
lying horizontally in front of you with the die side
facing up. The “normal” position has an orientation of
zero degrees. See Figure 6 for graphic representation of
wafer orientations.
10.16.3.2.2 The bottom of a film frame is also the
notch or the line of notches. Its orientation and
“normal” position are measured in the same manner as
for wafers. See Figure 7 for examples of bottoms of
film frames.
10.16.3.2.3 The orientation of an unmounted wafer
presented for processing is given by the parameter
FNLOC, Flat/Notch LOCation.
10.16.3.2.4 The ultimate orientation of a wafer
presented for processing after it has been mounted on a
film frame is the cumulative rotation of the wafer from
the “normal” position on the film frame and the rotation
of film frame as it is presented to the equipment. This
is determined by the sum of the parameters FNLOC and
FFROT, Film Frame ROTation. It is possible for an
application to represent the ultimate orientation of a
wafer in one of these parameters only and pass the other
parameter as zero length.
10.16.3.2.5 Figure 6 shows wafers oriented at 270
degrees with respect to the bottoms of a metal and
round film frame. If one of these film frames were
presented to an equipment rotated 90 degrees clockwise
(CW), (bottom facing the left edge of the page), the
ultimate orientation of the wafer would be zero degrees.
10.16.3.2.6 In the case where either FNLOC or FFROT
are unknown or irrelevant information, a zero-length
data item is transmitted, and the item will be ignored by
the application. One of the items must exist.
10.16.3.3 Coordinate Axis System — The coordinate
axis orientation is shown in Figure 8, Section A. The
assumption is that the “X” or “column” coordinates
increase to the right of the “Y-axis” and the “Y” or
“row” coordinates increase above the “X-axis.” In
describing the physical wafer it is also given that the
coordinate axis orientation never rotates. The wafer
moves or rotates within the coordinate axis system.
The origin within the array describing the wafer’s
coordinate system must be in one of five locations on
that array (the center, upper-left, lower-left, upper-right,
or lower-right corner of the array).
SEMI E5-1104 © SEMI 1982, 2004 156
10.16.3.3.1 Figures 9 and 10 summarize the conversation protocol in the form of a flow chart. Since a single
transmit inquire/grant can be used for one of three message function pairs, the application is required to examine
MAPFT, is received as part of the map setup data to determine the appropriate function to follow. If the appropriate
function is not transmitted, the conversation is aborted and the error is reported using the appropriate error reporting
stream and function.
Stream,Function Name (Mnemonic) Direction
S12,F0 Abort Transaction (S12F0) S,H<->E
Description
Same form as S1F0.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S12,F1 Map Set-up Data Send (MSDS) S,H<-E,reply
Description
Used to send all of the map set-up data common to all formats and required to link the data map with the physical wafer.
Structure
L,15
1. <MID>
2. <IDTYP>
3. <FNLOC>
4. <FFROT>
5. <ORLOC>
6. <RPSEL>
7. L,n
1. <REFP
x
REFP
y
>
.
.
n. <REFP
x
REFP
y
>
8. <DUTMS>
9. <XDIES>
10. <YDIES>
11. <ROWCT>
12. <COLCT>
13. <NULBC>
14. <PRDCT>
15. <PRAXI>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 157
Stream,Function Name (Mnemonic) Direction
S12,F2 Map Set-up Data Acknowledge (MSDA) S,H->E
Description
Acknowledgment of receipt of complete set of map set-up parameters.
Structure
<SDACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F3 Map Set-up Data Request (MSDR) S,H<-E,reply
Description
Used to request set-up data from the host for the product ready to be processed at the equipment (common to all formats).
Structure
L,9
1. <MID>
2. <IDTYP>
3. <MAPFT>
4. <FNLOC>
5. <FFROT>
6. <ORLOC>
7. <PRAXI>
8. <BCEQU...>
9. <NULBC>
Exception
None