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SEMI M29-1296 © SEMI 1996, 2003 4 5.3 Box Top 5.3.1 Outer Dimensi ons — Outer dimensions of a box top are show n in Figure 4 and Table 2. Figure 4 Outer Dimens ions of Box T op 5.3.2 Supporti ng Rib and Poka-yoke Rib — P…

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5.2.2 Orientation Mark — The orientation mark indicating the front side of a cassette is shown in Figure 3 and
Table 1. This supports a user to manually set a cassette on a box bottom or a platform of equipment.
Figure 3
Orientation Mark of Shipping Cassette
Table 1 Dimensions of Shipping Cassette
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
Corresponding to
SEMI E1.9
C1 166 ± 0.5 ← r5
C2 153.5 ± 0.5 ← r6
C3 224 ± 1 ← x6 + x6
C4 152 ± 0.5 ← x5 + x5
C5 155 ± 0.5 ← y16
C6 139.5 ± 0.5 ← y23
C7 94 ± 0.5 ← y15
C8 308.5 ± 1 ← r6 + y16
C9 31 ± 0.5 ← z8 - z1
C10 3 ± 0.5 ←
C11 182 ± 1 302 ± 1.5
C12 29.5 ± 0.5 ← z18
C13 179 ± 3 299 ± 4
C14 10 ± 1 ←
C15 11 ± 1 ←
C16 5 ± 0.5 ←
C17 5 ± 0.5 ←
C18 51 ± 0.5 ← x1
C19 55 ± 0.5 ←
C20 4 ± 0.5 ←
C21 9 ± 0.5 ←
C22 20 ± 0.5 ←
C23 70 ± 10 ←
C24 30 ± 10 ←
C25 90 ± 10 ←
C26 30 ± 10 ←
C27 30 ± 10 ←
C28 55 ± 10 ←
SEMI M29-1296 © SEMI 1996, 2003 4
5.3 Box Top
5.3.1 Outer Dimensions — Outer dimensions of a box top are shown in Figure 4 and Table 2.
Figure 4
Outer Dimensions of Box Top
5.3.2 Supporting Rib and Poka-yoke Rib — Positions of a supporting rib for supporting a shipping cassette inside a
box top and a poka-yoke (fool-proof) rib for avoiding setting the box top in a wrong orientation are shown in Figure
5 and Table 2.
Figure 5
Supporting Rib and Poka-yoke Rib of Box Top
5.3.3 Gasket Area — It is required to provide a gasket in an area shown in Figure 6 and Table 2 if the gasket is
provided.
5.3.4 Clamping Indent — Figure 7 and Table 2 show dimensions of a concave part for receiving a clamp. Refer to
Figure 8 and Table 2 for horizontal positions.
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Figure 6
Gasket Area
Figure 7
Clamping Indent
5.3.5 Top Rib and Orientation Mark — Dimensions of a top rib to avoid collapsing when shipping boxes stacked,
and the position of an orientation mark are shown in Figure 8 and Table 2. In addition, since this rib makes a pair
with a bottom rib, and is a poka-yoke rib, the shipping boxes can be stacked in a correct direction.
Figure 8
Top Rib and Orientation Mark
Table 2 Dimensions of Box Top
Unit: mm