semi合集-English.pdf - 第384页

SEMI E52-0703 © SEMI 1995, 2003 20 Code Gas Name Symbol Formula Synonym Ref 21 Bromine Br2 Br 2 2 278 Silicon tetrabromide Br4Si Br 4 Si SiBr4; Tetrabromosilane; Silicon (IV) bromide 2 76 Bromine Trif luoride BrF3 BrF 3 …

100%1 / 7923
SEMI E52-0703 © SEMI 1995, 2003 19
Code Gas Name Symbol Formula Synonym Ref
153 Trimethylindium C3H9In (CH
3
)
3
In TMIn 3
314 Trimethylisoxazole C6H9NO CH
3
CH=CHCH=CHCON
H
2
3,4,5-Trimethylisoxazole,
Sorbamide
3
133 Trimethylphosphite C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine 2
132 Trimethylphosphorous C3H9P (CH
3
)
3
P Trimethylphosphine, TMP 2
303 Trimethylvinylsilane C5H12Si C
5
H
12
Si Vinyltrimethylsilane;
CH2=CHSi(CH3)3
2
328 Trisilane Si3H8 Si
3
H
8
Silicopropane; Trisilicane; H
8
Si3 2
159 Tritium T2 H
3
2
T2 2
273 Tungsten Hexacarbonyl C6O6W W(CO)
6
1
121 Tungsten Hexafluoride WF6 WF
6
2
123 Uranium Hexafluoride UF6 UF
6
2
56 Vinyl Bromide C2H3Br CH
2
=CHBr 1
55 Vinyl Chloride C2H3Cl CH
2
=CHCl Chloroethylene 1
51 Vinyl Fluoride C2H3F H
2
C=CHF 1
20 Water Vapor H2O H
2
O 2
6 Xenon Xe Xe 1
324 Xenon difluoride XeF2 XeF
2
F
2
Xe; Xenon fluoride 2
263 Xylene m- C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene 3
264 Xylene p- C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene 3
330 Zinc Zn Zn UN 1383 2
8 Gas Table Sorted by Symbol
Table 3 Gases Sorted by Symbol
Code Gas Name Symbol Formula Synonym Ref
8 Air Air 1
226 Aluminum Trifluoride AlF3 AlF
3
2
4 Argon Ar Ar 1
242 Arsenic Tribromide AsBr3 AsBr
3
2
216 Arsenic Trichloride AsCl3 AsCl
3
2
195 Arsenic Trifluoride AsF3 AsF
3
2
96 Arsenic Pentafluoride AsF5 AsF
5
2
35 Arsine AsH3 AsH
3
1
196 Arsenic Triiodine AsI3 AsI
3
2
248 Tetrachlorodiborane B2Cl4 B
2
Cl
4
2
249 Tetrafluorodiborane B2F4 B
2
F
4
2
58 Diborane B2H6 B
2
H
6
1
198 Borazine B3N3H6 H
3
B
3
N
3
H
3
14
239 Pentaborane(11) B5H11 B
5
H
11
2
142 Pentaborane B5H9 B
5
H
9
2
79 Boron Tribromide BBr3 BBr
3
1
70 Boron Trichloride BCl3 BCl
3
1
48 Boron Trifluoride BF3 BF
3
1
SEMI E52-0703 © SEMI 1995, 2003 20
Code Gas Name Symbol Formula Synonym Ref
21 Bromine Br2 Br
2
2
278 Silicon tetrabromide Br4Si Br
4
Si SiBr4; Tetrabromosilane; Silicon
(IV) bromide
2
76 Bromine Trifluoride BrF3 BrF
3
1
116 Bromine Pentafluoride BrF5 BrF
5
1
279 Tantalum (V) ethoxide C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5 2
146 Tributylaluminum C12H27Al (CH
3
CH
2
CH
2
CH
2
)
3
Al TBAl 3
262 Triisobutylaluminum C12H27Al (C
4
H
9
)
3
Al 2
194 Titanium Tetraisopropoxide C12H28OTi Ti(OC
3
H
7
)
4
1
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
281 Diphenylmethan-4,4' -
diisocyanat
C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
282 Tetrakis(diethylamino)titanium C16H40N4Ti C
16
H
40
N
4
Ti 2
130 Dibromotetrafluorethane C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2 1
105 Bromotrifluoroethylene C2BrF3 CF
2
CFBr 1
125 Dichlorotetrafluoroethane C2Cl2F4 F
3
CCCl
2
F F-114, R-114 1
126 Trichlorotrifluoroethane C2Cl3F3 CF
2
ClCCl
2
F F-113, R-113 1
168 Tetrachloroethylene C2Cl4 Cl
2
C=CCl
2
Perchloroethylene or Ethylene,
Perchloro
2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
119 Chloropentafluoroethane C2ClF5 ClCF
2
CF
3
F-115, R-115 1
260 Trifluoroacetonitrile C2F3N F
3
CCN 2
94 Tetrafluorethylene C2F4 F
2
C=CF
2
1
118 Hexafluoroethane C2F6 F
3
CCF
3
F-116, Perfluoroethane 1
42 Acetylene C2H2 HC=CH Ethyne 1
191 Dichloroethylene -trans C2H2Cl2 CHCl=CHCl 2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
64 Difluoroethylene C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride 1
156 Tetrafluoroethane C2H2F4 CH
2
FCF
3
R-134A, F-134A 2
56 Vinyl Bromide C2H3Br CH
2
=CHBr 1
55 Vinyl Chloride C2H3Cl CH
2
=CHCl Chloroethylene 1
112 Trichloroethane C2H3Cl3 CH
3
CCl
3
TCA, Methylchloroform 2
103 Difluorochloroethane C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B 1
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
51 Vinyl Fluoride C2H3F H
2
C=CHF 1
348 Ethane,1,1,1-Trifluoro C2H3F3 C
2
H
3
F
3
HFC-143a 3
173 Acetonitrile C2H3N CH
3
CN 2
38 Ethylene C2H4 CH
2
=CH
2
Ethene 1
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
82 Difluoroethane C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A 1
45 Ethylene Oxide C2H4O C
2
H
4
O Acetaldehyde 1
283 Acetic acid C2H4O2 CH
3
COOH Ethanoic acid; UN 2789; 2
75 Ethyl Chloride C2H5Cl C
2
H
5
Cl Chloroethane orEthane, Chloro or
Ethyl Chloride
1
SEMI E52-0703 © SEMI 1995, 2003 21
Code Gas Name Symbol Formula Synonym Ref
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
54 Ethane C2H6 CH
3
CH
3
1
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
73 Dimethyl Ether C2H6O CH
3
OCH
3
Methylether 1
136 Ethanol C2H6O CH
3
CH
2
OH 2
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
135 Dimethylzinc C2H6Zn (CH
3
)
2
Zn 3
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
85 Dimethylamine C2H7N (CH
3
)
2
NH 1
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
137 Halothane C2HBrClF3 BrClHCCF
3
6
186 2,2 Dichloro1,1,1
Trifluoroethane
C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123 2
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
223 Fluoroacetylene C2HF FC=CH 2
155 Pentafluoroethane C2HF5 CF
3
CHF
2
F-125, R-125 9
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
138 Hexafluoropropylene C3F6 CF
3
CF=CF
2
Perfluoropropylene or Propylene,
Perfluoro
1
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
128 Perfluoropropane C3F8 CF
2
(CF
3
)
2
1
287 Trimethoxy silane C3H10O3Si C
3
H
10
O
3
Si 2
190 Trimethyl Silane C3H10Si (CH
3
)
3
SiH 2
165 Trimethylaminealane C3H12AlN (CH
3
)
3
NAlH
3
TMAA 11
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
66 Allene C3H4 CH
2
=C=CH
2
Propadiene 1
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
289 Acrylic acid C3H4O2 C
3
H
4
O
2
2-Propenoic acid;
CH2=CHCOOH
2
290 Trifluoropropane C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane;
CH3CH2CF3
2
61 Cyclopropane C3H6 C
3
H
6
1
69 Propylene C3H6 CH
3
CH=CH
2
Propene 1
81 Methyl Vinyl Ether C3H6O CH
3
OCH=CH
2
1
184 Acetone C3H6O CH
3
COCH
3
2