semi合集-English.pdf - 第5060页
SEMI M21-0304 © SEMI 1992, 2004 5 Figure 3 On-Centerline Element Numbering
SEMI M21-0304 © SEMI 1992, 2004 4
Figure 1
Array Centerlines
Figure 2
Tiling
SEMI M21-0304 © SEMI 1992, 2004 5
Figure 3
On-Centerline Element Numbering
SEMI M21-0304 © SEMI 1992, 2004 6
Figure 4
Tiled Element Numbering
Figure 5
All Elements Numbered