semi合集-English.pdf - 第4475页
SEMI D17-0200 © SEMI 1998, 2000 10 Figure 4 Cassette Vertical Dimensions
SEMI D17-0200 © SEMI 1998, 20009
Figure 3
Cassette Bottom Domain
SEMI D17-0200 © SEMI 1998, 2000 10
Figure 4
Cassette Vertical Dimensions
SEMI D17-0200 © SEMI 1998, 200011
±
±
±
±
±
±
±
Figure 5
Cassette Physical Alignment Interface – Type A
Coupling Pin Shape