semi合集-English.pdf - 第3780页
SEMI F6-92 © SEMI 19 92 4 10.1 SEMI S4, Safety Guideline for t he Segregation/Sep aration o f Gas Cylin ders Contained in Cabine ts 10.2 Materials Safe ty Data Sheets 10.3 NFPA Fire P rotection Guide o n H azardous Mater…
SEMI F6-92 © SEMI 19923
6.3 Those substances that fall into the following
categories:
6.3.1 Any HPM’s which have a material hazard index
(MHI) value equal to or greater than 500,000.
6.3.2 Highly toxic gas.
6.3.3 Pyrophorics.
6.3.4 Substances with unknown, but potentially high
toxicities (e.g., organometallics).
6.3.5 Materials with an NFPA 704 reactivity rating of
3 or 4.
6.3.6 Any corrosives that are not contained in inert
process piping.
6.4 Where piping containing HPM ’s is installed in a
manner to conceal it from view.
6.5 Where piping containing HPM ’s is installed in
uncontrolled or unventilated areas such as drop ceilings
or behind walls.
6.6 Where required by UBC H-6 or other existing
codes.
6.7 Where there is any reasonable possibility of a leak
in the primary containment due to normal wear and
tear, possible abuse, or corrosive attack to the piping on
the inside or exterior.
7 Containment Methods
The method of containment may take many forms
provided that the method is sound in engineering
design. This design should be in conformance to
nationally recognized codes and standards as well as to
the requirements of local safety jurisdictions.
8 Materials of Construction
8.1 Chemical Compatibility — If there is a possibility
that the HPM, or its reaction products, is corrosive, to
any extent, to the secondary containment, one should
develop a procedure to verify the integrity of the
containment system. This verification procedure need
only be performed in the event that the HPM, or its
reaction products, contacts the containment (see Section
9).
8.2 Fire Resistance — If walls are used as the
secondary containment system, they should be
constructed of materials resistant of fire. The fire rating
of the secondary containment should be as follows:
8.2.1 Two hour rating for pyrophorics;
8.2.2 One hour rating for all others.
9 Design Requirements
9.1 Design Pressure — The system should be
designed to provide secondary containment with the
ability to withstand the pressure of the entire volume of
the potential leaking source without leakage.
9.1.1 Closed secondary containment systems should
have sufficient design pressure to withstand the
pressure of the entire contents of the source of the
HPM. The design safety factor must be consistent with
ANSI B31.3.
9.1.2 Open secondary containment systems should
have sufficient design pressure to withstand the release
at full tank pressure or the entire contents of the HPM
released within a time of two minutes.
9.1.3 Special consideration should be given to the
containment of pyrophorics. Some pyrophorics can
develop considerable explosive pressure. The
elimination of oxygen from the annulus of a
containment system should be considered in lieu of
explosive pressure data.
9.2 Resistance to External Forces — The method of
construction of secondary containment systems should
be sufficient to withstand:
9.2.1 Normal physical abuse found in the industrial
workplace.
9.2.2 Seismic zone activity as shown in the UBC
(Uniform Building Code) or other applicable codes.
9.3 Leak Integrity — The system should be designed
to provide secondary containment with sufficient leak
integrity to prevent exceeding the PEL of the HPM in
uncontrolled work areas.
9.3.1 Primary piping should be leak tested in
accordance with SEMI F1.
9.3.2 Closed secondary containment systems should
have the same leak integrity as the primary containment
except the closed secondary containment systems
should be leak tested with the annulus pressurized to 2
times the maximum operating pressure with argon
containing at least 10% helium. There should be no
drop in pressure for a period of 12 hours.
9.3.3 Open secondary containment systems should be
leak tested to the same criteria as closed secondary
containment systems per 9.3.2 above.
10 Separation of HPM’s
A single secondary containment may be used to contain
more than one HPM provided that those HPM’s are not
reactive with any other HPM in the common
containment. Documents that should be considered for
proper separation of HPM’s include:
SEMI F6-92 © SEMI 1992 4
10.1 SEMI S4, Safety Guideline for the
Segregation/Separation of Gas Cylinders Contained in
Cabinets
10.2 Materials Safety Data Sheets
10.3 NFPA Fire Protection Guide on Hazardous
Materials
11 Cross Connections
There should be no mechanical cross connection of
secondary containment systems with other systems not
designed specifically for the secondary containment of
the particular HPM’s.
12 Monitoring
The annulus should be monitored for leakage of the
primary system in accordance with the following:
12.1 The sensitivity of the detection system should be
sufficient to detect leakage at 1/2 Threshold Limit
Values (TLV’s) at the discharge to treatment of an open
secondary containment system.
12.2 Detection of leakage into the annulus of the
secondary containment system should include alarm
systems.
12.3 Detection methods may include:
12.3.1 Direct detection of the HPM or its reaction
products (open secondary containment system).
12.3.2 Pressure decay method (closed secondary
containment system).
12.3.3 Vacuum decay method (closed secondary
containment system).
13 Leak Management
The secondary containment system should be designed
to control and direct leaking materials. Control of
HPM’s may consist of dilution, absorption,
incineration, scrubbing, venting, or those methods
deemed safe and suitable to the governing authorities
responsible for the facility. The initiation of the
secondary containment alarm system should be
automated. This system should automatically institute
the management of the leaking HPM in the event of a
breach of the primary system.
14 Periodic Testing - After In stallation
14.1 Secondarily contained piping systems must be
inspectable. The method of inspection must be able to
reveal the current strength and leak integrity of the
primary and secondary containment systems.
14.2 The secondary containment must be periodically
leak tested in accordance with the criteria set forth in
Section 9.3 of the above. Structural testing of both the
process piping and the secondary containment should
be conducted to the maximum pressure specified in
Section 9.1 of the above.
14.3 Any secondarily contained piping system failing
the periodic inspection should be repaired or replaced
immediately.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F7-92 © SEMI 1992, 19991
SEMI F7-92 (Reapproved 0299)
TEST METHOD TO DETERMINE THE TENSILE STRENGTH OF TUBE
FITTING CONNECTIONS MADE OF FLUOROCARBON MATERIALS
This test method was technically reapproved by the Facilities Committee and is the direct responsibility of the
North American Facilities Committee. Current edition approved by the North American Regional Standards
Committee in October 1998. Initially available on www.semi.org February 1999; to be published February 1999.
Originally published in 1992.
1. Purpose
1.1 This method provides a uniform procedure to
determine the tensile strength of tube fitting
connections made of fluorocarbon materials.
2. Scope
2.1 This method can be used to characterize tube
fitting connections on the basis of test data developed
under the conditions described herein, but the results
are not intended to imply a performance rating.
2.2 Tube defined in this method has a circular cross
section and is made of fluorocarbon materials.
2.3 All parts of the tube fittings tested by this
method in contact with the internal fluid are made of
fluorocarbon materials.
2.3.1 Parts such as a nuts or grippers are not limited
to being made of a fluorocarbon material.
2.4 Only the seal between the tube and tube fitting
being evaluated is within the scope of this document.
All other, threaded seals are beyond the scope of this
document.
2.5 When using this method for making
comparisons among various tube fittings and/or
manufacturers, the user must be specific in the
selection of the tube and tube fittings to be evaluated.
2.6 The International System of Units (SI) is used as
the standard unit of measure in this document. The
U.S. Customary units are in parentheses for reference
purposes only and have been rounded to the nearest
whole value.
3. Referenced Documents
3.1 ASTM Standards
1
D3307 PFA
Fluorocarbon Molding and Extrusion
Materials
D3296
Standard Specification for FEP
Fluorocarbon Tube
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
4. Summary of Method
4.1 Subject tube fitting connections made of
fluorocarbon materials to extreme tensile forces.
5. Significance and Use
5.1 In the manufacturing of semiconductor products,
many types of hazardous chemicals and solvents are
required. As a result, tubing and various fitting
designs of fluorocarbon materials (which are
chemically resistant to these fluids) are used to
transport those fluids. It is important to control the
testing process when evaluating various fitting
designs, so that accurate comparisons of the tensile
strength can be made.
5.2 It is the intent of this method to provide a
procedure in which the tensile force will be applied to
tube fitting connections made of fluorocarbon
materials. By using this method, accurate
comparisons of various tube fitting designs can be
achieved.
5.3 The results obtained when using this method are
applicable only to conditions that specifically
duplicate the procedures used within this method.
5.4 When using this test method, it is assumed that
the test specimens are truly representative of the
material and manufacturing process specified for that
product. Departure from this assumption could
introduce discrepancies that are greater than those
introduced by departure from the details of the
procedure outlined in this method.
6. Terminology
6.1 characterize To describe the quality of.
6.2 failure Tube separation from a tube fitting
connection or tearing of the tube.
6.3 subject To expose to.
6.4 tensile Longitudinal, so as to lengthen the test
object.