semi合集-English.pdf - 第5533页

SEMI P10-0705 © SEMI 1990, 2005 28 <xs:sequence minOccurs="0"> <xs:element name="PriceUnits" type="xs:string"/> </xs:sequence> <xs:sequence minOccurs="0"> &…

100%1 / 7923
SEMI P10-0705 © SEMI 1990, 2005 27
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartMaskSet"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndMaskSet"/>
</xs:complexType>
<xs:complexType name="MaskSetOptionsType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BusinessContact" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BusinessAddress" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BusinessPhone" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BusinessFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BusinessEmail" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BillingContact" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BillingAddress" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BillingPhone" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BillingFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BillingEmail" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DesignRule" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FabTechnology" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="WaferFab" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CustomerSpec" type="xs:string"/>
<xs:element name="CustomerSpecRevision"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Waiver" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="WaiverOverride" type="xs:string"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 28
<xs:sequence minOccurs="0">
<xs:element name="PriceUnits" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SecurityClass" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Qs9000" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EngineeringContact"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EngineeringAddress"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EngineeringPhone"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EngineeringFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EngineeringEmail"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippingContact" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingAddress" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingPhone" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippingEmail" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingMethod" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RepairsAuthorized"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippableData"
type="ShippableDataType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Data" type="DataType"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 29
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="StandardPattern"
type="StandardPatternType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MaskSetName" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="MaskSetVersion"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="OrderId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="AdditionalMaskSetInfo"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartMaskSetOptions"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndMaskSetOptions"/>
</xs:complexType>
<xs:complexType name="DataType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataLocation" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataFormat" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="DxfAngle" type="xs:integer"/>
<xs:element name="DxfUnit" type="xs:integer"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataDensity" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataFileSize" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataCompression" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataConsolidation"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataEncryption" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">