semi合集-English.pdf - 第1494页

SEMI E30.5-0302 © SEMI 2001, 2002 22 CPNAME CPVAL Description Ran g e Format PROCESS-BUILD- GROUP(continues) 6. L, 2 1. CP-SIT E-DEF-LIST 2. SI TE-TAB LE -N AME 7. L, 2 1. CP-SITEL IST 2. L, n 1. CP-SITENA ME : n. 8. L, …

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SEMI E30.5-0302 © SEMI 2001, 200221
CPNAME
CPVAL
Description Range Format
PROCESS-BLD-GROUP L, n
1. L, 2
1. CP-PPBUILDID
2. PPBUILDGROUPID
2. L, 2
1. CP-PPNAME
2. PPNAME
3. L, 2
1. CP-LOTID
2. LOTID
4. L, 2
1. CP-AUTOSTART
2. START
5. L, 2
1. CP-MATERIALLIST
2. L, n
1. CP-SLOTID
:
n.
or
1. CP-WAFERID
2. L, n
:
n.
n ≥ 2
List of n data
items
SEMI E30.5-0302 © SEMI 2001, 2002 22
CPNAME
CPVAL
Description Range Format
PROCESS-BUILD-
GROUP(continues)
6. L, 2
1. CP-SITE-DEF-LIST
2. SITE-TABLE-NAME
7. L, 2
1. CP-SITELIST
2. L, n
1. CP-SITENAME
:
n.
8. L, 2
1. CP-ALIGN-DEF-LIST
2. ALIGN-TABLE-NAME
9. L, 2
1. CP-ALIGNLIST
2.L, n
1. CP-ALIGN-NAME
:
n.
10. L, 2
1. CP-ELEMENTLIST **
2. L, n
1. CP-ELEMENTID
:
n.
**CP-ELEMENTLIST is required when using the
SEMI M21 coordinate system in the definition of an
ALIGNNAME or SITENAME .
10. L, 2
1. CPNAME
supplier defines Process
Program Variable Parameters
2. CPVAL
CP-PPNAME is required, CP-SLOTLIST, CP-
SITELIST, and CP-ALIGNLIST are optional.
SEMI E30.5-0302 © SEMI 2001, 200223
12.7 Remote Commands and Associated Host Command Parameters
This table describes the allowable
command parameters (CPNAME) for each remote command (RCMD). Equipment must support all parameters.
The column marked Req/Opt, specifies which parameters are required to be sent by the host and which parameters
may be optionally sent by the host.
Table 13 Remote Command and Associated Host Command Parameters Table
Parameter(s)Remote
Command
CPNAME Req/opt Description
ABORT CP-ABORT-LEVEL O
CLEANUP CP-LOCATIONID
CP-SLOTID
O
O
Location and SLOT may be used to define
a different cassette / slot destination for
the substrates.
NEXT-MATERIAL CP-LOCATIONID
CP-SLOTID
O
O
If no command parameters are specified,
then the substrate is returned to its original
source carrier and slot.
If a CP-SLOT command parameter is
specified, then the substrate is placed in
that slot of its original source carrier.
If a CP-LOCATIONID command
parameter is specified, then the substrate is
placed in an available slot of the carrier at
the specified location.
If both CP-SLOT and CP-LOCATION
command parameters are specified, then
the substrate is placed in specified slot of
the carrier at the specified location.
PAUSE None N/A None
PP-ASSIGN CP-PRIORITY
CARRIERBLD*
O
R
* More than one CARRIERBLD may be
specified. There may be more than one
PROCESS-BLD-GROUP in each
CARRIERBLD.
PP-SELECT CARRIERBLD* R * More than one CARRIERBLD may be
specified. There may be more than one
PROCESS-BLD-GROUP in each
CARRIERBLD.
PP-UNASSIGN CP-LOCATIONID
CP- CARRIERID
R*
R*
* At least one is required.
PP-UPDATE CP-SLOTLIST
CP-SITELIST
CP-ALIGNLIST
R*
R*
R*
* At least one is required. By default use
the current active input port.
RESTAGE CP-LOCATIONID R* * Some equipment may not support this
feature.
RESUME None N/A None
START None N/A None
STOP None N/A None