semi合集-English.pdf - 第4923页
SEMI M9-0999 © SEMI 1986, 1999 8 Figures 4A an d 4B Both Diagram s Show a GaAs Wafer with S urface Orienta tion B and Flat Op tion Dove-Tail
SEMI M9-0999 © SEMI 1986, 19997
Figures 3A and 3B
Both Diagrams Show a GaAs Wafer with Surface Orientation B and Flat Option V-Groove
SEMI M9-0999 © SEMI 1986, 1999 8
Figures 4A and 4B
Both Diagrams Show a GaAs Wafer with Surface Orientation B and Flat Option Dove-Tail
SEMI M9-0999 © SEMI 1986, 19999
Figure 5
A GaAs Wafer with the Same Orientation as Figure 3,
but with a Few Degrees of Orthogonal Misorientation