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SEMI C3.22-1000 © SEMI 1983, 2004 6 Diagram B NOTICE: These standards do not purport to address safety issues , if any, associat ed with th eir use. It is the responsibility of the user of these standards to estab lish a…

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SEMI C3.22-1000 © SEMI 1983, 2004 5
Buret
Diagram A
SEMI C3.22-1000 © SEMI 1983, 2004 6
Diagram B
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
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Copyright by SEMI® (Semiconductor Equipment and Materials
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SEMI C3.23-1000 © SEMI 1984, 2004 1
SEMI C3.23-1000 (Withdrawn 1104)
STANDARD FOR OXYGEN (O
2
), 99.98% QUALITY
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published in 1984; previously published in 1995.
NOTICE: This document was balloted and approved
for withdrawal in 2004.
1 Description
1.1 Oxygen is a colorless, odorless, and oxidizing gas.
It supports combustion.
2 Specifications
QUALITY: 99.98%
Impurities
Maximum Acceptable
Level (ppm)*
Argon (Ar) 100
Carbon Monoxide (CO) 1
Carbon Dioxide (CO
2
) 1
Krypton (Kr) 10
Nitrogen (N
2
) 30
Nitrous Oxide (NO) 1
Particles **
Total Hydrocarbons expressed as
Methane (THC)
1
Water (H
2
O) (v/v) 1
TOTAL IMPURITIES 146
*An analysis of significant figures has not been considered. The
number of significant figures will be based on analytical accuracy and
the precision the provided procedure.
** To be determined between supplier and user.
3 Physical Constants (for information only)
Metric Units US Units
Molecular weight 31.999 31.999
Boiling point at 1 atm -183°C -297.4°F
Density of gas at 25°C
(77°F) and 1 atm
1.309 kg/m
3
0.082 lb/ft
3
Specific gravity of gas at
21.1°C (70°F) and 1 atm
(air = 1)
1.1049 1.1049
Density of liquid at boiling
point
1142 kg/m
3
71.27 lb/ft
3
4 Analytical Procedures (See Notes 1, 2)
4.1 Argon — This procedure is for the determination
of argon using a gas chromatograph with a thermal
conductivity detector.
4.1.1 Detection Limit — 25 ppm (mole/mole)
4.1.2 Instrument Parameters
4.1.2.1 Column: 3.6 m (12 ft) by 3.2 mm (1/8 in)
stainless steel tubing packed with molecular sieve 5A,
60/80 mesh, washed to remove fines and activated at
300°C for 24 hours or equivalent.
4.1.2.2 Carrier Flow: 45 mL/min helium.
4.1.2.3 Sample Volume: 1–3 mL.
4.1.2.4 Temperatures:
Detector 40°C
Column -50°C
4.1.3 Calibration Standard — 50–150 ppm (mole/
mole) argon, balance helium.
4.1.4 Operating Procedure
4.1.4.1 With the valve in Position A, load the sample
loop. Switch the valve to Position B to inject the sample
into the column. After the argon has been detected,
switch the valve back to Position A to backflush the
oxygen from the column. Record the peak area and
retention time.
4.1.4.2 Inject oxygen sample to be tested in the same
manner as in 4.1.4.1. Record the retention times and
peak areas.
4.1.4.3 Repeat 4.1.4.1.
4.1.4.4 Calculate the concentration of argon in the
sample, using the formula below. The result may not
exceed the specification Section 2 of this Standard.
Sample of
ionConcentrat
Standard of
ionConcentrat
AreaPeak Standard
AreaPeak Sample
4.2 Carbon Monoxide — This procedure is for the
determination of carbon monoxide using dual beam
optical non-dispersive infrared spectrophotometry.
4.2.1 Detection Limit — 0.2 ppm (mole/mole)
4.2.2 Instrument Parameters
4.2.2.1 Detector: “Luft” type or equivalent
4.2.2.2 10" Infrared Gas Cell or gas cell with
equivalent sensitivity