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SEMI E133-0705 © SEMI 2004, 2005 3 5.2 Definitions 5.2.1 Advanced Process Control (APC) 1 — the manufacturing disci pline for apply ing control strategies and/ or employi ng analysis and computatio n mechanisms to recomm…

SEMI E133-0705 © SEMI 2004, 2005 2

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 The proposed PCS standards will not focus on:

 Low-level communication mechanisms (for example, hardware connection schemes, transport layer software,

etc.) between PCS functional groups,

 Methodology for implementing actual equipment or factory level control strategies,

 Specifying internal structure or implementation methods of PCS functional groups,

 Capabilities of complementary applications (recipe management, data collection, engineering analysis, data

storage, scheduling, change control, …),

 The management of information and collaboration between functional groups. This is left to implementation,

 Communications within equipment or within factory systems,

 Determination of the proper control algorithm, model, or runtime selectable behavior. It is optional for a PCS

function to contain “context matching”,

 The creation and management of Process Control System Jobs, or

 Defining test procedures required for validating the standard.

4 Referenced Standards and Documents

4.1 SEMI Standards

SEMI E81 — Provisional Specification for CIM Framework Domain Architecture

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E125 — Provisional Specification for Equipment Self Description (ESD)

SEMI E134 — Specification for Data Collection Management

4.2 Other Sources

The Unified Modeling Language Reference Manual, James Rumbaugh, Ivar Jacobson, Grady Booch, 1999 / 0-201-

30988-X / Addison Wesley Professional.

The Unified Modeling Language User Guide, Grady Booch, James Rumbaugh, Ivar Jacobson, 1999 / 0-201-57168-4

/ Addison Wesley Professional.

Object-Oriented Modeling and Design, Prentice Hall, Englewood Cliffs, NJ, 1991 by James Rumbaugh, et. al.

Equipment Engineering Capabilities (EEC) Guidelines (Phase 2.0), Version 2.5, International SEMATECH, July

2002.

IEC 61158-5, “Digital data communications for measurement and control – Fieldbus for use in industrial control

systems – Part 5: Application layer service definition,” Final Draft International Standard, 2003.

ISO 8601 — Data elements and interchange formats—Information interchange—Representation of dates and times,

International Organization for Standardization, (December 2000).

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations & Acronyms

5.1.1 XML — eXtensible Markup Language

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5.2 Definitions

5.2.1 Advanced Process Control (APC)

— the manufacturing discipline for applying control strategies and/or

employing analysis and computation mechanisms to recommend optimized machine settings and detect faults and

determine their cause.

5.2.2 Analysis Engine (AE) — a process that utilizes data and possibly operational instructions to produce a

response. In the context of this standard, this term is used to encompass the characteristics common to all PCS

functional groups.

5.2.3 context — a series of attributes that uniquely identifies a manufacturing entity (e.g., wafer, lot, module, tool,

reticle) and its status in the manufacturing operation.

5.2.4 Context Matching (CM) — the process of comparing and matching the values of a set of attributes that

represent the state of a system (e.g., process, product and equipment) to a set of stored or computed values. This is

usually done so that a unique action can be specified by the context matching system.

5.2.5 Fault Classification (FC) — the technique of determining the cause of a fault once it has been detected.

5.2.6 Fault Detection (FD) — the technique of monitoring and analyzing variations in tool and/or process data to

detect anomalies. Fault detection includes both univariate and multivariate statistical analysis techniques.

5.2.7 Fault Detection and Classification (FDC) — combination of FD & FC.

5.2.8 Fault Prediction (or Prognosis) (FP) — the technique of monitoring and analyzing variations in process data

to predict anomalies.

5.2.9 Functional Group (FG) — a collection of closely related software capabilities that one would expect to be

provided as an integrated product.

5.2.10 Process Control System Job (PCSJob) — a unit of work that could be tracked and have data associated with

it. In the context of this standard a process control system job is associated with a unit of work that a PCS Analysis

Engine performs; a unique identifier such as an ID number is often utilized to track the process control system job.

5.2.11 Process Control System (PCS)

— a system capable of performing Process Control, which includes one or

more of R2R Control, FD, FC, FP, SPC, or any future Process Control functionality defined in this standard for a

PCS functional group.

5.2.12 Run-to-Run (R2R) Control — the technique of modifying recipe parameters or the selection of control

parameters between runs to improve processing performance. A “run” can be a batch, lot, or an individual wafer.

5.2.13 Statistical Process Control (SPC) — the technique of using statistical methods to analyze process or product

metrics to take appropriate actions to achieve and maintain a state of statistical control and continuously improve the

process capability.

6 Background

6.1 With the development of process control system applications at the factory level and inside the equipment, it is

now apparent that the lack of interface standards for these applications has inhibited widespread adoption of process

control at the factory level. Moreover, adding process control and integrated metrology capabilities inside the tool

requires the ability for the factory level applications to collaborate with tool level applications.

7 Conventions

7.1 This section defines conventions followed in this document.

7.2 Object Modeling

7.2.1 Unified Modeling Language (UML) — This specification uses UML notation for all class diagrams and for

object diagrams provided as examples. No other types of diagrams are used in this specification.

7.2.2 UML class diagrams have clearly defined meanings and are a part of this specification. Detail contained in

these diagrams is not always repeated in the text.

1 APC and PCS terms are used interchangeably in some companies. Both can be seen as the umbrella of components for process control.

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7.2.3 Class Diagrams — UML Class Charts.

7.2.4 Name of a Class — The text capitalizes class names.

7.2.5 Abstract and Concrete Classes — Each class is specified as Abstract or Concrete. Abstract classes are not

directly implemented. In this specification “implemented” means represented to the factory through the

communications interface. All classes defined as concrete may be directly implemented. This specification does

not attempt to define equipment control system implementation. In UML class diagrams, abstract class names are

shown in italics.

7.2.6 Class Attribute Definition — The attributes of a class are defined in table format as illustrated in the table

below. Note that the “+” sign in front of attributes in UML class diagrams indicates “public” attributes. All

attributes defined in this specification are public.

Table 1 Attribute Table Format

Attribute Name Definition Access Reqd Form

RO, RW, or

Y or N See list below.

7.2.6.1 Access — Attributes may be settable (ReadWrite or RW) or not settable (ReadOnly or RO) through the

interface services. If the attribute refers to a component of a message (e.g., that is communicated to/from a PCS

analysis engine), the concept of access does not apply and “Not Applicable” (NA) is used in the Access field.

7.2.6.2 Reqd — Is this attribute required? Y — Yes, or N — No.

7.2.6.3 Form — Defines the data type of the attribute. Data types specified in the Process Control Systems

specification are described in the subsections that follow. Data types in this specification are high-level definitions

and should be mapped to the data types of a specific technology as appropriate. Extensions to the Process Control

System interface specifications are not limited to the list of data types defined in this specification. See the

definition of “Form” in the SEMI Compilation of Terms for other Form values commonly used in SEMI documents.

7.2.6.4 Constraints

7.2.6.4.1 Constraints in UML are shown with dotted lines, typically with a note attached to explain the constraint.

Constraints shown in this way tend to clutter large UML diagrams. Therefore, in this specification, constraints are

shown only on the diagrams focusing on individual classes.

7.2.7 UML Associations

7.2.7.1 The mechanism used for representing associations in UML between classes is implementation dependent.

This document is abstract in nature, and does not specify or imply any such mechanism. Any adjunct standard that

provides an implementation of this specification must include a description of the mechanism used for representing

UML associations used in this document.

7.2.8 Class Association Table — This table provides an example of the tables used to list and describe associations

between classes defined in this specification.

Table 2 Association Table Format

Association Role Name Role Definition Comments

7.2.8.1 Association Role Name — The name of the association role being defined.

7.2.8.2 Role Definition — Describes the function or purpose of the association.

7.2.8.3 Comments — Any additional comments or notes regarding the association.

7.2.9 Method Definition — The methods (in other words, the messages that comprise the external interface to an

object) supported by a PCS functional group are defined in table format as illustrated below.